大气压Ar/NH_3/H_2O等离子体射流放电特性
|
摘要
为提高等离子体射流在材料表面处理、环境保护及消毒灭菌等领域中的应用效果,通过在大气压Ar等离子体射流中添加适量NH_3/H_2O气体,增强等离子体射流活性。利用发射光谱诊断和发光图像拍摄,研究Ar/NH_3/H_2O等离子体射流NH、OH、O等强氧化性粒子发射光谱强度及射流长度随外加电压和添加气体含量的变化规律,测量相应条件下电压电流波形和Lissajous图形,并对实验结果做机理分析与讨论。研究结果表明,Ar/NH_3/H_2O等离子体射流主要产生Ar、N_2、NH、OH和O等粒子。随外加电压增大,NH、OH和O等粒子谱线强度、射流长度、放电功率和传输电荷均随之增大。当NH_3在Ar/NH_3气体体系中体积分数达到0.012 5%时,NH自由基发射光谱强度达到最大。在此条件下添加H_2O,发现当H_2O体积分数达到0.25%时,OH和O粒子谱线强度达到最大,比Ar/NH_3放电时OH和O粒子谱线强度分别增加了104.4%和55.8%,而NH粒子谱线强度则下降了18.7%,此时等离子体射流中氧化性粒子(NH、OH和O)总发射光谱强度达到最大,更有利于在材料亲水改性和消毒灭菌等方面应用。
To enhance the treatment effects of the atmospheric pressure plasma jet(APPJ) in the fields of material surface treatment, environmental protection, and disinfection sterilization, etc., NH_3/H_2O were added to the Ar APPJ to improve the activity of the APPJ. The optical emission spectral intensities of NH, OH and O and the length of the plasma plume were investigated at various applied voltages and NH_3/H_2O ratios by optical emission spectra diagnosis and light-emission images observation. The voltage-current waveforms and Lissajous figures were also recorded correspondingly. Results showed that the main species produced by APPJ in Ar/NH_3/H_2O included Ar, N_2, NH, OH, and O. As the applied voltage increased, the emission spectral intensities of NH, OH and O, the length of the plasma plume, discharge power and transported charges all increased. When the added NH_3 reached 0.012 5% in the Ar/NH_3 mixed gas, the emission spectral intensity of NH reached the maximum.,When H_2O was added under this condition, it was found that the emission spectral intensities of OH and O reached the maximum values when the water vapor content was 0.25% and the emission spectral intensities of OH and O increased by 104.4% and 55.8% as compared with those of APPJ in Ar/NH_3, while the emission spectral intensity of NH decreased by 18.7%. The overall emission spectral intensities of the oxidizing particles(NH, OH and O) in Ar APPJ reached the maximum, and it should be more favorable for applications in materials hydrophilic modification and disinfection sterilization, etc.
To enhance the treatment effects of the atmospheric pressure plasma jet(APPJ) in the fields of material surface treatment, environmental protection, and disinfection sterilization, etc., NH_3/H_2O were added to the Ar APPJ to improve the activity of the APPJ. The optical emission spectral intensities of NH, OH and O and the length of the plasma plume were investigated at various applied voltages and NH_3/H_2O ratios by optical emission spectra diagnosis and light-emission images observation. The voltage-current waveforms and Lissajous figures were also recorded correspondingly. Results showed that the main species produced by APPJ in Ar/NH_3/H_2O included Ar, N_2, NH, OH, and O. As the applied voltage increased, the emission spectral intensities of NH, OH and O, the length of the plasma plume, discharge power and transported charges all increased. When the added NH_3 reached 0.012 5% in the Ar/NH_3 mixed gas, the emission spectral intensity of NH reached the maximum.,When H_2O was added under this condition, it was found that the emission spectral intensities of OH and O reached the maximum values when the water vapor content was 0.25% and the emission spectral intensities of OH and O increased by 104.4% and 55.8% as compared with those of APPJ in Ar/NH_3, while the emission spectral intensity of NH decreased by 18.7%. The overall emission spectral intensities of the oxidizing particles(NH, OH and O) in Ar APPJ reached the maximum, and it should be more favorable for applications in materials hydrophilic modification and disinfection sterilization, etc.
