长工作距变焦显微系统物镜设计
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摘要
激光内雕机在进行激光内雕时,经常会存在激光"炸点"不均匀的情况,需要对其进行放大分析,从而更好地控制激光束的能量。根据企业激光内雕"炸点"观察需求,设计了一款长工作距变焦显微物镜。玻璃内部的"炸点"观察范围为9～32 mm,系统采用光学变焦方式,变焦范围为6～24 mm,放大倍率为4×～16×,变倍比为4倍。探测器采用了一款型号为VA-1MG2的1/2 in(1 in=2.54 cm)CCD,其像元大小为5.5μm。利用Zemax进行光学系统设计优化,在截止频率91 lp/mm处,各组态下各视场的MTF值均大于0.4,在中心视场和0.7视场处均接近衍射极限。点列图的RMS半径也均小于艾里斑半径,满足长工作距变焦显微系统的各项指标需求。
When a laser engraving machine carries out laser engraving, sometimes the laser "bursting points" are uneven. It is necessary to amplify and analyze the laser "explosion points" to better control the energy of the laser beam. A zoom microscope objective with long working distance was designed according to the observation requirements of "explosion points". The "explosion points" inside the glass have the viewing range of 9-32 mm. The zoom range of focal length is from 6 mm to 24 mm with optical zoom mechanism. The magnification is 4×-16×, and the zoom ratio is 4. A 1/2-inch CCD model VA-1 MG2 was adopted as the detector with pixel size 5.5 μm. The optical system optimization was carried out by using Zemax. The MTF values of all fields are larger than 0.4 at cut-off frequency91 lp/mm for each configuration. The MTF values for central field and 0.707 field approach to the diffraction limit. The RMS radius of the spot diagram is smaller than the radius of Airy disk. The image quality of the designed system meets the requirements of all technical indicators.
When a laser engraving machine carries out laser engraving, sometimes the laser "bursting points" are uneven. It is necessary to amplify and analyze the laser "explosion points" to better control the energy of the laser beam. A zoom microscope objective with long working distance was designed according to the observation requirements of "explosion points". The "explosion points" inside the glass have the viewing range of 9-32 mm. The zoom range of focal length is from 6 mm to 24 mm with optical zoom mechanism. The magnification is 4×-16×, and the zoom ratio is 4. A 1/2-inch CCD model VA-1 MG2 was adopted as the detector with pixel size 5.5 μm. The optical system optimization was carried out by using Zemax. The MTF values of all fields are larger than 0.4 at cut-off frequency91 lp/mm for each configuration. The MTF values for central field and 0.707 field approach to the diffraction limit. The RMS radius of the spot diagram is smaller than the radius of Airy disk. The image quality of the designed system meets the requirements of all technical indicators.
引文
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[2]Li Xiaoqi,Xiang Yang,Zhang Haixin,et al.The design of video microscope objectives with long working distance[J].Opto-Electronic Engineering,2014,41(12):24-27.(in Chinese)李晓奇,向阳,张海馨,等.长工作距视频显微镜物镜设计[J].光电工程,2014,41(12):24-27.
[3]He Xiangyan,Chen Yinghua,Liao Wenzhe,et al.of monocular zoom microscope objective in succinct structure based on Zemax[J].Optical Instruments,2013,35(5):41-45.(in Chinese)何湘艳,陈莹花,廖文哲,等.基于Zemax的简单连续变倍显微物镜设计[J].光学仪器,2013,35(5):41-45.
[4]Miao Jianyu,Zhang Liping,Zhai Yan,et al.Structural realization of small zoom camera[J].Chinese Optics,2014,7(1):169-174.(in Chinese)苗健宇,张立平,翟岩,等.小型连续变焦相机的结构实现[J].中国光学,2014,7(1):169-174.
[5]Jiang Lun,Huang Wei.Design of long focal length large zoom ratio MWIR zoom optical system[J].Infrared and Laser Engineering,2012,41(7):1867-1871.(in Chinese)江伦,黄玮.长焦距大变倍比中波红外变焦距系统设计[J].红外与激光工程,2012,41(7):1867-1871.
[6]Chang Qun.Optical Design Anthology[M].Beijing:Science Press,1976:16-17,27-29,155-165.(in Chinese)常群.光学设计文案[M].北京:科学出版社,1976:16-17,27-29,155-165.
[7]Tian Tieyin,Wang Hong.Optical zoom system with long focal length and large aperture[J].Optics and Precision Enginneering,2014,22(9):2369-2374.(in Chinese)田铁印,王红.长焦距大口径连续变焦光学系统[J].光学精密工程,2014,22(9):2369-2374.
[8]Hong Yongfeng,Zhang Xueming,Cheng Xin,et al.Minialturization design of aerial zoom lenses[J].OptoElectronic Engineering,2010,37(3):61-65.(in Chinese)洪永丰,张学明,程欣.航空变焦镜头的小型化设计[J].光电工程,2010,37(3):61-65.
[9]Wang Hong,Tian Tieyin.Miniature design of 5×zoom optical system[J].Chinese Optics,2014,7(2):315-319.(in Chinese)王红,田铁印.5倍变焦距光学系统小型化设计[J].中国光学,2014,7(2):315-319.
[10]Chen Weining,Yang Hongtao,Liu Wei,et al.Optimization design method of cam curve for zoom lens[J].Infrared and Laser Engineering,2014,43(5):1535-1539.(in Chinese)陈卫宁,杨洪涛,刘伟,等.变焦凸轮曲线的优化设计方法[J].红外与激光工程,2014,43(5):1535-1539.
[11]Wang Wensheng.Contemporary Optical System Design[M].Beijing:National Defense Industry Press,2016:217-218,222-223.(in Chinese)王文生.现代光学系统设计[M].北京:国防工业出版社,2016:217-218,222-223.
[12]Yu Daoyin,Tan Hengying.Engineering Optics[M].Beijing:Chinese Machine Press,2006:152-153.(in Chinese)郁道银,谈恒英.工程光学[M].北京:机械工业出版社,2006:152-153.