超级电容器电极材料激光精细加工的研究现状
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摘要
现代社会的飞速发展,能源环境问题越发突出。超级电容器因同时具备高功率密度、高能量密度和较长使用寿命而备受关注。电极材料和结构决定了超级电容器的性能。从而电极材料的制备工艺的开发优化成为人们研究的重中之重。重点介绍了激光精细加工制备超级电容器电极材料的研究现状以及发展趋势。
With the rapid development of modern society, the energy and environmental issues have become increasingly prominent. Supercapacitors have attracted much attention because of their high power density, high energy density and long service life. The electrode material and structure determine the performance of the supercapacitor. Therefore, the development and optimization of the electrode material preparation process has become the top priority of research. The research status and development trend of supercapacitor electrode materials prepared by laser fine processing are introduced.
With the rapid development of modern society, the energy and environmental issues have become increasingly prominent. Supercapacitors have attracted much attention because of their high power density, high energy density and long service life. The electrode material and structure determine the performance of the supercapacitor. Therefore, the development and optimization of the electrode material preparation process has become the top priority of research. The research status and development trend of supercapacitor electrode materials prepared by laser fine processing are introduced.
引文
[1] KIERZEK K,FRACKOWIAK E,LOTA G,et al.Electrochemical capacitors based on highly porous carbons prepared by KOH activation[J].Electrochimica Acta,2004,49(4):515-523.
[2] RAYMUNDO-PINERO E,LEROUX F,BEGUIN F.A high-performance carbon for supercapacitors obtained by carbonization of a seaweed biopolymer[J].Advanced Materials,2006,18(14):1877-1882.
[3] ZHENG J P,JOW T R.High energy and high power density electrochemical capacitors[J].Journal of Power Sources,1996,62(2):155-159.
[4] TOUPIN M,BROUSSE T,BELANGER D.Charge storage mechanism of MnO2 electrode used in aqueous electrochemical capacitor[J].Chemistry of Materials,2004,16(16):3184-3190.
[5] RUDGE A,RAISTRICK I,GOTTESFELD S,et al.A study of the electrochemical properties of conducting polymers for application in electrochemical capacitors[J].Electrochimica Acta,1994,39(2):273-287.
[6] TALBI H,JUST P E,DAO L H.Electropolymerization of aniline on carbonized polyacrylonitrile aerogel electrodes:applications for supercapacitors[J].Journal of Applied Electrochemistry,2003,33(6):465-473.
[7] NOVOSELOV K S,GEIM A K,MOROZOV S V,et al.Electric field effect in atomically thin carbon films[J].Science,2004,306(5696):666-669.
[8] LOSURDO M,GIANGREGORIO M M,CAPEZZUTO P,et al.Graphene CVD growth on copper and nickel:role of hydrogen in kinetics and structure[J].Physical Chemistry Chemical Physics,2011,13(46):20836-20843.
[9] HU ZHONGAI,MO LIPING,FENG XIAOJUAN,et al.Synthesis and electrochemical capacitance of sheet-like cobalt hydroxide[J].Materials Chemistry and Physics,2009,114(1):53-57.
[10] CHI X N,CHANG L,XIE D,et al.Hydrothermal preparation of Co3O4/graphene composite as anode material for lithium-ion batteries[J].Materials Letters,2013(106):178-181.
[11] WANG LEI,DONG ZHIHUI,WANG ZHENGGONG,et al.Layered α-Co(OH)2 nanocones as electrode materials for pseudocapacitors:understanding the effect of interlayer space on electrochemical activity[J].Advanced Functional Materials,2013,23(21):2758-2764.
[12] ZHAO CUIMEI,WANG XIN,WANG SHUMIN,et al.Synthesis of Co(OH)2/graphene/Ni foam nano-electrodes with excellent pseudocapacitive behavior and high cycling stability for supercapacitors[J].International Jounal of Hydrogen energy,2012,37(16):11846-11852.
