具有两个双轴柔性铰链的快速反射镜设计
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摘要
为了改善快速反射镜(FSM)对车载运动平台振动、冲击环境的适应性,设计了一款具有中心和四周两个双轴柔性铰链支撑结构的FSM。在明确车载跟瞄发射系统应用需求的基础上,分别对FSM的平面反射镜、驱动元件、测角元件和柔性铰链进行了详细设计和选择。采用两两差分的方法对四通道电涡流传感器的测量噪声进行抑制,有效保证了FSM的测量精度。采用有限元分析的方法对中心和四周柔性铰链的模态和刚度进行分析与优化设计,有利保证了FSM控制带宽的提高。完成FSM的精密加工、装调后,对系统的指向精度、控制带宽和阶跃响应时间进行了实验测试分析。结果表明,所设计FSM的指向精度优于1″,闭环控制带宽大于200 Hz,阶跃响应时间约为10 ms,满足车载平台系统的应用需求。
To improve the adaptability to vibrancy and impact condition on the vehicle platform, a fast steering mirror(FSM) with the center and outer double-axis flexure hinges is designed. Based on the basis of application requirements of the vehicle track-launch system, the lightweight mirror, actuators, sensors for angle and flexure hinges of FSM are designed and selected, respectively. The eddy current sensors with four channels, which measurement noise is suppressed by using difference data of two channels, are used to improve measurement accuracy of FSM. Mode and stiffness of the combined hinges with center and outer flexure hinges are analyzed by the finite element method and two flexure hinges are designed optimally, which are beneficial to improve the control bandwidth of FSM system. Finally, the pointing precision, control bandwidth and step response time of FSM are tested respectively after fine manufacturing and assembling. Experimental results show that the pointing error of the FSM is less than 1″, the control bandwidth is more than 200 Hz, and the step response time is about 10 ms. Hence, the designed FSM with two double-axis flexure hinges can meet the application requirements of vehicle track-launch system.
To improve the adaptability to vibrancy and impact condition on the vehicle platform, a fast steering mirror(FSM) with the center and outer double-axis flexure hinges is designed. Based on the basis of application requirements of the vehicle track-launch system, the lightweight mirror, actuators, sensors for angle and flexure hinges of FSM are designed and selected, respectively. The eddy current sensors with four channels, which measurement noise is suppressed by using difference data of two channels, are used to improve measurement accuracy of FSM. Mode and stiffness of the combined hinges with center and outer flexure hinges are analyzed by the finite element method and two flexure hinges are designed optimally, which are beneficial to improve the control bandwidth of FSM system. Finally, the pointing precision, control bandwidth and step response time of FSM are tested respectively after fine manufacturing and assembling. Experimental results show that the pointing error of the FSM is less than 1″, the control bandwidth is more than 200 Hz, and the step response time is about 10 ms. Hence, the designed FSM with two double-axis flexure hinges can meet the application requirements of vehicle track-launch system.
引文
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[2] 王槐, 代霜, 范磊, 等. 可见光粗跟踪成像镜头光机结构设计[J]. 仪器仪表学报, 2017,38(5): 1190-1197.WANG H, DAI SH, FAN L, et al. Opto-mechanical structure design of visible light rough tracking and imaging lens [J]. Chinese Journal of Scientific Instrument, 2017, 38(5): 1190-1197.
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[7] LIN M, ZHANG X M, SERGEJ F. Design and analysis of a multi-notched flexure hinge for compliant mechanisms [J]. Precision Engineering, 2017(48): 292-304.
[8] 王帅, 吴庆林, 张斌, 等. 用于快速反射镜的压电陶瓷驱动系统设计[J]. 电子测量技术, 2015,46(7): 6-10.WANG S, WU Q L, ZHANG B, et al. Design of the PZT driver system for fast steering mirror [J]. Electronic Measurement Technology, 2015, 46(7): 6-10.
[9] NAM B U, GIMM H K, KANG D W, et al. Design and analysis of a tip-tilt guide mechanism for the fast steering of a large-scale mirror [J]. Optical Engineering, 2016, 55(10): 106120.
[10] 高铎瑞, 李天伦, 孙悦, 等. 空间激光通信最新进展与发展趋势[J]. 中国光学, 2018,11(6): 901-913.GAO D R, LI T L, SUN Y, et al. Latest developments and trends of space laser communication [J]. Editorial Committee of Chinese Optics, 2018, 11(6): 901-913.
[11] 徐新行, 王恒坤, 韩旭东, 等. 机载小型化快速反射镜用微位移测量传感器设计[J]. 仪器仪表学报, 2015,36(9): 1937-1944.XU X H, WANG H K, HAN X D, et al. Design of displacement sensor for fast steering mirror with small volume on airborne platform [J]. Chinese Journal of Scientific Instrument, 2015, 36(9): 1937-1944.
