Nd∶YAG板条激光增益模块真空焊接工艺研究
|
摘要
传导冷却型Nd∶YAG板条激光放大器通常要把大尺寸晶体与微通道热沉焊接在一起,提高散热能力。为获得高光束质量的激光输出,要求焊面的空洞率越低越好,以降低Nd∶YAG板条激光增益模块在工作时产生的热畸变,本文提出了一种实现Nd∶YAG板条激光增益模块大面积无空洞焊接的工艺。在真空辐射加热条件下,使用精密行程控制系统调整热沉和Nd∶YAG板条激光增益介质之间焊接缝隙大小。通过对模拟件超声波扫描图的对比分析,使用精密行程控制系统调整焊接缝隙大小的焊接设计实现了大面积低空洞的连接,有效焊接面积达到98. 9%。利用该工艺封装的增益模块进行了激光实验,在11kW泵浦光注入情况下,模块动态波前畸变减小了22%,表明新的焊接工艺可以提高Nd∶YAG板条激光增益模块的输出激光功率和光束质量。
Conducting cooling Nd ∶ YAG slab laser amplifiers usually require large crystals to be welded together with micro channel heat sink to improve heat dissipation. In order to obtain the laser output with high beam quality,it is required that the void rate of the welding surface should be as low as possible,so as to reduce the thermal distortion generated by Nd ∶ YAG slab laser module in operation. In this paper,a welding process of large size Nd ∶ YAG slab laser module with low void welding is presented. In the vacuum radiation heating condition,the accurate travel control system is used to adjust the welding gap between slab and heat sink. Through the comparison and analysis of the ultrasonic scanning images of the simulated parts,the connection of large area and lower void welding was realized by using the welding design of adjusting the welding gap size with the accurate travel control system,and the effective welding area reached 98. 9%. The laser experiment was carried out. Under the condition of 11 kW pump light injection,the dynamic wavefront distortion of the Nd ∶ YAG slab laser module was reduced by 22%,indicating that the new welding process could improve the output laser power and beam quality of slab laser module.
Conducting cooling Nd ∶ YAG slab laser amplifiers usually require large crystals to be welded together with micro channel heat sink to improve heat dissipation. In order to obtain the laser output with high beam quality,it is required that the void rate of the welding surface should be as low as possible,so as to reduce the thermal distortion generated by Nd ∶ YAG slab laser module in operation. In this paper,a welding process of large size Nd ∶ YAG slab laser module with low void welding is presented. In the vacuum radiation heating condition,the accurate travel control system is used to adjust the welding gap between slab and heat sink. Through the comparison and analysis of the ultrasonic scanning images of the simulated parts,the connection of large area and lower void welding was realized by using the welding design of adjusting the welding gap size with the accurate travel control system,and the effective welding area reached 98. 9%. The laser experiment was carried out. Under the condition of 11 kW pump light injection,the dynamic wavefront distortion of the Nd ∶ YAG slab laser module was reduced by 22%,indicating that the new welding process could improve the output laser power and beam quality of slab laser module.
引文
[1]Zhou Shouhuan,Zhao Hong,Tang Xiaojun.High average power laser diode pumped solid-state laser[J].Chinese J.Lasers,2009,36(7):1605-1618.
[2]Martin W S,Chenoch J P.Mutiple internal reflection face pumped laser:U.S.3633126[P].1972.
[3]Koechner W..Solid-State Engineering[M].New York:Springer Verlag Berlin Heidelberg,1999.391-405.
[4]Eggleston J M,Kane T J,Kuhn K,et al.The slab geometry part I:theory[J].IEEE J.Quantum Electron.,1984,QE 20:289-301.
[5]Kane T J,Eggleston J M,Byer R L.The slab geometry part II:thermal effects in a finite slab[J].IEEE J.Quantumn Electron.,1985,QE21:1195-1210.
[6]Northrop Grumman corporation,Photo release-Northrop Grumman scales new heights in electric laser power,achieves 100 kilowatts froma solid-state laser[EB/OL].Redoudo Beach,Calif.,Mar.18,2009.
[7]Wang Chao,Tang xiaojun,Xuliujing,et al.Investigation on thermal effect of high power slab laser with 11 k W[J].Chinese Journal of Lasers,2010,37(11):2807-2809.(in Chinese)王超,唐晓军,徐鎏婧,等.输出功率11 k W的高功率固体板条激光器介质热分析[J].中国激光,2011,37(11):2807-2809.
[8]LEI Xiang,DONG Lizhi,YANG Ping,et al.Diagnostic method of wavefront aberration for gain mediums in slab lasers[J].High Power Laser and Particle Beams,2012,24(7):1651-1655.(in Chinese)雷翔,董理治,杨平,等.板条增益介质波前畸变诊断方法[J].强激光与粒子束,2012,24(7):1651-1655.
[9]L.Bernstein.Semiconductor Joining by SLID Process:I.the systems Ag-In,Au-In and Cu-In[J].ElectrochemSoc.,1966(113):1282-1288.
[2]Martin W S,Chenoch J P.Mutiple internal reflection face pumped laser:U.S.3633126[P].1972.
[3]Koechner W..Solid-State Engineering[M].New York:Springer Verlag Berlin Heidelberg,1999.391-405.
[4]Eggleston J M,Kane T J,Kuhn K,et al.The slab geometry part I:theory[J].IEEE J.Quantum Electron.,1984,QE 20:289-301.
[5]Kane T J,Eggleston J M,Byer R L.The slab geometry part II:thermal effects in a finite slab[J].IEEE J.Quantumn Electron.,1985,QE21:1195-1210.
[6]Northrop Grumman corporation,Photo release-Northrop Grumman scales new heights in electric laser power,achieves 100 kilowatts froma solid-state laser[EB/OL].Redoudo Beach,Calif.,Mar.18,2009.
[7]Wang Chao,Tang xiaojun,Xuliujing,et al.Investigation on thermal effect of high power slab laser with 11 k W[J].Chinese Journal of Lasers,2010,37(11):2807-2809.(in Chinese)王超,唐晓军,徐鎏婧,等.输出功率11 k W的高功率固体板条激光器介质热分析[J].中国激光,2011,37(11):2807-2809.
[8]LEI Xiang,DONG Lizhi,YANG Ping,et al.Diagnostic method of wavefront aberration for gain mediums in slab lasers[J].High Power Laser and Particle Beams,2012,24(7):1651-1655.(in Chinese)雷翔,董理治,杨平,等.板条增益介质波前畸变诊断方法[J].强激光与粒子束,2012,24(7):1651-1655.
[9]L.Bernstein.Semiconductor Joining by SLID Process:I.the systems Ag-In,Au-In and Cu-In[J].ElectrochemSoc.,1966(113):1282-1288.