[13] ZHAO DANDAN,ZHOU WENJIA,LI HULIN.Effect of deposition potential and anneal temperature on the hexagonal nanoporous nickel hydroxide films[J].Chemistry of Materials,2007,19(16):3882-3891.
[14] ZHOU WENJIA,ZHANG JIN,XUE TONG,et al.Electrodeposition of ordered mesoporous cobalt hydroxide film from lyotropic liquid crystal media for electrochemical capacitors[J].Journal of Materials Chemistry,2008,18(8):905-910.
[15] HUANG L,LIU Y,JI L C,et al.Pulsed laser assisted reduction of graphene oxide[J].Carbon,2011,49(7):2431-2436.
[16] YE X H,LONG J Y,LIN Z,et al.Direct laser fabrication of large-area and patterned graphene at room temperature[J].Carbon,2014(68):784-790.
[17] WANG J N,SHAO R Q,ZHANG Y L,et al.Biomimetic graphene surfaces with superhydrophobicity and iridescence[J].Chemistry-An Asian Journal,2012,7(2):301-304.
[18] BORDJIBA T,MOHAMEDI M,DAO L H.New class of carbon-nanotube aerogel electrodes for electrochemical power sources[J].Advanced Materials,2008,20(4):815-819.
[19] ZHAO T,JIANG H,MA J.Surfactant-assisted electrochemical deposition of α-cobalt hydroxide for supercapacitors[J].Journal of Power Sources,2011,196(2):860-864.
[20] WANG H L,HAO Q L,YANG X J,et al.A nanostructured graphene/polyaniline hybrid material for supercapacitors[J].Nanoscale,2010,2(10):2164-2170.
[21] LEE J,SEOK J Y,SON S,et al.High-energy,flexiblemicro-supercapacitor by one-step laser fabrication of self-generated nanoporous metal/oxide electrode[J].Journal of Materials Chemistry A,2017,5(47):24585-24593.
[22] KONG L B,LIU M,LANG J W,et al.Asymmetric supercapacitor based on loose-packed cobalt hydroxide nanoflake materials and activated carbon[J].Journal of The Electrochemical Society,2009(156):1000-1004.
[23] MA CUNLIANG,PENG LI,FENG YAFEI,et al.Polyfurfuryl alcohol spheres template synthesis of 3D porous graphene for high-performance supercapacitor application[J].Synthetic Metals,2016(220):227-235.
[24] CHEN TAO,CAI ZHENBO,QIU LONGBIN,et al.Synthesis of aligned carbon nanotube composite fibers with high performances by electrochemical deposition[J].Journal of Materials Chemistry A,2013(1):2211-2216.
[25] SUN H,YE Y,LIU J,et al.Pure Ni nanocrystallines anchored on rGO present ultrahigh electrocatalytic activit and stability in methanol oxidation[J].Chemical Communications,2018,54(13):1563-1566.
[26] POURMORTAZAVI S M,RAHIMI-NASRABADI M,DAVOUDI-DEHAGHANI A A,et al.Statistical optimization of experimental parameters for synthesis of manganese carbonate and manganese oxide nanoparticles[J].Materials Research Bulletin,2012,47(4):1045-1050.
[27] GHODBANE O,PASCAL J L,FAVIER F.Microstructural effects on charge-storage properties in MnO2-based electrochemical supercapacitors[J].ACS Applied Materials & Interfaces,2009,1(5):1130-1139.
[28] 吕进玉,林志东.超级电容器导电聚合物电极材料的研究进展[J].材料导报,2007,21(3):29-31.
[29] RUDGE A,DAVEY J,RAISTRICK I,et al.Conducting polymers as active materials in electrochemical capacitors[J].Journal of Power Sources,1994,47(1-2):89-107.
[30] ZHOU HAIHUI,CHEN HONG,LUO SHENGLIAN,et al.The effect of the poly aniline morphology on the performance of poly aniline supercapacitors[J].Journal of Solid State Electrochemistry,2005,9(8):574-580.
