基于可编程多轴控制器的红外传感器片上测试系统设计
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摘要
探针测试台是一种传统半导体工艺中间测试设备,用于在硅片划片前测试电子器件性能、良率,并给出其在晶圆上分布的映射图表。目前国内外自动或半自动探针测试台都是针对传统IC电路设计,采用封闭式结构,无法根据传感器多变的特性、复杂的测试环境需求完成对器件的片上测试。采用美国Delta Tau公司推出的PMAC可编程多轴运动控制器作为核心控制系统,构建了一套针对红外热电堆器件特殊测试需求的批量化片上测试系统。该测试系统具有响应速度快、控制精度高、可扩展性强的特性,不仅可满足红外热电堆器件的片上批量化测试需求,还可通过定制性的模块删减以满足不同传感器的片上测试。
Probe station is a kind of conventional equipment in semiconductor process test,usually used for device electric performance testing,and giving wafer distribution mapping before silicon dicing. Current automatic probe station for domestic use mostly imported,use the enclosed structure,which cannot be based on device characteristics,the test environment needs to build targeted semiconductor test systems. The U. S. Delta Tau company's PMAC programmable multi-axis motion controller products was used as the core control system to built an automatic probe station for wafer-level Testing of Thermopile IR Detectors. The test system has a fast response,high control accuracy,scalability and strong features,meet the requirements of wafer-level Testing of Thermopile IR Detectors.
Probe station is a kind of conventional equipment in semiconductor process test,usually used for device electric performance testing,and giving wafer distribution mapping before silicon dicing. Current automatic probe station for domestic use mostly imported,use the enclosed structure,which cannot be based on device characteristics,the test environment needs to build targeted semiconductor test systems. The U. S. Delta Tau company's PMAC programmable multi-axis motion controller products was used as the core control system to built an automatic probe station for wafer-level Testing of Thermopile IR Detectors. The test system has a fast response,high control accuracy,scalability and strong features,meet the requirements of wafer-level Testing of Thermopile IR Detectors.
引文
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7 邴龙健,雷玉勇,蔡黎明,等.基于PMAC控制器的开放式数控系统研究.机床与液压,2009;37(10):24—26Bing L J,Lei Y Y,Cai L M,et al.Study on the open CNC system based on PMAC controller.Machine Tool&Hydraulics,2009;37(10):24—26
2 徐如,秦会斌,郑梁.基于探针台的测量系统的研究与设计.机电工程,2011;28(12):1536—1538Xu R,Qin H B,Zheng L.Research and design of measuring system based on probe station.Journal of Mechanical&Electrical Engineering,2011;28(12):1536—1538
3 周丹,刘海岷.基于PMAC的开放式数控系统及其应用.机械制造与自动化,2009;38(2):133—135Zhou D,Liu H M.Open numerical control system and application based on PMAC.Machine Building&Automation,2009;38(2):133 —135
4 张萍,周汉昌,郝晓剑.微机械热电堆红外探测器的设计.传感器与微系统,2008;27(5):76—78Zhang P,Zhou H C,Hao X J.Design of micro machined thermoelectric infrared detector.Transducer and Microsystem Technologies,2008;27(5):76—78
5 王楷群.热电堆红外探测器的设计与性能测试.太原:中北大学,2010Wang K Q.Design and characteristic measurement of a thermopile infrared detector.Taiyuan:North University of China,2010
6 岳秋琴,陶桂宝,余华.基于PMAC的开放式多轴联动数控系统研究及应用.机械工程师,2012;(4):60—62Yue Q Q.Tao G B.Yu H.Research and application of the open multi-axis NC system based on PMAC.Mechanical Engineer,2012;(4):60—62
7 邴龙健,雷玉勇,蔡黎明,等.基于PMAC控制器的开放式数控系统研究.机床与液压,2009;37(10):24—26Bing L J,Lei Y Y,Cai L M,et al.Study on the open CNC system based on PMAC controller.Machine Tool&Hydraulics,2009;37(10):24—26