引文
[1]邵涛,章程,王瑞雪,等.大气压脉冲气体放电与等离子体应用[J].高电压技术,2016,42(3):685-705.SHAOTao,ZHANGCheng,WANGRuixue,etal.Atmospheric-pressurepulsedgasdischargeandpulsedplasmaapplication[J].High Voltage Engineering, 2016, 42(3):685-705.
[2]张若兵,陈致远,李爽,等.电源形式对大气压等离子体射流和染污硅橡胶憎水性增强效果的影响[J].高电压技术,2018,44(5):1507-1512.ZHANG Ruobing, CHEN Zhiyuan, LI Shuang, et al. Effect of different forms of power supplies on atmospheric pressure plasma jets and enhancementofhydrophobicityofcontaminatedsiliconerubber[J].High Voltage Engineering, 2018, 44(5):1507-1512.
[3]方志,张波,周若瑜,等. HMDSO添加对大气压Ar等离子体射流阵列放电特性的影响[J].高电压技术,2017,43(6):1775-1783.FANG Zhi, ZHANG Bo, ZHOU Ruoyu, et al. Effect of HMDSO additionondischargecharacteristicsofatmosphericpressureplasmajet array in argon[J]. High Voltage Engineering, 2017, 43(6):1775-1783.
[4]方志,张波,阮陈.大气压He中2维射流阵列放电特性的影响因素[J].高电压技术,2016,42(4):1151-1158.FANGZhi,ZHANGBo,RUANChen.Factorinfluencingondischargecharacteristicsoftow-dimensionaljetarrayinHeat atmosphericpressure[J].HighVoltageEngineering,2016,42(4):1151-1158.
[5]郝致远,高博,吴波,等.基于锥形管的环-板电极结构大气压等离子体射流特性[J].高电压技术,2014,40(10):3098-3104.HAO Zhiyuan, GAO Bo, WU Bo, et al. Characteristics of Ar atmosphericpressureplasmajetgeneratedbyring-planeelectrodeswith tapered tube[J]. High Voltage Engineering. 2014, 40(10):3098-3104.
[6]卢新培.等离子体射流及其医学应用[J].高电压技术,2011,37(6):1416-1425.LUXinpei.Plasmajetsandtheirbiomedicalapplication[J].High Voltage Engineering, 2011, 37(6):1416-1425.
[7]JINY,RENCS,FANQQ,etal.Surfacecleaningusinganatmospheric-pressure plasma jet in O2/Ar mixtures[J]. IEEE Transactions on Plasma Science, 2012, 40(10):2706-2710.
[8]刘欣宇,刘大伟.大气压非平衡等离子体射流活性粒子产生机制[J].高电压技术,2016,42(2):452-461.LIU Xinyu, LIU Dawei. Production mechanism of reactive species in atmosphere pressure non-equilibrium plasma jet[J]. High Voltage Engineering, 2016, 42(2):452-461.
[9]LIUDX, SUNB W,IZA F,etal.Mainspeciesandchemicalpathwaysincoldatmospheric-pressureAr+H2Oplasmas[J].Plasma Sources Science and Technology, 2017, 26(4):045009.
[10]KEIDAR M. Plasma for cancer treatment[J]. Plasma Sources Science&Technology, 2015, 24(3):033001.
[11]沈洁,程诚,方世东,等.大气压等离子体射流对细菌芽孢灭活机理研究[J].真空科学与技术学报,2013,33(9):888-892.SHEN Jie, CHENG Cheng, FANG Shidong, et al. Inaction mechanism of bacteria spore with atmospheric pressure plasma[J]. Chinese Journal of Vacuum Science and Technology, 2013, 33(9):888-892.
[12]吴淑群,董熙,裴学凯,等.基于激光诱导荧光法诊断大气压低温等离子体射流中OH自由基和O原子的时空分布[J].电工技术学报,2017,32(8):82-94.WU Shuqun, DONG Xi, PEI Xuekai, et al. Laser induced fluorescence diagnostics of the temporal and spatial distribution of OH radicals and Oatominalowtemperatureplasmajetatatmosphericpressure[J].Transactions of China Electrotechnical Society, 2017, 32(8):82-94
[13]XIONG Q, NIKIFOROV A Y, LI L, et al. Absolute OH density determination by laser induced fluorescence spectroscopy in an atmospheric pressureRFplasma[J].EuropeanPhysicalJournalD,2012,66(11):1-8.