[31] LAFORGUE A,SIMON P,SARRAZIN C,et al.Polythiophene-based supercapacitors[J].Journal of Power Sources,1999,80(1-2):142-148.
[32] KWANG S R,KWANG M K,PARK N G,et al.Symmetric redox supercapacitor with conducting poly aniline electrodes[J].Journal of Power Source,2002,103(2):305-309.
[33] ZHAO J Q,LIU Y Y,YU Y L.Dual-responsive inverse opal films based on a crosslinked liquid crystal polymer containing azobenzene[J].Journal of Materials Chemistry C,2014,2(48):10262-10267.
[34] FAN L Z,HU Y S,MAIER J,et al.High electroactivity of polyaniline in supercapacitors by using a hierarchically porous carbon monolith as a support[J].Advanced Functional Materials,2007,17(16):3083-3087.
[35] 闵永刚,肖壮清,冯亚飞,等.一种柔性聚苯胺导电石墨烯膜及其制备方法:CN201610510639.3[P].[2016-11-23].
[36] 汤勇,刘辉龙,陆龙生,等.激光加工平面型微超级电容器的研究进展与发展趋势[J/OL].机械工程学报,2018.http://kns.cnki.net/KCMS/detail/11.2187.TH.20181224.1439.004.html.
[37] HUANG L,LIU Y,JI L C,et al.Pulsed laser assisted reduction of graphene oxide[J].Carbon,2011,49(7):2431-2436.
[38] YE X H,LONG J Y,LIN Z,et al.Direct laser fabrication of large-area and patterned graphene at room temperature[J].Carbon,2014(68):784-790.
[39] DARVISHI S,CUBAUD T,LONGTIN J P.Ultrafast laser machining of tapered microchannels in glass and PDMS[J].Optics and Lasers in Engineering,2012,50(2):210-214.
[40] LUO S,HOANG P T,LIU T.Direct laser writing for creating porous graphitic structures and their use for flexible and highly sensitive sensor and sensor arrays[J].Carbon,2016(96):522-531.
[41] HWANG D J,KUK S,WANG Z,et al.Laser scribing of CIGS thin-film solar cell on flexible substrate[J].Applied Physics A,2016,123(1):55.
[42] DU Q F,AI J,QIN Z L,et al.Fabrication of superhydrophobic/super hydrophilic patterns on polyimide surface by ultraviolet laser direct texturing[J].Journal of Materials Processing Technology,2018(251):188-196.
[43] TILIAKOS A,CEAUS C,IORDACHE S M,et al.Morphic transitions of nanocarbons via laser pyrolysis of polyimide film[J].Journal of Analytica and Applied Pyrolysis,2016(121):275-286.
[44] MORACZEWSKI K,MRóZ W,BUDNER B,et al.Laser modification of polylactide surface layer prior autocatalytic metallization[J].Surface and Coatings Technology,2016(304):68-75.
[45] LIN J,PENG Z,LIU Y,et al.Laser-Induced porous graphene films from commercial polymers[J].Nature Communications,2014(5):1-8.
[46] 肖荣诗,张寰臻,黄婷.飞秒激光加工最新研究进展[J].机械工程学报,2016,52(17):176-186.
[47] 季凌飞,凌晨,李秋瑞,等.皮秒激光工程应用研究现状与发展分析[J].机械工程学报,2014,50(5):115-126.
[48] NIU Z Q,ZHANG L,LIU L L,et al.All-solid-state flexible ultrathin micro-supercapacitors based on graphene[J].Advanced Materials,2013,25(29):4035-4042.
[49] BEIDAGHI M,WANG C L.Micro-supercapacitors based on interdigital electrodes of reduced graphene oxide and carbon nanotube composites with ultrahigh power handling performance[J].Advanced Functional Materials,2012,22(21):4501-4510.
