飞秒激光微加工制备无衬底太赫兹带通滤波器
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摘要
利用时域有限差分法,仿真设计了三组具有不同中心频率的十字形太赫兹带通滤波器,并搭建了飞秒激光微加工系统,在单层铝箔上实现了无衬底太赫兹滤波器的加工。利用时域太赫兹光谱系统,对所加工的器件进行了透射率测试,实验和仿真结果高度吻合,所加工的太赫兹滤波器中心频率处的透射率为85%以上,达到商业化太赫兹滤波器水平。
Three groups of cross-shaped terahertz band-pass filters with different central frequencies are designed by using the finite difference time domain method. A femtosecond laser micro-machining system is built and the substrateless terahertz filter on a single-layered aluminum foil is fabricated. The transmissivities of these band-pass filters are tested by using the time-domain terahertz spectroscopy system. The experimental results are in a good agreement with the simulated results. All the transmissivities at central frequencies of these filters are over 85%, which reaches the commercial level of terahertz filters.
Three groups of cross-shaped terahertz band-pass filters with different central frequencies are designed by using the finite difference time domain method. A femtosecond laser micro-machining system is built and the substrateless terahertz filter on a single-layered aluminum foil is fabricated. The transmissivities of these band-pass filters are tested by using the time-domain terahertz spectroscopy system. The experimental results are in a good agreement with the simulated results. All the transmissivities at central frequencies of these filters are over 85%, which reaches the commercial level of terahertz filters.
引文
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[2]Oh S J,Kim S H,Jeong K,et al.Measurement depth enhancement in terahertz imaging of biological tissues[J].Optics Express,2013,21(18):21299-21305.
[3]Jia S,Yu X B,Hu H,et al.THz photonic wireless links with 16-QAM modulation in the 375-450 GHz band[J].Optics Express,2016,24(21):23777-23783.
[4]Yang Q,Deng B,Wang H Q,et al.Experimental research on imaging of precession targets with THz radar[J].Electronics Letters,2016,52(25):2059-2061.
[5]Li W,Kuang D F,Fan F,et al.Subwavelength Bshaped metallic hole array terahertz filter with In Sb bar as thermally tunable structure[J].Applied Optics,2012,51(29):7098-7102.
[6]Kim S H,Lee E S,Ji Y B,et al.Improvement of THz coupling using a tapered parallel-plate waveguide[J].Optics Express,2010,18(2):1289-1295.
[7]Xue C M,Liu J S,Zheng Z,et al.Terahertz filters[J].Laser&Optoelectronics Progress,2008,45(1):43-49.薛超敏,刘建胜,郑铮,等.太赫兹滤波器[J].激光与光电子学进展,2008,45(1):43-49.
[8]Munk B A.Frequency selective surfaces:Theory and design[M].New York:John Wiley&Sons Inc.,2000:1-2.
[9]Bergmair I,Dastmalchi B,Bergmair M,et al.Single and multilayer metamaterials fabricated by nanoimprint lithography[J].Nanotechnology,2011,22(32):325301.
[10]Das S,Reza K M,Habib M A.Frequency selective surface based bandpass filter for THz communication system[J].Journal of Infrared,Millimeter,and Terahertz Waves,2012,33(11):1163-1169.
[11]Li J,Shah C M,Withayachumnankul W,et al.Mechanically tunable terahertz metamaterials[J].Applied Physics Letters,2013,102(12):121101.
[12]Wang W T,Liu J J,Hong Z.Multiband terahertz filter based on three nested closed rings[J].Acta Optica Sinica,2013,33(3):0323001.王文涛,刘建军,洪治.基于三个方形封闭谐振环的多频带太赫兹滤波器[J].光学学报,2013,33(3):0323001.
[13]Ebrahimi A,Nirantar S,Withayachumnankul W,et al.Second-order terahertz bandpass frequency selective surface with miniaturized elements[J].IEEE Transactions on Terahertz Science and Technology,2015,5(5):761-769.
[14]Zhang X Q,Zhao G Z,Wang J.High pass filter based on metallic rectangular holes in terahertz frequency range[J].Laser&Optoelectronics Progress,2017,54(8):082302.张新群,赵国忠,王佳.太赫兹波段金属矩形孔高通滤波器[J].激光与光电子学进展,2017,54(8):082302.
[15]Nan X L,Zhang B Z,Cui J L,et al.Facile design and rapid fabrication of a nearly-square ridge filter[J].Journal of Infrared and Millimeter Waves,2017,36(1):30-34.南雪莉,张斌珍,崔建利,等.一种近方脊滤波器的设计与快速制造[J].红外与毫米波学报,2017,36(1):30-34.
[16]Walia S,Shah C M,Gutruf P,et al.Flexible metasurfaces and metamaterials:A review of materials and fabrication processes at micro-and nano-scales[J].Applied Physics Reviews,2015,2(1):011303.
[17]Cao X W,Zhang L,Yu Y S,et al.Application of microoptical components fabricated with femtosecond laser[J].Chinese Journal of Lasers,2017,44(1):0102004.曹小文,张雷,于永森,等.飞秒激光制备微光学元件及其应用[J].中国激光,2017,44(1):0102004.
[18]Kuznetsov S A,Navarro-Cía M,Kubarev V V,et al.Regular and anomalous extraordinary optical transmission at the THz-gap[J].Optics Express,2009,17(14):11730-11738.