[12] 陈炜, 孔建寿, 刘宗凯. 反射镜片高度对快反镜测量误差的影响及补偿[J].国外电子测量技术, 2017, 36(12):24- 27.CHEN W, KONG J SH, LIU Z K. Effect and compensation of the reflector len′ height on the measurement error of fast steering mirror [J]. Electronic Measurement Technology, 2017, 36(12): 24- 27.
[13] 王帅,曹玉岩. 音圈电机型快速反射镜的驱动控制系统设计[J]. 电子测量与仪器学报, 2018, 32(7):1115-1121.WANG SH, CAO Y Y. Design of control system for fast steering mirror driven by voice coil actuator [J]. Journal of Electronic Measurement and Instrumentation, 2018, 32(7): 1115-1121.
[14] 刘凉, 赵新华, 王收军, 等. 空间刚柔耦合并联机构的逆动力学建模与控制[J]. 光学精密工程, 2018,26(1): 95-104.LIU L, ZHAO X H, WANG SH J, et al. Inverse dynamic modeling and control of spatial rigid-flexible parallel manipulator [J]. Optics and Precision Engineering, 2018, 26(1): 95-104.
[15] LONG Y J, WEI X H, WANG C L, et al. Modeling and design of a normal stress electromagnetic actuator with linear characteristics for fast steering mirror [J]. Optical Engineering, 2014, 53(5): 054102.
[16] 钟相强, 黄卫清, 张轩, 等. 二级杠杆柔性铰链复合结构的双足压电直线电机[J]. 光学精密工程, 2018,26(1): 86-94.ZHONG X Q, HUANG W Q, ZHANG X, et al. Double-foot piezoelectric linear motor with secondary lever and flexure hinge composite structure [J]. Optics and Precision Engineering, 2018, 26(1): 86-94.
[17] 董世则, 郭抗, 李显凌, 等. 光学元件狭缝柔性调节机构的设计与分析[J]. 中国光学, 2017,10(6): 790-797.DONG SH Z, GUO K, LI X L, et al. Design and analysis of adjustment mechanism with slit diaphragm flexures for optical elements [J]. Chinese Optics, 2017, 10(6): 790-797.
[18] 李耀, 吴洪涛, 杨小龙, 等. 圆弧柔性铰链的优化设计[J]. 光学精密工程, 2018,26(6): 1370-1379.LI Y, WU H T, YANG X L, et al. Optimization design of circular flexure hinges [J]. Optics and Precision Engineering, 2018, 26(6): 1370-1379.
[19] CHO M, JUN Y, DRIBUSCH C, et al. Design of the fast steering secondary mirror assembly for the giant magellan telescope [C]. Proceedings Of SPIE, 2018: 1070607.
[20] NI Y X, WU J B, SAN X G, et al. Deflection angle detecting system for the large-angle and high-linearity fast steering mirror using quadrant detector [J]. Optical Engineering, 2018, 57(2): 024110.
[21] AIGOUY G, BENOIT K, BETSCH E, et al. Development of magnetic fast steering mirror prototype for optical pointing applications [C]. 16th International Conference on New Actuators, 2018: 559- 562.
[22] ZHU W, BIAN L X, AN Y, et al. Modeling and control of a two-axis faststeering mirror with piezoelectric stackactuators for laser beam tracking [J]. Smart Materials and Structures, 2015(24): 075014.
[2] 王槐, 代霜, 范磊, 等. 可见光粗跟踪成像镜头光机结构设计[J]. 仪器仪表学报, 2017,38(5): 1190-1197.WANG H, DAI SH, FAN L, et al. Opto-mechanical structure design of visible light rough tracking and imaging lens [J]. Chinese Journal of Scientific Instrument, 2017, 38(5): 1190-1197.
[3] 程龙, 陈娟, 陈茂胜, 等. 光电跟踪系统快速捕获时间最优滑模控制技术[J]. 光学精密工程, 2017,25(1): 148-154.CHENG L, CHEN J, CHEN M SH, et al. Fast acquisition of time optimal sliding model control technology for photoelectric tracking system [J]. Optics and Precision Engineering, 2017, 25(1): 148-154.
[4] 陈健, 王伟国, 刘廷霞, 等. 美军新型机载光电瞄准系统工作原理分析[J]. 中国光学, 2017,10(6): 777-782.CHEN J, WANG W G, LIU T X, et al. The operational principle analysis of new airborne electro-optical targeting system(EOTS) of US army [J]. Chinese Optics, 2017, 10(6): 777-782.
[5] XIONG Z J, LI Q, LIU L, et al. Fast steering mirror and michelson interferometer based laser beam pointing and steering [C]. IEEE 8th International Conference on CIS & RAM, 2017: 815- 819.
[6] 李贤涛, 张晓沛, 毛大鹏, 等. 高精度音圈快速反射镜的自适应鲁棒控制[J]. 光学精密工程, 2017,25(9): 2428- 2436.LI X T, ZHANG X P, MAO D P, et al. Adaptive robust control over high-performance VCM-FSM [J]. Optics and Precision Engineering, 2017, 25(9): 2428- 2436.