[50] KIM S K,KOO H J,LEE A,et al.Selective wetting-induced micro-electrode patterning for flexible micro-supercapacitors[J].Advanced Materials,2014,26(30):5108-5112.
[51] SONG B,LI L Y,LIN Z Y,et al.Water-dispersible graphene/polyaniline composites for flexible micro-supercapacitors with high energy densities[J].Nano Energy,2015(16):470-478.
[52] WU Z S,PARVEZ K,FENG X L,et al.Graphene-based in-plane micro-supercapacitors with high power and energy densities[J].Nature Communications,2013(4):1-8.
[53] LIU L,YE D,YU Y,et al.Carbon-based flexible micro-supercapacitor fabrication via mask-free ambient micro-plasma-jet etching[J].Carbon,2017(111):121-127.
[54] SONG Y,CHEN X X,ZHANG J X,et al.Freestanding micro-supercapacitor with interdigital electrodes for low-power electronic systems[J].Journal of Microelectromechanical Systems,2017,26(5):1055-1062.
[55] YAN H,CHEN Z H,ZHENG Y,et al.A high-mobility electron-transporting polymer for printed transistors[J].Nature,2009,457(7230):679-686.
[56] LEE H M,LEE H B,JUNG D S,et al.Solution processed aluminum paper for flexible electronics[J].Langmuir,2012,28(36):13127-13135.
[57] CHEN P C,CHEN H T,QIU J,et al.Inkjet printing of single-walled carbon nanotube/RuO2 nanowire supercapacitors on cloth fabrics and flexible substrates[J].Nano Research,2010,3(8):594-603.
[58] QI D P,LIU Y,LIU Z Y,et al.Design of architectures and materials in in-plane micro-supercapacitors:current status and future challenges[J].Advanced Materials,2017,29(5):1-19.
[59] ZHANG L,DEARMOND D,ALVAREZ N T,et al.Flexible micro-supercapacitor based on graphene with 3d structure[J].Small,2017,13(10):1603114.
[60] SHI L,WANG Y,ZOU P C,et al.Laser processed micro-supercapacitors based on carbon nanotubes/manganese dioxide nanosheets composite with excellent electrochemical performance and aesthetic property[J].Chinese Chemical Letters,2018,29(4):592-595.
[61] PAENG D,LEE D,YEO J,et al.Laser-induced reductive sintering of nickel oxide nanoparticles under ambient conditions[J].The Journal of Physical Chemistry C,2015,119(11):6363-6372.
[62] PERELAER J,DE GANS B J,SCHUBERT U S.Ink-jet printing and microwave sintering of conductive silver tracks[J].Advanced Materials,2006,18(16):2101-2104.
[63] CHUNG J W,KO S B,BIERI N R,et al.Conductor microstructures by laser curing of printed gold nanoparticle ink[J].Applied Physics Letters,2004,84(5):801-803.
[64] HONG S,YEO J,KIM G,et al.Nonvacuum,maskless fabrication of a flexible metal grid transparent conductor by low-temperature selective laser sintering of nanoparticle ink[J].ACS Nano,2013,7(6):5024-5031.
[65] KO S H,PAN H,GRIGOROPOULOS C P,et al.Air stable high resolution organic transistors by selective laser sintering of ink-jet printed metal nanoparticles[J].Applied Physics Letters,2007,90(14):141103.
[66] YEO J,HONG S,LEE D,et al.Next generation non-vacuum,mask less,low temperature nanoparticle ink laser digital direct metal patterning for a large area flexible electronics[J].PLoS One,2012,7(8):e42315.
[67] KO S H,CHUNG J,PAN H,et al.Fabrication of multilayer passive and active electric components on polymer using inkjet printing and low temperature laser processing[J].Sensors and Actuators A:Physical,2007,134(1):161-168.
