硅-有机材料混合电光调制器的原理及研究进展
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摘要
硅-有机材料混合(SOH)集成平台通过结合绝缘层上硅(SOI)波导和功能有机非线性材料打开了高速、超紧凑电光器件的发展之路。目前,基于SOH平台的电光调制器频率响应带宽可达100 GHz,在能耗仅为640 f J/bit时,数据传输速率可达112 Gbit/s。介绍了SOH集成平台,针对目前主要的SOH电光调制器类型,如马赫-曾德尔干涉仪型SOH电光调制器、SOH同步/正交相位型(IQ)电光调制器、微环型SOH电光调制器等,介绍了其工作原理、基本特性及国内外发展状况和趋势。
Silicon-organic hybrid(SOH) platform combined with silicon-on-insulator(SOI) waveguides and the functional organic nonlinear materials opens a route to highly-speed ultra-compact electro-optic devices. Recently,bandwidth of frequency responses of modulators based on SOH is up to 100 GHz, and enabled operation is up to112 Gbit/s with an energy consumption of 640 f J/bit. Main SOH electro-optic modulators, such as the Mach-Zehnder interferometer(MZI) modulator, in-phase/quadrature-phase(IQ) modulator and mcroring-resonator modulator,are introduced. Meanwhile, the design principle, characteristics and research status of the modulators are illustrated.
Silicon-organic hybrid(SOH) platform combined with silicon-on-insulator(SOI) waveguides and the functional organic nonlinear materials opens a route to highly-speed ultra-compact electro-optic devices. Recently,bandwidth of frequency responses of modulators based on SOH is up to 100 GHz, and enabled operation is up to112 Gbit/s with an energy consumption of 640 f J/bit. Main SOH electro-optic modulators, such as the Mach-Zehnder interferometer(MZI) modulator, in-phase/quadrature-phase(IQ) modulator and mcroring-resonator modulator,are introduced. Meanwhile, the design principle, characteristics and research status of the modulators are illustrated.
引文
1 Masini G,Colace L,Assanto G.Si based optoelectronics for communications[J].Materials Science and Engineering:B.2002,89(1-3):2-9.
2 Zou Pin,Han Xiuyou,Wang Yu,et al..Study on a tunable radio frequency filter based on integrated optical waveguide[J].Acta Optica Sinica,2013,33(10):1013001.邹品,韩秀友,王瑜,等.可调谐集成光波导射频滤波器研究[J].光学学报,2013,33(10):1013001.
3 Liu Yi,Tong Xiaogang,Yu Jinlong,et al..All-optical switching in silicon-on-insulator serially coupled double-ring resonator based on thermal nonlinear effect[J].Chinese J Lasers,2013,40(2):0205006.刘毅,仝晓刚,于晋龙,等.基于热非线性效应的硅基串联双微环谐振腔全光开关[J].中国激光,2013,40(2):0205006.
4 Dong Zhengfang,Zhou Zhen,Wang Kunbo,et al..Optimization and analysis for submicrometer-scale silicon waveguide optical phase modulator[J].Laser&Optoelectronics Progress,2012,49(10):102301.董正芳,周震,王坤博,等.亚微米硅基波导光学相位调制器的优化分析[J].激光与光电子学进展,2012,49(10):102301.
5 Fan Liwen,Meng Zhou,Sun Qiao,et al..Operating points control for Mach-Zehnder electro-optic modulator[J].Chinese J Lasers,2014,41(9):0905001.樊理文,孟洲,孙乔,等.马赫-曾德尔电光调制器工作点自动控制[J].中国激光,2014,41(9):0905001.
6 Chen Qiaoshan,Yang Lin.Optical routers for photonic network-on-chip[J].Laser&Optoelectronics Progress,2014,51(11):110005.陈乔杉,杨林.用于片上光网络的光学路由器研究[J].激光与光电子学进展,2014,51(11):110005.
7 Ren Yan,Song Muping.Optical NRZ-to-RZ modulation format conversion based on cross-phase modulation effects insilicon micro-ring resonator[J].Acta Optica Sinica,2013,33(7):0706002.任艳,宋牟平.基于硅基微环谐振器交叉相位调制效应的非归零信号到归零信号光调制格式转换[J].光学学报,2013,33(7):0706002.
8 Liu Ansheng,Liao Ling,Rubin D,et al..High-speed optical modulation based on carrier depletion in a silicon waveguide[J].Opt Express,2007,15(2):660-668.
9 Green W M,Rooks M J,Sekaric L,et al..Ultra-compact,low RF power,10 Gb/s silicon Mach-Zehnder modulator[J].Opt Express,2007,15(25):17106-17113.
10 Liu Ansheng,Jones R,Liao Ling,et al..A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor[J].Nature,2004,427(6975):615-618.