[14]CHANG Z, YAO C, CHEN S, et al. Electrical and optical properties ofAr/NH3atmosphericpressureplasmajet[J].PhysicsofPlasmas,2016, 23(9):57-62.
[15]QIAN M, LIU S, YANG C, et al. An experimental study on discharge characteristics in a pulsed-dc atmospheric pressure CH3OH/Ar plasma jet[J]. Plasma Sources Science&Technology, 2016, 25(5):055012.
[16]SARANI A, NIKIFOROV A Y, GEYTER N D, et al. Surface modificationofpolypropylenewithanatmosphericpressureplasmajet sustained in argon and an argon/water vapor mixture[J]. Applied Surface Science, 2011, 257(20):8737-8741.
[17]GAO Z, SUN J, PENG S, et al. Surface modification of nylon 6 films treatedwithanHe/O2 atmosphericpressureplasmajet[J].Journalof Applied Polymer Science, 2015, 120(4):2201-2206.
[18]ZHENGX,CHENGL,ZHANGZ,etal.Atwo-stepprocessfor surfacemodificationofpoly(ethyleneterephthalate)fabricsbyAr/O2plasma-inducedfacilepolymerizationatambientconditions[J].Surface&Coatings Technology, 2013, 226(8):123-129.
[19]张若兵,夏衍,周新磊,等. He等离子体射流处理对提高重污秽度染污硅橡胶憎水迁移性的效果[J].高电压技术,2017,43(12):3988-3993.ZHANG Ruobing, XIA Yan, ZHOU Xinlei, et al. Effects of improving hydrophobicityofheavilycontaminatedsiliconerubbertreatedby plasmajetinHe[J].HighVoltageEngineering,2017,43(12):3988-3993.
[20]杨静茹,方志,钱晨.氩氧大气压等离子体射流放电特性的研究[J].真空科学与技术学报,2014,34(5):454-460.YANGJingru,FANGZhi,QIANChen.Dischargecharacteristicsof atmosphericpressureargon/oxygenplasmajet[J].ChineseJournalof Vacuum Science and Technology, 2014, 34(5):454-460.
[21]方志,靳君,张荐,等.大气压Ar/H_2O等离子体射流的放电特性[J].高电压技术,2014,40(7):2049-2056.FANGZhi,JINGJun,ZHANGJian,etal.CharacteristicsofatmosphericpressureAr/H2Oplasmajetdischarge[J].HighVoltage Engineering, 2014, 40(7):2049-2056.
[22]周亦骁,方志,邵涛. Ar/O_2和Ar/H_2O中大气压等离子体射流放电特性的比较[J].电工技术学报,2014,29(11):229-238.ZHOUYixiao,FANGZhi,SHAOTao.Comparisonofdischarge characteristicsofatmosphericpressureplasmajetinAr/O2and Ar/H2O[J].TransactionsofChinaElectrotechnicalSociety,2014,29(11):229-238.
[23]DILECCE G, DE BENEDICTIS S. Laser diagnostics of high-pressure discharges:laser induced fluorescence detection of OH in He/Ar-H2O dielectric barrier discharges[J]. Plasma Physics and Controlled Fusion,2011, 53:124006
[24]张增辉,张冠军,邵先军,等.大气压Ar/NH_3介质阻挡辉光放电的仿真研究[J].物理学报,2012,61(24):400-410.ZHANGZenghui,ZHANGGuanjun,SHAOXianjun,etal.Simulationinvestigationofatmosphericpressuredielectricbarrierglow dischargeinargon/ammoniamixture[J].ActaPhysicaSinica,2012,61(24):400-410.
[25]BHOJ A N, KUSHNER M J. Repetitively pulsed atmospheric pressure dischargetreatmentofroughpolymersurfaces:II.treatmentofmicro-beadsinHe/NH3/H2OandHe/O2/H2Omixtures[J].Plasma Sources Science Technology, 2008, 17(3):5025.
[26]NIKIFOROV A Y, SARANI A, LEYS C. The influence of water vapor content on electrical and spectral properties of an atmospheric pressure plasmajet[J].PlasmaSourcesScience&Technology,2011,20(1):015014.