[68] CHENG K,YANG M H,CHIU W W W,et al.Ink-jet printing,self-assembled polyelectrolytes,and electroless plating:low cost fabrication of circuits on a flexible substrate at room temperature[J].Macromolecular Rapid Communications,2005,26(4):247-264.
[69] CHIOLERIO A,MACCIONI G,MARTINO P,et al.Inkjet printing and low power laser annealing of silver nanoparticle traces for the realization of low resistivity lines for flexible electronics[J].Microelectronic Engineering,2011,88(8):2481-2483.
[70] CAI J,WATANABE A,LV C.Laser direct writing of carbon/Au composite electrodes for high-performance micro-supercapacitors[C]//Conference on Laser-based Micro-and Nanoprocessing XI:International Society for Optics and Photonics,SPIE,2017(10092):1-8.
[2] RAYMUNDO-PINERO E,LEROUX F,BEGUIN F.A high-performance carbon for supercapacitors obtained by carbonization of a seaweed biopolymer[J].Advanced Materials,2006,18(14):1877-1882.
[3] ZHENG J P,JOW T R.High energy and high power density electrochemical capacitors[J].Journal of Power Sources,1996,62(2):155-159.
[4] TOUPIN M,BROUSSE T,BELANGER D.Charge storage mechanism of MnO2 electrode used in aqueous electrochemical capacitor[J].Chemistry of Materials,2004,16(16):3184-3190.
[5] RUDGE A,RAISTRICK I,GOTTESFELD S,et al.A study of the electrochemical properties of conducting polymers for application in electrochemical capacitors[J].Electrochimica Acta,1994,39(2):273-287.
[6] TALBI H,JUST P E,DAO L H.Electropolymerization of aniline on carbonized polyacrylonitrile aerogel electrodes:applications for supercapacitors[J].Journal of Applied Electrochemistry,2003,33(6):465-473.
[7] NOVOSELOV K S,GEIM A K,MOROZOV S V,et al.Electric field effect in atomically thin carbon films[J].Science,2004,306(5696):666-669.
[8] LOSURDO M,GIANGREGORIO M M,CAPEZZUTO P,et al.Graphene CVD growth on copper and nickel:role of hydrogen in kinetics and structure[J].Physical Chemistry Chemical Physics,2011,13(46):20836-20843.
[9] HU ZHONGAI,MO LIPING,FENG XIAOJUAN,et al.Synthesis and electrochemical capacitance of sheet-like cobalt hydroxide[J].Materials Chemistry and Physics,2009,114(1):53-57.
[10] CHI X N,CHANG L,XIE D,et al.Hydrothermal preparation of Co3O4/graphene composite as anode material for lithium-ion batteries[J].Materials Letters,2013(106):178-181.
[11] WANG LEI,DONG ZHIHUI,WANG ZHENGGONG,et al.Layered α-Co(OH)2 nanocones as electrode materials for pseudocapacitors:understanding the effect of interlayer space on electrochemical activity[J].Advanced Functional Materials,2013,23(21):2758-2764.
[12] ZHAO CUIMEI,WANG XIN,WANG SHUMIN,et al.Synthesis of Co(OH)2/graphene/Ni foam nano-electrodes with excellent pseudocapacitive behavior and high cycling stability for supercapacitors[J].International Jounal of Hydrogen energy,2012,37(16):11846-11852.
[13] ZHAO DANDAN,ZHOU WENJIA,LI HULIN.Effect of deposition potential and anneal temperature on the hexagonal nanoporous nickel hydroxide films[J].Chemistry of Materials,2007,19(16):3882-3891.
[14] ZHOU WENJIA,ZHANG JIN,XUE TONG,et al.Electrodeposition of ordered mesoporous cobalt hydroxide film from lyotropic liquid crystal media for electrochemical capacitors[J].Journal of Materials Chemistry,2008,18(8):905-910.
[15] HUANG L,LIU Y,JI L C,et al.Pulsed laser assisted reduction of graphene oxide[J].Carbon,2011,49(7):2431-2436.