11 Liao Ling,Liu Ansheng,Basak J,et al..40 Gbit/s silicon optical modulator for highspeed applications[J].Electronics Letters,2007,43(22):1196-1197.
12 Freude W,Brosi J,Koos C,et al..Silicon-organic hybrid(SOH)devices for nonlinear optical signal processing[C].Transparent Optical Networks,2008.ICTON 2008.10th Anniversary International Conference on IEEE,2008,2:84-87.
13 Koos C,Vorreau P,Vallaitis T,et al..All-optical high-speed signal processing with silicon-organic hybrid slot waveguides[J].Nature Photonics,2009,3(4):216-219.
14 Leuthold J,Freude W,Brosi J M,et al..Silicon organic hybrid technology-a platform for practical nonlinear optics[J].Proceedings of the IEEE,2009,97(7):1304-1316.
15 Koos C,Alloatti L,Korn D,et al..Silicon-organic hybrid(SOH)electro-optical devices advanced ohotonics[C].Integrated Photonics Research,Silicon and Nanophotonics.Optical Society of America,2011.
16 Alloatti L,Korn D,Pfeifle J,et al..Silicon-organic hybrid devices[J].SPIE,2013,8629:86290P.
17 Koos C,Leuthold J,Freude W,et al..Silicon-organic hybrid(SOH)technology:a platform for efficient electro-optical devices[C].Optical MEMS and Nanophotonics(OMN),2013 International Conference on IEEE,2013:85-86.
18 Leuthold J,Koos C,Freude W,et al..Silicon-organic hybrid electro-optical devices[J].Selected Topics in Quantum Electronics,IEEE Journal of,2013,19(6):114-126.
19 Alloatti L,Palmer R,Diebold S,et al..100 GHz silicon-organic hybrid modulator[J].Light-Science&Application,2014,
3 :e173.
20 Korn D,Palmer R,Yu Hui,et al..Silicon-organic hybrid(SOH)IQ modulator using the linear electro-optic effect for transmitting 16QAM at 112 Gbit/s[J].Opt Express,2013,21(11):13219-13227.
21 Almeida V R,Xu Qianfan,Barrios C A,et al..Guiding and confining light in void nanostructure[J].Opt Lett,2004,29(11):1209-1211.
22 Xu Qianfan,Almeida V R,Panepucci R R,et al..Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material[J].Opt Lett,2004,29(14):1626-1628.
23 Rezzonico D,Kwon S J,Figi H,et al..Photochemical stability of nonlinear optical chromophores in polymeric and crystalline materials[J].The Journal of Chemical Physics,2008,128(12):124713.
24 Figi H,Bale D H,Szep A,et al..Electro-optic modulation in horizontally slotted silicon/organic crystal hybrid devices[J].Journal of the Optical Society America B-Optical Physics,2011,28(9):2291-2300.
25 Fujiwara M,Maruyama M,Sugisaki M,et al..Determination of the d-Tensor Components of a single crystal of Nbenzyl-2-methyl-4-nitroaniline[J].Japanese Journal of Applied Physics,2007,46(11):1528.
26 Jazbinsek M,Figi H,Hunziker C,et al..Organic electro-optic single crystalline films for integrated optics[C].SPIE,2010,7774:77740Q.
27 Elder D L,Benight S J,Song Jinsheng,et al..Matrix-assisted poling of monolithic bridge-disubstituted organic NLO chromophores[J].Chemistry of Materials,2014,26(2):872-874.
28 Greenlee C,Guilmo A,Opadeyi A,et al..Mach-Zehnder interferometry method for decoupling electro-optic and piezoelectric effects in poled polymer films[J].Applied Physics Letters,2010,97(4):041109.
29 Luo Jingdong,Zhou Xinghua,Jen A K Y.Rational molecular design and supramolecular assembly of highly efficient organic electro-optic materials[J].Journal of Materials Chemistry.2009,19(40):7410-7424.
30 Jin Din,Chen Hui,Barklund A,et al..EO polymer modulators reliability study[J].SPIE.2010,7599:75990H.
31 Hunziker C,Kwon S J,Figi H,et al..Fabrication and phase modulation in organic single-crystalline configurationally locked,phenolic polyene OH1 waveguides[J].Opt Express,2008,16(20):15903-15914.
32 Takahashi S,Bhola B,Yick A,et al..Photo-stability measurement of electro-optic polymer waveguides with high intensity at 1550-nm wavelength[J].Journal of Lightwave Technology,2009,27(5-8):1045-1050.
33 Alloatti L,Korn D,Palmer R,et al..42.7 Gbit/s electro-optic modulator in silicon technology[J].Opt Express,2011,19(12):11841-11851.
