一种线阵CCD融合光栅尺的高精度尺寸测量新方法研究
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  • 英文篇名:Research on a new method of high precision dimension measurement based on linear CCD fused grating ruler
  • 作者:同志学 ; 白金池 ; 康智强
  • 英文作者:TONG Zhixue;BAI Jinchi;KANG Zhiqiang;Mechanism and Electron College, Xi'an University of Architecture and Technology;Institute of Advanced Technology, Chinese Academy of Sciences;College of Automation, Northwestern Polytechnical University;
  • 关键词:神经网络 ; 畸变矫正 ; 光栅尺 ; 亚像素尺寸检测
  • 英文关键词:neural network;;distortion correction;;grating ruler;;sub-pixel size detection
  • 中文刊名:GXJS
  • 英文刊名:Optical Technique
  • 机构:西安建筑科技大学机电工程学院;中国科学院先进技术研究所;西北工业大学自动化学院;
  • 出版日期:2019-05-15
  • 出版单位:光学技术
  • 年:2019
  • 期:v.45;No.257
  • 基金:陕西省教育厅自然科学资助项目(17JK0445);; 长安大学道路施工技术与装备教育部重点实验室开放基金(310825161107);; 广东引进创新创业团队专项(2014ZT05G132);; 深圳市海外高层次人才资金(KQTD2015033117354154)
  • 语种:中文;
  • 页:GXJS201903004
  • 页数:7
  • CN:03
  • ISSN:11-1879/O4
  • 分类号:22-28
摘要
为了解决数字图像亚像素级高精度尺寸检测问题,采用了基于人工神经网络的线阵相机镜头畸变矫正方法,比传统的多项式拟合法矫正精度高且操作简便;提出了将光栅尺融入线阵相机扫描机构的新方法,利用高精度光栅尺测位移信号触发线阵CCD图像采集动作,精确获取线阵相机扫描目标的亚像素级图像。实验证明,新的测量技术可在对运动系统要求不高的情况下获取高精度图像,图像检测精度可以达到1μm。
        In order to solve the problem of high-precision dimension detection at sub-pixel level in digital images, a linear array camera lens distortion correction method based on artificial neural network is adopted, which is higher in accuracy and easier to operate than the traditional polynomial fitting method. A new method of integrating the grating ruler into the scanning mechanism of the linear array camera is proposed, which uses the displacement signal measured by the high-precision grating ruler to trigger the image acquisition action of the linear array CCD to accurately acquire the sub-pixel image of the scanning target of the linear array camera. Experiments show that the new measurement technology can obtain high-precision images with low requirements on the motion system, and the image detection accuracy can reach 1μm.
引文
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