[16] YE X H,LONG J Y,LIN Z,et al.Direct laser fabrication of large-area and patterned graphene at room temperature[J].Carbon,2014(68):784-790.
[17] WANG J N,SHAO R Q,ZHANG Y L,et al.Biomimetic graphene surfaces with superhydrophobicity and iridescence[J].Chemistry-An Asian Journal,2012,7(2):301-304.
[18] BORDJIBA T,MOHAMEDI M,DAO L H.New class of carbon-nanotube aerogel electrodes for electrochemical power sources[J].Advanced Materials,2008,20(4):815-819.
[19] ZHAO T,JIANG H,MA J.Surfactant-assisted electrochemical deposition of α-cobalt hydroxide for supercapacitors[J].Journal of Power Sources,2011,196(2):860-864.
[20] WANG H L,HAO Q L,YANG X J,et al.A nanostructured graphene/polyaniline hybrid material for supercapacitors[J].Nanoscale,2010,2(10):2164-2170.
[21] LEE J,SEOK J Y,SON S,et al.High-energy,flexiblemicro-supercapacitor by one-step laser fabrication of self-generated nanoporous metal/oxide electrode[J].Journal of Materials Chemistry A,2017,5(47):24585-24593.
[22] KONG L B,LIU M,LANG J W,et al.Asymmetric supercapacitor based on loose-packed cobalt hydroxide nanoflake materials and activated carbon[J].Journal of The Electrochemical Society,2009(156):1000-1004.
[23] MA CUNLIANG,PENG LI,FENG YAFEI,et al.Polyfurfuryl alcohol spheres template synthesis of 3D porous graphene for high-performance supercapacitor application[J].Synthetic Metals,2016(220):227-235.
[24] CHEN TAO,CAI ZHENBO,QIU LONGBIN,et al.Synthesis of aligned carbon nanotube composite fibers with high performances by electrochemical deposition[J].Journal of Materials Chemistry A,2013(1):2211-2216.
[25] SUN H,YE Y,LIU J,et al.Pure Ni nanocrystallines anchored on rGO present ultrahigh electrocatalytic activit and stability in methanol oxidation[J].Chemical Communications,2018,54(13):1563-1566.
[26] POURMORTAZAVI S M,RAHIMI-NASRABADI M,DAVOUDI-DEHAGHANI A A,et al.Statistical optimization of experimental parameters for synthesis of manganese carbonate and manganese oxide nanoparticles[J].Materials Research Bulletin,2012,47(4):1045-1050.
[27] GHODBANE O,PASCAL J L,FAVIER F.Microstructural effects on charge-storage properties in MnO2-based electrochemical supercapacitors[J].ACS Applied Materials & Interfaces,2009,1(5):1130-1139.
[28] 吕进玉,林志东.超级电容器导电聚合物电极材料的研究进展[J].材料导报,2007,21(3):29-31.
[29] RUDGE A,DAVEY J,RAISTRICK I,et al.Conducting polymers as active materials in electrochemical capacitors[J].Journal of Power Sources,1994,47(1-2):89-107.
[30] ZHOU HAIHUI,CHEN HONG,LUO SHENGLIAN,et al.The effect of the poly aniline morphology on the performance of poly aniline supercapacitors[J].Journal of Solid State Electrochemistry,2005,9(8):574-580.
[31] LAFORGUE A,SIMON P,SARRAZIN C,et al.Polythiophene-based supercapacitors[J].Journal of Power Sources,1999,80(1-2):142-148.
[32] KWANG S R,KWANG M K,PARK N G,et al.Symmetric redox supercapacitor with conducting poly aniline electrodes[J].Journal of Power Source,2002,103(2):305-309.
[33] ZHAO J Q,LIU Y Y,YU Y L.Dual-responsive inverse opal films based on a crosslinked liquid crystal polymer containing azobenzene[J].Journal of Materials Chemistry C,2014,2(48):10262-10267.