34 Palmer R,Koeber S,Elder D L,et al..High-speed,low drive-voltage silicon-organic hybrid modulator based on a binary-chromophore electro-optic material[J].Journal of Lightwave Technology,2014,32(16):2726-2734.
35 Xin Maoqing,Png C E,Lim S T,et al..A high speed electro-optic phase shifter based on a polymer-infiltrated P-S-N diode capacitor[J].Opt Express,2011,19(15):14354-14369.
36 Brosi J M,Koos C,Andreani L C,et al..High-speed low-voltage electro-optic modulator with a polymer-infiltrated silicon photonic crystal waveguide[J].Opt Express,2008,16(6):4177-4191.
37 Palmer R,Alloatti L,Korn D,et al..Silicon-organic hybrid MZI modulator generating OOK,BPSK and 8-ASK signals for up to 84 Gbit/s[J].Photonics Journal,IEEE,2013,5(2):6600907.
38 Gould M,Baehr-Jones T,Ding R,et al..Silicon-polymer hybrid slot waveguide ring-resonator modulator[J].Opt Express,2011,19(5):3952-3961.
2 Zou Pin,Han Xiuyou,Wang Yu,et al..Study on a tunable radio frequency filter based on integrated optical waveguide[J].Acta Optica Sinica,2013,33(10):1013001.邹品,韩秀友,王瑜,等.可调谐集成光波导射频滤波器研究[J].光学学报,2013,33(10):1013001.
3 Liu Yi,Tong Xiaogang,Yu Jinlong,et al..All-optical switching in silicon-on-insulator serially coupled double-ring resonator based on thermal nonlinear effect[J].Chinese J Lasers,2013,40(2):0205006.刘毅,仝晓刚,于晋龙,等.基于热非线性效应的硅基串联双微环谐振腔全光开关[J].中国激光,2013,40(2):0205006.
4 Dong Zhengfang,Zhou Zhen,Wang Kunbo,et al..Optimization and analysis for submicrometer-scale silicon waveguide optical phase modulator[J].Laser&Optoelectronics Progress,2012,49(10):102301.董正芳,周震,王坤博,等.亚微米硅基波导光学相位调制器的优化分析[J].激光与光电子学进展,2012,49(10):102301.
5 Fan Liwen,Meng Zhou,Sun Qiao,et al..Operating points control for Mach-Zehnder electro-optic modulator[J].Chinese J Lasers,2014,41(9):0905001.樊理文,孟洲,孙乔,等.马赫-曾德尔电光调制器工作点自动控制[J].中国激光,2014,41(9):0905001.
6 Chen Qiaoshan,Yang Lin.Optical routers for photonic network-on-chip[J].Laser&Optoelectronics Progress,2014,51(11):110005.陈乔杉,杨林.用于片上光网络的光学路由器研究[J].激光与光电子学进展,2014,51(11):110005.
7 Ren Yan,Song Muping.Optical NRZ-to-RZ modulation format conversion based on cross-phase modulation effects insilicon micro-ring resonator[J].Acta Optica Sinica,2013,33(7):0706002.任艳,宋牟平.基于硅基微环谐振器交叉相位调制效应的非归零信号到归零信号光调制格式转换[J].光学学报,2013,33(7):0706002.
8 Liu Ansheng,Liao Ling,Rubin D,et al..High-speed optical modulation based on carrier depletion in a silicon waveguide[J].Opt Express,2007,15(2):660-668.
9 Green W M,Rooks M J,Sekaric L,et al..Ultra-compact,low RF power,10 Gb/s silicon Mach-Zehnder modulator[J].Opt Express,2007,15(25):17106-17113.
10 Liu Ansheng,Jones R,Liao Ling,et al..A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor[J].Nature,2004,427(6975):615-618.
11 Liao Ling,Liu Ansheng,Basak J,et al..40 Gbit/s silicon optical modulator for highspeed applications[J].Electronics Letters,2007,43(22):1196-1197.
12 Freude W,Brosi J,Koos C,et al..Silicon-organic hybrid(SOH)devices for nonlinear optical signal processing[C].Transparent Optical Networks,2008.ICTON 2008.10th Anniversary International Conference on IEEE,2008,2:84-87.
13 Koos C,Vorreau P,Vallaitis T,et al..All-optical high-speed signal processing with silicon-organic hybrid slot waveguides[J].Nature Photonics,2009,3(4):216-219.
14 Leuthold J,Freude W,Brosi J M,et al..Silicon organic hybrid technology-a platform for practical nonlinear optics[J].Proceedings of the IEEE,2009,97(7):1304-1316.
15 Koos C,Alloatti L,Korn D,et al..Silicon-organic hybrid(SOH)electro-optical devices advanced ohotonics[C].Integrated Photonics Research,Silicon and Nanophotonics.Optical Society of America,2011.