[27]LIU F, WANG W, ZHENG W, et al. Optical study of radicals(OH, O,H, N)in a needle-plate bi-directional pulsed corona discharge[J]. The European Physical Journal D, 2006, 38(3):515-522.
[2]张若兵,陈致远,李爽,等.电源形式对大气压等离子体射流和染污硅橡胶憎水性增强效果的影响[J].高电压技术,2018,44(5):1507-1512.ZHANG Ruobing, CHEN Zhiyuan, LI Shuang, et al. Effect of different forms of power supplies on atmospheric pressure plasma jets and enhancementofhydrophobicityofcontaminatedsiliconerubber[J].High Voltage Engineering, 2018, 44(5):1507-1512.
[3]方志,张波,周若瑜,等. HMDSO添加对大气压Ar等离子体射流阵列放电特性的影响[J].高电压技术,2017,43(6):1775-1783.FANG Zhi, ZHANG Bo, ZHOU Ruoyu, et al. Effect of HMDSO additionondischargecharacteristicsofatmosphericpressureplasmajet array in argon[J]. High Voltage Engineering, 2017, 43(6):1775-1783.
[4]方志,张波,阮陈.大气压He中2维射流阵列放电特性的影响因素[J].高电压技术,2016,42(4):1151-1158.FANGZhi,ZHANGBo,RUANChen.Factorinfluencingondischargecharacteristicsoftow-dimensionaljetarrayinHeat atmosphericpressure[J].HighVoltageEngineering,2016,42(4):1151-1158.
[5]郝致远,高博,吴波,等.基于锥形管的环-板电极结构大气压等离子体射流特性[J].高电压技术,2014,40(10):3098-3104.HAO Zhiyuan, GAO Bo, WU Bo, et al. Characteristics of Ar atmosphericpressureplasmajetgeneratedbyring-planeelectrodeswith tapered tube[J]. High Voltage Engineering. 2014, 40(10):3098-3104.
[6]卢新培.等离子体射流及其医学应用[J].高电压技术,2011,37(6):1416-1425.LUXinpei.Plasmajetsandtheirbiomedicalapplication[J].High Voltage Engineering, 2011, 37(6):1416-1425.
[7]JINY,RENCS,FANQQ,etal.Surfacecleaningusinganatmospheric-pressure plasma jet in O2/Ar mixtures[J]. IEEE Transactions on Plasma Science, 2012, 40(10):2706-2710.
[8]刘欣宇,刘大伟.大气压非平衡等离子体射流活性粒子产生机制[J].高电压技术,2016,42(2):452-461.LIU Xinyu, LIU Dawei. Production mechanism of reactive species in atmosphere pressure non-equilibrium plasma jet[J]. High Voltage Engineering, 2016, 42(2):452-461.
[9]LIUDX, SUNB W,IZA F,etal.Mainspeciesandchemicalpathwaysincoldatmospheric-pressureAr+H2Oplasmas[J].Plasma Sources Science and Technology, 2017, 26(4):045009.
[10]KEIDAR M. Plasma for cancer treatment[J]. Plasma Sources Science&Technology, 2015, 24(3):033001.
[11]沈洁,程诚,方世东,等.大气压等离子体射流对细菌芽孢灭活机理研究[J].真空科学与技术学报,2013,33(9):888-892.SHEN Jie, CHENG Cheng, FANG Shidong, et al. Inaction mechanism of bacteria spore with atmospheric pressure plasma[J]. Chinese Journal of Vacuum Science and Technology, 2013, 33(9):888-892.
[12]吴淑群,董熙,裴学凯,等.基于激光诱导荧光法诊断大气压低温等离子体射流中OH自由基和O原子的时空分布[J].电工技术学报,2017,32(8):82-94.WU Shuqun, DONG Xi, PEI Xuekai, et al. Laser induced fluorescence diagnostics of the temporal and spatial distribution of OH radicals and Oatominalowtemperatureplasmajetatatmosphericpressure[J].Transactions of China Electrotechnical Society, 2017, 32(8):82-94
[13]XIONG Q, NIKIFOROV A Y, LI L, et al. Absolute OH density determination by laser induced fluorescence spectroscopy in an atmospheric pressureRFplasma[J].EuropeanPhysicalJournalD,2012,66(11):1-8.