[7] LIN M, ZHANG X M, SERGEJ F. Design and analysis of a multi-notched flexure hinge for compliant mechanisms [J]. Precision Engineering, 2017(48): 292-304.
[8] 王帅, 吴庆林, 张斌, 等. 用于快速反射镜的压电陶瓷驱动系统设计[J]. 电子测量技术, 2015,46(7): 6-10.WANG S, WU Q L, ZHANG B, et al. Design of the PZT driver system for fast steering mirror [J]. Electronic Measurement Technology, 2015, 46(7): 6-10.
[9] NAM B U, GIMM H K, KANG D W, et al. Design and analysis of a tip-tilt guide mechanism for the fast steering of a large-scale mirror [J]. Optical Engineering, 2016, 55(10): 106120.
[10] 高铎瑞, 李天伦, 孙悦, 等. 空间激光通信最新进展与发展趋势[J]. 中国光学, 2018,11(6): 901-913.GAO D R, LI T L, SUN Y, et al. Latest developments and trends of space laser communication [J]. Editorial Committee of Chinese Optics, 2018, 11(6): 901-913.
[11] 徐新行, 王恒坤, 韩旭东, 等. 机载小型化快速反射镜用微位移测量传感器设计[J]. 仪器仪表学报, 2015,36(9): 1937-1944.XU X H, WANG H K, HAN X D, et al. Design of displacement sensor for fast steering mirror with small volume on airborne platform [J]. Chinese Journal of Scientific Instrument, 2015, 36(9): 1937-1944.
[12] 陈炜, 孔建寿, 刘宗凯. 反射镜片高度对快反镜测量误差的影响及补偿[J].国外电子测量技术, 2017, 36(12):24- 27.CHEN W, KONG J SH, LIU Z K. Effect and compensation of the reflector len′ height on the measurement error of fast steering mirror [J]. Electronic Measurement Technology, 2017, 36(12): 24- 27.
[13] 王帅,曹玉岩. 音圈电机型快速反射镜的驱动控制系统设计[J]. 电子测量与仪器学报, 2018, 32(7):1115-1121.WANG SH, CAO Y Y. Design of control system for fast steering mirror driven by voice coil actuator [J]. Journal of Electronic Measurement and Instrumentation, 2018, 32(7): 1115-1121.
[14] 刘凉, 赵新华, 王收军, 等. 空间刚柔耦合并联机构的逆动力学建模与控制[J]. 光学精密工程, 2018,26(1): 95-104.LIU L, ZHAO X H, WANG SH J, et al. Inverse dynamic modeling and control of spatial rigid-flexible parallel manipulator [J]. Optics and Precision Engineering, 2018, 26(1): 95-104.
[15] LONG Y J, WEI X H, WANG C L, et al. Modeling and design of a normal stress electromagnetic actuator with linear characteristics for fast steering mirror [J]. Optical Engineering, 2014, 53(5): 054102.
[16] 钟相强, 黄卫清, 张轩, 等. 二级杠杆柔性铰链复合结构的双足压电直线电机[J]. 光学精密工程, 2018,26(1): 86-94.ZHONG X Q, HUANG W Q, ZHANG X, et al. Double-foot piezoelectric linear motor with secondary lever and flexure hinge composite structure [J]. Optics and Precision Engineering, 2018, 26(1): 86-94.
[17] 董世则, 郭抗, 李显凌, 等. 光学元件狭缝柔性调节机构的设计与分析[J]. 中国光学, 2017,10(6): 790-797.DONG SH Z, GUO K, LI X L, et al. Design and analysis of adjustment mechanism with slit diaphragm flexures for optical elements [J]. Chinese Optics, 2017, 10(6): 790-797.
[18] 李耀, 吴洪涛, 杨小龙, 等. 圆弧柔性铰链的优化设计[J]. 光学精密工程, 2018,26(6): 1370-1379.LI Y, WU H T, YANG X L, et al. Optimization design of circular flexure hinges [J]. Optics and Precision Engineering, 2018, 26(6): 1370-1379.
[19] CHO M, JUN Y, DRIBUSCH C, et al. Design of the fast steering secondary mirror assembly for the giant magellan telescope [C]. Proceedings Of SPIE, 2018: 1070607.
[20] NI Y X, WU J B, SAN X G, et al. Deflection angle detecting system for the large-angle and high-linearity fast steering mirror using quadrant detector [J]. Optical Engineering, 2018, 57(2): 024110.
[21] AIGOUY G, BENOIT K, BETSCH E, et al. Development of magnetic fast steering mirror prototype for optical pointing applications [C]. 16th International Conference on New Actuators, 2018: 559- 562.
[22] ZHU W, BIAN L X, AN Y, et al. Modeling and control of a two-axis faststeering mirror with piezoelectric stackactuators for laser beam tracking [J]. Smart Materials and Structures, 2015(24): 075014.