16 Alloatti L,Korn D,Pfeifle J,et al..Silicon-organic hybrid devices[J].SPIE,2013,8629:86290P.
17 Koos C,Leuthold J,Freude W,et al..Silicon-organic hybrid(SOH)technology:a platform for efficient electro-optical devices[C].Optical MEMS and Nanophotonics(OMN),2013 International Conference on IEEE,2013:85-86.
18 Leuthold J,Koos C,Freude W,et al..Silicon-organic hybrid electro-optical devices[J].Selected Topics in Quantum Electronics,IEEE Journal of,2013,19(6):114-126.
19 Alloatti L,Palmer R,Diebold S,et al..100 GHz silicon-organic hybrid modulator[J].Light-Science&Application,2014,
3 :e173.
20 Korn D,Palmer R,Yu Hui,et al..Silicon-organic hybrid(SOH)IQ modulator using the linear electro-optic effect for transmitting 16QAM at 112 Gbit/s[J].Opt Express,2013,21(11):13219-13227.
21 Almeida V R,Xu Qianfan,Barrios C A,et al..Guiding and confining light in void nanostructure[J].Opt Lett,2004,29(11):1209-1211.
22 Xu Qianfan,Almeida V R,Panepucci R R,et al..Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material[J].Opt Lett,2004,29(14):1626-1628.
23 Rezzonico D,Kwon S J,Figi H,et al..Photochemical stability of nonlinear optical chromophores in polymeric and crystalline materials[J].The Journal of Chemical Physics,2008,128(12):124713.
24 Figi H,Bale D H,Szep A,et al..Electro-optic modulation in horizontally slotted silicon/organic crystal hybrid devices[J].Journal of the Optical Society America B-Optical Physics,2011,28(9):2291-2300.
25 Fujiwara M,Maruyama M,Sugisaki M,et al..Determination of the d-Tensor Components of a single crystal of Nbenzyl-2-methyl-4-nitroaniline[J].Japanese Journal of Applied Physics,2007,46(11):1528.
26 Jazbinsek M,Figi H,Hunziker C,et al..Organic electro-optic single crystalline films for integrated optics[C].SPIE,2010,7774:77740Q.
27 Elder D L,Benight S J,Song Jinsheng,et al..Matrix-assisted poling of monolithic bridge-disubstituted organic NLO chromophores[J].Chemistry of Materials,2014,26(2):872-874.
28 Greenlee C,Guilmo A,Opadeyi A,et al..Mach-Zehnder interferometry method for decoupling electro-optic and piezoelectric effects in poled polymer films[J].Applied Physics Letters,2010,97(4):041109.
29 Luo Jingdong,Zhou Xinghua,Jen A K Y.Rational molecular design and supramolecular assembly of highly efficient organic electro-optic materials[J].Journal of Materials Chemistry.2009,19(40):7410-7424.
30 Jin Din,Chen Hui,Barklund A,et al..EO polymer modulators reliability study[J].SPIE.2010,7599:75990H.
31 Hunziker C,Kwon S J,Figi H,et al..Fabrication and phase modulation in organic single-crystalline configurationally locked,phenolic polyene OH1 waveguides[J].Opt Express,2008,16(20):15903-15914.
32 Takahashi S,Bhola B,Yick A,et al..Photo-stability measurement of electro-optic polymer waveguides with high intensity at 1550-nm wavelength[J].Journal of Lightwave Technology,2009,27(5-8):1045-1050.
33 Alloatti L,Korn D,Palmer R,et al..42.7 Gbit/s electro-optic modulator in silicon technology[J].Opt Express,2011,19(12):11841-11851.
34 Palmer R,Koeber S,Elder D L,et al..High-speed,low drive-voltage silicon-organic hybrid modulator based on a binary-chromophore electro-optic material[J].Journal of Lightwave Technology,2014,32(16):2726-2734.
35 Xin Maoqing,Png C E,Lim S T,et al..A high speed electro-optic phase shifter based on a polymer-infiltrated P-S-N diode capacitor[J].Opt Express,2011,19(15):14354-14369.
36 Brosi J M,Koos C,Andreani L C,et al..High-speed low-voltage electro-optic modulator with a polymer-infiltrated silicon photonic crystal waveguide[J].Opt Express,2008,16(6):4177-4191.
37 Palmer R,Alloatti L,Korn D,et al..Silicon-organic hybrid MZI modulator generating OOK,BPSK and 8-ASK signals for up to 84 Gbit/s[J].Photonics Journal,IEEE,2013,5(2):6600907.
38 Gould M,Baehr-Jones T,Ding R,et al..Silicon-polymer hybrid slot waveguide ring-resonator modulator[J].Opt Express,2011,19(5):3952-3961.