白光光源光谱对白光干涉信号的影响
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摘要
传统白光光源一般由一个纯高斯函数来进行模拟,通过改变中心波长和带宽来调节干涉信号.本文分别利用高斯模型和洛伦兹模型来讨论白光干涉信号,得出中心波长与相干长度的比值越大,零级条纹可见性越高,以及高斯模型的可靠范围.鉴于现代白光光源与传统光源不同,以发光二极管(LED)为例,模拟研究现代白光光源对白光干涉信号的影响.利用洛伦兹模型模拟白色LED光源时干涉信号存在凹陷,通过合理调整LED拟合光峰值间的距离降低凹陷对零级条纹的影响,以期得到在实际应用中干涉特性较优的白光光源光谱.
Traditional white light sources are typically modeled by a pure Gaussian function,which adjust the interference signal by changing the center wavelength and bandwidth.In this paper,the Gaussian model and the Lorentzian model are used to discuss the white light interference signals,respectively.The larger the ratio of the central wavelength to the coherence length is,the higher the visibility of the zero-order fringes.The reliable range of the Gaussian model is also obtained.In view of the difference between modern white light source and traditional light source,the white LED is used as an example to simulate the influence of modern white light source on white light interference signal.When the Lorentz model is used,the interference signal has a depression.Furthermore,by adjusting the distance between the peaks of the LED fitting light properly,the influence of the depression on the zero order fringes is reduced in order to acquire a better white light source spectrum with interference properties in practical application.
Traditional white light sources are typically modeled by a pure Gaussian function,which adjust the interference signal by changing the center wavelength and bandwidth.In this paper,the Gaussian model and the Lorentzian model are used to discuss the white light interference signals,respectively.The larger the ratio of the central wavelength to the coherence length is,the higher the visibility of the zero-order fringes.The reliable range of the Gaussian model is also obtained.In view of the difference between modern white light source and traditional light source,the white LED is used as an example to simulate the influence of modern white light source on white light interference signal.When the Lorentz model is used,the interference signal has a depression.Furthermore,by adjusting the distance between the peaks of the LED fitting light properly,the influence of the depression on the zero order fringes is reduced in order to acquire a better white light source spectrum with interference properties in practical application.
引文
[1]Guo T,Hu C G,Chen J P,et al.Vertical scanning white light interference for dimensional characterization of micro-electromechanical system devices[J].Acta Optica Sinica,2007,27(4):668-672.
[2]Servin M,Rodriguez-Vera R,Moore A J.A robust cellular processor for phase unwrapping[J].Modern Optics,1994,41(1):119-127.
[3]Baldi A,Bertolino F,Ginesu F.On the performance of some unwrapping algorithms[J].Optics and Lasers in Engineering,2002,37:313-330.
[4]Harasaki A,Wyant J C.Fringe modulation skewing effect in white-light vertical scannning interferometry[J]Applied Optics,2000,39(13):2101-2106.
[5]何永辉,蒋剑峰,赵万生.基于扫描白光干涉法的表面三维轮廓仪[J].光学技术,2001,27(2):150-155.
[6]朱凯翔,徐平,焦洪臣,等.傅里叶变换光谱仪用于白光光谱测量的实验设计[J].大学物理,2014,33(6):47-50.
[7]招倩儿,于国萍.光源非单色性对干涉条纹可见度影响的微机模拟[J].大学物理,1993,12(10):17-18.
[8]赵凯华,钟锡华.光学(上册)[M].北京:北京大学出版社,1984:323-327.
[9]Kino G S,Chim S S C.Mirau correlation microscope[J].Applied Optics,1990,29(26):3775-3783.
[10]Chen S,Palmer A W,Grattan K T V.Digital signal processing techniques for electronically scannedoptical fiber white-light interferometry[J].Applied Optics,1992,31(28):6003-6010.
[11]Deck L,Groot P D.High-speed noncontact profiler based on scanning.white-light interferometry[J].Applied Optics,1994,33(31):7334-7338.
[12]Groot P D,Deck L.Surface profiling by analysis of white-light interferograms in the spatial frequency domain[J].Modern Optics,1995,42(2):389-401.
[13]Wang D N,Ning T N,Grattank Y V.Optimized multiwavelength combination sources for interferometric use[J].Applied Optics,1994,33(31):7326-7333.
[14]Sheppard C J R,Larkin K G.Effect of numerical aperture on interference fringe spacing[J].Applied Optics,1995,34(22):4731-4374.
[15]De G P,de Lega X C.Signal modeling for low-coherence height-scanning interference microscopy[J].Applied Optics,2004,43(25):4821-4830.
[16]Chong W K,Li X,Soh Y C.Spectral effects of dual wavelength low coherence light source in white light interferometry[J].Optics and Lasers in Engineering,2013,51(6):651-655.
[2]Servin M,Rodriguez-Vera R,Moore A J.A robust cellular processor for phase unwrapping[J].Modern Optics,1994,41(1):119-127.
[3]Baldi A,Bertolino F,Ginesu F.On the performance of some unwrapping algorithms[J].Optics and Lasers in Engineering,2002,37:313-330.
[4]Harasaki A,Wyant J C.Fringe modulation skewing effect in white-light vertical scannning interferometry[J]Applied Optics,2000,39(13):2101-2106.
[5]何永辉,蒋剑峰,赵万生.基于扫描白光干涉法的表面三维轮廓仪[J].光学技术,2001,27(2):150-155.
[6]朱凯翔,徐平,焦洪臣,等.傅里叶变换光谱仪用于白光光谱测量的实验设计[J].大学物理,2014,33(6):47-50.
[7]招倩儿,于国萍.光源非单色性对干涉条纹可见度影响的微机模拟[J].大学物理,1993,12(10):17-18.
[8]赵凯华,钟锡华.光学(上册)[M].北京:北京大学出版社,1984:323-327.
[9]Kino G S,Chim S S C.Mirau correlation microscope[J].Applied Optics,1990,29(26):3775-3783.
[10]Chen S,Palmer A W,Grattan K T V.Digital signal processing techniques for electronically scannedoptical fiber white-light interferometry[J].Applied Optics,1992,31(28):6003-6010.
[11]Deck L,Groot P D.High-speed noncontact profiler based on scanning.white-light interferometry[J].Applied Optics,1994,33(31):7334-7338.
[12]Groot P D,Deck L.Surface profiling by analysis of white-light interferograms in the spatial frequency domain[J].Modern Optics,1995,42(2):389-401.
[13]Wang D N,Ning T N,Grattank Y V.Optimized multiwavelength combination sources for interferometric use[J].Applied Optics,1994,33(31):7326-7333.
[14]Sheppard C J R,Larkin K G.Effect of numerical aperture on interference fringe spacing[J].Applied Optics,1995,34(22):4731-4374.
[15]De G P,de Lega X C.Signal modeling for low-coherence height-scanning interference microscopy[J].Applied Optics,2004,43(25):4821-4830.
[16]Chong W K,Li X,Soh Y C.Spectral effects of dual wavelength low coherence light source in white light interferometry[J].Optics and Lasers in Engineering,2013,51(6):651-655.