新型悬丝约束支撑微纳测头的变刚度特性分析
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摘要
针对传统微纳测量装置在测量过程中测头支撑机构刚度不可变化的问题,设计了一种基于悬丝约束支撑的变刚度微纳测头。利用压电装置驱动柔顺导向机构产生位移,以改变悬丝所受的轴向张紧力。基于应力刚化原理改变悬丝的横向刚度,进而改变测头支撑机构的整体刚度,以获得具有变刚度性能的新型微纳测头。根据测头支撑机构在测量过程中刚度的变化,分别建立刚性和柔性模式下微纳测头Z向和横向的刚度理论模型。根据有限元仿真和刚度理论模型,分别得到测头刚度随悬丝端面受力的变化曲线。对比测头刚度的仿真值和理论值,得到测头Z向和横向刚度的平均相对误差分别为2.41%和4.72%,结果表明理论模型具有较高的准确性。研究成果为该类型测头的变刚度控制奠定了前期理论基础。
To address the problem that the stiffness of the probe support mechanism cannot be changed during the measurement process using a traditional micro-nano measuring device,a micro-nano probe with variable stiffness was designed based on the constraint support of the suspension wire.A piezoelectric device was employed to drive the compliant guide mechanism,which produces a displacement.Thus,the axial tension of the suspension wire changed.Based on the principle of stress stiffening,the transverse stiffness of the suspension wire was changed,and the overall stiffness of the probe support mechanism was varied to obtain a novel micro-nano probe with variable stiffness performance.Depending on the stiffness variation of the probe support mechanism during the measurement process,the theoretical model of the Z-direction and the transverse stiffness of the micro-nano probe were established in the rigid and flexible modes,respectively.Based on the finite element simulation and the established theoretical stiffness model,the curve of the stiffness change of the probe versus the terminal force applied on the suspension wire was obtained.Comparing the simulated and theoretical values of the probe stiffness,the average relative errors of the Z-direction and transverse stiffness of the probe were observed to be 2.41% and 4.72%,respectively.This indicates that the theoretical model had high accuracy.The research results laid a preliminary theoretical foundation for variable stiffness control of this type of probe.
To address the problem that the stiffness of the probe support mechanism cannot be changed during the measurement process using a traditional micro-nano measuring device,a micro-nano probe with variable stiffness was designed based on the constraint support of the suspension wire.A piezoelectric device was employed to drive the compliant guide mechanism,which produces a displacement.Thus,the axial tension of the suspension wire changed.Based on the principle of stress stiffening,the transverse stiffness of the suspension wire was changed,and the overall stiffness of the probe support mechanism was varied to obtain a novel micro-nano probe with variable stiffness performance.Depending on the stiffness variation of the probe support mechanism during the measurement process,the theoretical model of the Z-direction and the transverse stiffness of the micro-nano probe were established in the rigid and flexible modes,respectively.Based on the finite element simulation and the established theoretical stiffness model,the curve of the stiffness change of the probe versus the terminal force applied on the suspension wire was obtained.Comparing the simulated and theoretical values of the probe stiffness,the average relative errors of the Z-direction and transverse stiffness of the probe were observed to be 2.41% and 4.72%,respectively.This indicates that the theoretical model had high accuracy.The research results laid a preliminary theoretical foundation for variable stiffness control of this type of probe.
引文
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[2]陈贺,陈晓怀,王珊,等.微纳米测量机测头结构的参数设计及分析[J].计量学报,2013,34(5):401-405.CHEN H,CHEN X H,WANG SH,et al..The parameters design and analysis of micro-nano CMMProbe[J].Acta Metrologica Sinica,2013,34(5):401-405.(in Chinese)
[3]陈晓怀,陈贺,王珊,等.微纳测量机测头弹性结构的参数设计[J].光学精密工程,2013,21(10):2587-2593.CHEN X H,CHEN H,WANG SH,et al..Design of elastic structure parameters of probe in micro-nano CMM[J].Opt.Precision Eng.,2013,21(10):2587-2593.(in Chinese)
[4]WECKENMANN A,PEGGS G,HOFFMANN J.Probing systems for dimensional micro-and nanometrology[J].Measurement Science&Technology,2006,17(3):504-509.
[5]KHALID A,PETER K,SIMON L.et al..Performance assement of a new variable stiffness probing system for micro-CMMs[J].Sensors,2016,16(4):492.
[6]HE M,LIU R,LI Y,et al..Tactile probing system based on micro-fabricated capacitive sensor[J].Sensors&Actuators A Physical,2013,194:128-134.
[7]BONELLO P,BRENNAN M J,ELLIOTT S J,et al..Designs for an adaptive tuned vibration absorber with variable shape stiffness element[J].Proceedings Mathematical Physical&Engineering Sciences,2005,461(2064):3955-3976.
[8]CHALLA V R,PRASAD M,SHI Y,et al..A vibration energy harvesting device with bidirectional resonance frequency tunability[J].Smart Materials&Structures,2008,17(1):15010-15035.
[9]FAN K C,CHENG F,PAN W T,et al..Analysis of the contact probe mechanism for micro-coordinate measuring machines[J].Optoelectronics Instrumentation&Data Processing,2010,46(4):340-346.
[10]ALBLALAIHID K,KINNELL P,LAWES S.Fabrication and characterisation of a novel smart suspension for micro-CMM probes[J].Sensors&Actuators A Physical,2015,232:368-375.
[11]胡俊峰,陈星星.具有零刚度特性的微动平台优化设计[J].光学精密工程,2018,26(6):1430-1440.HU J F,CHEN X X.Optimized design of a micromotion stage with zero stiffness[J].Opt.Precision Eng.,2018,26(6):1430-1440.(in Chinese)
[12]HOWELL L L,MAGLEBY S P,OLSEN B M.Handbook of Compliant Mechanisms[M].New York:John Wiley&Sons,2013.
[13]胡俊峰,徐贵阳,郝亚洲.基于响应面法的微操作平台多目标优化[J].光学精密工程,2015,23(4):1096-1104.HU J F,XU G Y,HAO Y ZH.Multi-objectiveoptimization of micro-manipulation stage based on response surface method[J].Opt.Precision Eng.,2015,23(4):1096-1104.(in Chinese)
[14]孙玉琼.面向压电驱动纳米定位平台的自抗扰运动控制[D].济南:山东大学,2016.SUN Y Q.Active Disturbance Rejection Control for Piezo-driven Nanopositioning Stage[D].Jinan:Shandong University,2016.(in Chinese)
[15]卢倩,黄卫清,孙梦馨.基于柔度比优化设计杠杆式柔性铰链放大机构[J].光学精密工程,2016,24(1):102-111.LU Q,HUANG W Q,SUN M X.Optimizationdesign of amplification machanism for level flexure hinge based on compliance ratio[J].Opt.Precision Eng.,2016,24(1):102-111.(in Chinese)
[16]ALBLALAIHID K,LAWES S,KINNELL P.Variable stiffness probing systems for micro-coordinate measuring machines[J].Precision Engineering,2016,43:262-269.
[17]余惠娟.基于谐振模式的三维纳米测头触发方法研究[D].合肥:合肥工业大学,2015.YU H J.Research on the Trigger Mechanism of a3 D Resonant Nano Probe[D].Hefei:Hefei University of Technology,2015.(in Chinese)
[18]PRIL W.Development of high precision mechanical probes for coordinate measuring machines[J].Technische Universiteitndhoven,2002,25:100-102.