[14]CHANG Z, YAO C, CHEN S, et al. Electrical and optical properties ofAr/NH3atmosphericpressureplasmajet[J].PhysicsofPlasmas,2016, 23(9):57-62.
[15]QIAN M, LIU S, YANG C, et al. An experimental study on discharge characteristics in a pulsed-dc atmospheric pressure CH3OH/Ar plasma jet[J]. Plasma Sources Science&Technology, 2016, 25(5):055012.
[16]SARANI A, NIKIFOROV A Y, GEYTER N D, et al. Surface modificationofpolypropylenewithanatmosphericpressureplasmajet sustained in argon and an argon/water vapor mixture[J]. Applied Surface Science, 2011, 257(20):8737-8741.
[17]GAO Z, SUN J, PENG S, et al. Surface modification of nylon 6 films treatedwithanHe/O2 atmosphericpressureplasmajet[J].Journalof Applied Polymer Science, 2015, 120(4):2201-2206.
[18]ZHENGX,CHENGL,ZHANGZ,etal.Atwo-stepprocessfor surfacemodificationofpoly(ethyleneterephthalate)fabricsbyAr/O2plasma-inducedfacilepolymerizationatambientconditions[J].Surface&Coatings Technology, 2013, 226(8):123-129.
[19]张若兵,夏衍,周新磊,等. He等离子体射流处理对提高重污秽度染污硅橡胶憎水迁移性的效果[J].高电压技术,2017,43(12):3988-3993.ZHANG Ruobing, XIA Yan, ZHOU Xinlei, et al. Effects of improving hydrophobicityofheavilycontaminatedsiliconerubbertreatedby plasmajetinHe[J].HighVoltageEngineering,2017,43(12):3988-3993.
[20]杨静茹,方志,钱晨.氩氧大气压等离子体射流放电特性的研究[J].真空科学与技术学报,2014,34(5):454-460.YANGJingru,FANGZhi,QIANChen.Dischargecharacteristicsof atmosphericpressureargon/oxygenplasmajet[J].ChineseJournalof Vacuum Science and Technology, 2014, 34(5):454-460.
[21]方志,靳君,张荐,等.大气压Ar/H_2O等离子体射流的放电特性[J].高电压技术,2014,40(7):2049-2056.FANGZhi,JINGJun,ZHANGJian,etal.CharacteristicsofatmosphericpressureAr/H2Oplasmajetdischarge[J].HighVoltage Engineering, 2014, 40(7):2049-2056.
[22]周亦骁,方志,邵涛. Ar/O_2和Ar/H_2O中大气压等离子体射流放电特性的比较[J].电工技术学报,2014,29(11):229-238.ZHOUYixiao,FANGZhi,SHAOTao.Comparisonofdischarge characteristicsofatmosphericpressureplasmajetinAr/O2and Ar/H2O[J].TransactionsofChinaElectrotechnicalSociety,2014,29(11):229-238.
[23]DILECCE G, DE BENEDICTIS S. Laser diagnostics of high-pressure discharges:laser induced fluorescence detection of OH in He/Ar-H2O dielectric barrier discharges[J]. Plasma Physics and Controlled Fusion,2011, 53:124006
[24]张增辉,张冠军,邵先军,等.大气压Ar/NH_3介质阻挡辉光放电的仿真研究[J].物理学报,2012,61(24):400-410.ZHANGZenghui,ZHANGGuanjun,SHAOXianjun,etal.Simulationinvestigationofatmosphericpressuredielectricbarrierglow dischargeinargon/ammoniamixture[J].ActaPhysicaSinica,2012,61(24):400-410.
[25]BHOJ A N, KUSHNER M J. Repetitively pulsed atmospheric pressure dischargetreatmentofroughpolymersurfaces:II.treatmentofmicro-beadsinHe/NH3/H2OandHe/O2/H2Omixtures[J].Plasma Sources Science Technology, 2008, 17(3):5025.
[26]NIKIFOROV A Y, SARANI A, LEYS C. The influence of water vapor content on electrical and spectral properties of an atmospheric pressure plasmajet[J].PlasmaSourcesScience&Technology,2011,20(1):015014.
[27]LIU F, WANG W, ZHENG W, et al. Optical study of radicals(OH, O,H, N)in a needle-plate bi-directional pulsed corona discharge[J]. The European Physical Journal D, 2006, 38(3):515-522.