[34] FAN L Z,HU Y S,MAIER J,et al.High electroactivity of polyaniline in supercapacitors by using a hierarchically porous carbon monolith as a support[J].Advanced Functional Materials,2007,17(16):3083-3087.
[35] 闵永刚,肖壮清,冯亚飞,等.一种柔性聚苯胺导电石墨烯膜及其制备方法:CN201610510639.3[P].[2016-11-23].
[36] 汤勇,刘辉龙,陆龙生,等.激光加工平面型微超级电容器的研究进展与发展趋势[J/OL].机械工程学报,2018.http://kns.cnki.net/KCMS/detail/11.2187.TH.20181224.1439.004.html.
[37] HUANG L,LIU Y,JI L C,et al.Pulsed laser assisted reduction of graphene oxide[J].Carbon,2011,49(7):2431-2436.
[38] YE X H,LONG J Y,LIN Z,et al.Direct laser fabrication of large-area and patterned graphene at room temperature[J].Carbon,2014(68):784-790.
[39] DARVISHI S,CUBAUD T,LONGTIN J P.Ultrafast laser machining of tapered microchannels in glass and PDMS[J].Optics and Lasers in Engineering,2012,50(2):210-214.
[40] LUO S,HOANG P T,LIU T.Direct laser writing for creating porous graphitic structures and their use for flexible and highly sensitive sensor and sensor arrays[J].Carbon,2016(96):522-531.
[41] HWANG D J,KUK S,WANG Z,et al.Laser scribing of CIGS thin-film solar cell on flexible substrate[J].Applied Physics A,2016,123(1):55.
[42] DU Q F,AI J,QIN Z L,et al.Fabrication of superhydrophobic/super hydrophilic patterns on polyimide surface by ultraviolet laser direct texturing[J].Journal of Materials Processing Technology,2018(251):188-196.
[43] TILIAKOS A,CEAUS C,IORDACHE S M,et al.Morphic transitions of nanocarbons via laser pyrolysis of polyimide film[J].Journal of Analytica and Applied Pyrolysis,2016(121):275-286.
[44] MORACZEWSKI K,MRóZ W,BUDNER B,et al.Laser modification of polylactide surface layer prior autocatalytic metallization[J].Surface and Coatings Technology,2016(304):68-75.
[45] LIN J,PENG Z,LIU Y,et al.Laser-Induced porous graphene films from commercial polymers[J].Nature Communications,2014(5):1-8.
[46] 肖荣诗,张寰臻,黄婷.飞秒激光加工最新研究进展[J].机械工程学报,2016,52(17):176-186.
[47] 季凌飞,凌晨,李秋瑞,等.皮秒激光工程应用研究现状与发展分析[J].机械工程学报,2014,50(5):115-126.
[48] NIU Z Q,ZHANG L,LIU L L,et al.All-solid-state flexible ultrathin micro-supercapacitors based on graphene[J].Advanced Materials,2013,25(29):4035-4042.
[49] BEIDAGHI M,WANG C L.Micro-supercapacitors based on interdigital electrodes of reduced graphene oxide and carbon nanotube composites with ultrahigh power handling performance[J].Advanced Functional Materials,2012,22(21):4501-4510.
[50] KIM S K,KOO H J,LEE A,et al.Selective wetting-induced micro-electrode patterning for flexible micro-supercapacitors[J].Advanced Materials,2014,26(30):5108-5112.
[51] SONG B,LI L Y,LIN Z Y,et al.Water-dispersible graphene/polyaniline composites for flexible micro-supercapacitors with high energy densities[J].Nano Energy,2015(16):470-478.
[52] WU Z S,PARVEZ K,FENG X L,et al.Graphene-based in-plane micro-supercapacitors with high power and energy densities[J].Nature Communications,2013(4):1-8.
[53] LIU L,YE D,YU Y,et al.Carbon-based flexible micro-supercapacitor fabrication via mask-free ambient micro-plasma-jet etching[J].Carbon,2017(111):121-127.
[54] SONG Y,CHEN X X,ZHANG J X,et al.Freestanding micro-supercapacitor with interdigital electrodes for low-power electronic systems[J].Journal of Microelectromechanical Systems,2017,26(5):1055-1062.
[55] YAN H,CHEN Z H,ZHENG Y,et al.A high-mobility electron-transporting polymer for printed transistors[J].Nature,2009,457(7230):679-686.
[56] LEE H M,LEE H B,JUNG D S,et al.Solution processed aluminum paper for flexible electronics[J].Langmuir,2012,28(36):13127-13135.
[57] CHEN P C,CHEN H T,QIU J,et al.Inkjet printing of single-walled carbon nanotube/RuO2 nanowire supercapacitors on cloth fabrics and flexible substrates[J].Nano Research,2010,3(8):594-603.
[58] QI D P,LIU Y,LIU Z Y,et al.Design of architectures and materials in in-plane micro-supercapacitors:current status and future challenges[J].Advanced Materials,2017,29(5):1-19.
[59] ZHANG L,DEARMOND D,ALVAREZ N T,et al.Flexible micro-supercapacitor based on graphene with 3d structure[J].Small,2017,13(10):1603114.
[60] SHI L,WANG Y,ZOU P C,et al.Laser processed micro-supercapacitors based on carbon nanotubes/manganese dioxide nanosheets composite with excellent electrochemical performance and aesthetic property[J].Chinese Chemical Letters,2018,29(4):592-595.
[61] PAENG D,LEE D,YEO J,et al.Laser-induced reductive sintering of nickel oxide nanoparticles under ambient conditions[J].The Journal of Physical Chemistry C,2015,119(11):6363-6372.
[62] PERELAER J,DE GANS B J,SCHUBERT U S.Ink-jet printing and microwave sintering of conductive silver tracks[J].Advanced Materials,2006,18(16):2101-2104.
[63] CHUNG J W,KO S B,BIERI N R,et al.Conductor microstructures by laser curing of printed gold nanoparticle ink[J].Applied Physics Letters,2004,84(5):801-803.
[64] HONG S,YEO J,KIM G,et al.Nonvacuum,maskless fabrication of a flexible metal grid transparent conductor by low-temperature selective laser sintering of nanoparticle ink[J].ACS Nano,2013,7(6):5024-5031.
[65] KO S H,PAN H,GRIGOROPOULOS C P,et al.Air stable high resolution organic transistors by selective laser sintering of ink-jet printed metal nanoparticles[J].Applied Physics Letters,2007,90(14):141103.
[66] YEO J,HONG S,LEE D,et al.Next generation non-vacuum,mask less,low temperature nanoparticle ink laser digital direct metal patterning for a large area flexible electronics[J].PLoS One,2012,7(8):e42315.
[67] KO S H,CHUNG J,PAN H,et al.Fabrication of multilayer passive and active electric components on polymer using inkjet printing and low temperature laser processing[J].Sensors and Actuators A:Physical,2007,134(1):161-168.
[68] CHENG K,YANG M H,CHIU W W W,et al.Ink-jet printing,self-assembled polyelectrolytes,and electroless plating:low cost fabrication of circuits on a flexible substrate at room temperature[J].Macromolecular Rapid Communications,2005,26(4):247-264.
[69] CHIOLERIO A,MACCIONI G,MARTINO P,et al.Inkjet printing and low power laser annealing of silver nanoparticle traces for the realization of low resistivity lines for flexible electronics[J].Microelectronic Engineering,2011,88(8):2481-2483.
[70] CAI J,WATANABE A,LV C.Laser direct writing of carbon/Au composite electrodes for high-performance micro-supercapacitors[C]//Conference on Laser-based Micro-and Nanoprocessing XI:International Society for Optics and Photonics,SPIE,2017(10092):1-8.