红外热成像甲烷探测系统的双通带滤波器
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摘要
基于甲烷的红外吸收光谱,通过光谱拆分法实现了一种双通带滤波器的设计。通过调节离子源束流,改善了ZnS膜层的折射率,消除了背景噪声。通过引入可控薄层,降低了非周期窄带通膜系的制备难度。经实验测试与分析,所研制的双通带滤波器在3.31μm和7.67μm的透射率分别为89.25%、81.97%,达到了提高探测系统灵敏度的目的。
Based on the infrared absorption spectrum of methane,a dual-bandpass filter is designed by the spectral splitting.With the adjustment of ion source beams,the refractive index of the ZnS film layer is improved and the background noise is eliminated.The fabrication difficulty of aperiodic narrow-bandpass filter films is reduced by the introduction of controllable thin film layers.The experimental test and analysis show that the prepared dualbandpass filter possesses the transmissivity of 89.25% at 3.31μm and 81.97% at 7.67μm,respectively,and the goal for improving the sensitivity of detecting systems is achieved.
Based on the infrared absorption spectrum of methane,a dual-bandpass filter is designed by the spectral splitting.With the adjustment of ion source beams,the refractive index of the ZnS film layer is improved and the background noise is eliminated.The fabrication difficulty of aperiodic narrow-bandpass filter films is reduced by the introduction of controllable thin film layers.The experimental test and analysis show that the prepared dualbandpass filter possesses the transmissivity of 89.25% at 3.31μm and 81.97% at 7.67μm,respectively,and the goal for improving the sensitivity of detecting systems is achieved.
引文
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[2] Li J K,Jin W Q,Wang X,et al.Review of gas leak infrared imaging detection technology[J].Infrared Technology,2014,36(7):513-520.李家琨,金伟其,王霞,等.气体泄漏红外成像检测技术发展综述[J].红外技术,2014,36(7):513-520.
[3] Hagen N,Kester R T,Morlier C G,et al.Videorate spectral imaging of gas leaks in the longwave infrared[J].Proceedings of SPIE,2013,8710:871005.
[4] Baliga S, Bernascolle P.IR gas imaging in an industrial setting[J].Proceedings of SPIE,2010,7661:76610K.
[5] Tegstam J F,Danjoux R.Gas leak detection in the oil and gas industry using infrared optical imaging[J].Thermografie-Kolloquium,2007(3):1-10.
[6] Wang M R, Wang L X,Li J K,et al.Spatial concentration distribution model for short-range continuous gas leakage of small amount[J].Proceedings of SPIE,2012,8354:835414.
[7] Jiao Y,Xu L,Gao M G,et al.Investigation on remote measurement of air pollution by a method of infrared passive scanning imaging[J].Spectroscopy and Spectral Analysis,2012,32(7):1754-1757.焦洋,徐亮,高闽光,等.污染气体扫描成像红外被动遥测技术研究[J].光谱学与光谱分析,2012,32(7):1754-1757.
[8] Bi G L,Zhao J,Sui L,et al.SF6leak detection and location system based on infrared image[J].OptoElectronic Engineering,2011,38(3):76-80.毕国玲,赵建,隋龙,等.基于红外图像的SF6检漏定位系统[J].光电工程,2011,38(3):76-80.
[9] Xiong S F,Fu X H,Liu D M,et al.Study and fabrication of narrow-band filter film in methane gas detection and recognition system[J].Chinese Journal of Lasers,2017,44(3):0303003.熊仕富,付秀华,刘冬梅,等.甲烷气体探测与识别系统窄带滤光膜的研制[J].中国激光,2017,44(3):0303003.
[10] Xiong S F,Fu X H,Liu D M,et al.Study on narrow-band filter based on infrared absorption characteristics of methane gas[J].Acta Photonica Sinica,2017,46(10):1023003.熊仕富,付秀华,刘冬梅,等.基于甲烷气体红外吸收特性窄带滤波器的研究[J].光子学报,2017,46(10):1023003.
[11] Chen Y A.Design of online monitoring system for methane gas based on infrared spectrum absorption[D].Hefei:University of Science and Technology of China,2016:17-19.陈友安.基于红外光谱吸收的甲烷气体在线监测系统设计[D].合肥:中国科学技术大学,2016:17-19.
[12] Yu H Z.Infrared optical material[M].Beijing:National Defense Industry Press,2015:54-60.余怀之.红外光学材料[M].北京:国防工业出版社,2015:54-60.
[13] Fu X H,Chen Z H,Zhang J,et al.Development of short-medium wave energy regulation filter in infrared simulation system[J].Chinese Journal of Lasers,2016,43(5):0507001.付秀华,陈志航,张静,等.红外仿真系统短中波能量调节滤波器的研制[J].中国激光,2016,43(5):0507001.
[14] Fu X H,Jiang H Y,Zhang J,et al.Preparation of short and medium wave infrared anti-reflective coating based on chalcogenide glass[J].Chinese Journal of Lasers,2017,44(9):0903002.付秀华,姜洪妍,张静,等.基于硫系玻璃的短中波红外减反膜研制[J].中国激光,2017,44(9):0903002.
[15] Tang J F,Gu P F,Liu X,et al.Modern optical thin film technology[M].Hangzhou:Zhejiang University Press,2006:114-118.唐晋发,顾培夫,刘旭,等.现代光学薄膜技术[M].杭州:浙江大学出版社,2006:114-118.
[16] Fu X H,Xiong S F,Liu D M,et al.Study and fabrication of wide angle and broad spectrum gray adjustment film in infrared imaging system[J].Acta Optica Sinica,2016,36(5):0531001.付秀华,熊仕富,刘冬梅,等.大角度宽光谱红外成像系统灰度调节膜的研制[J].光学学报,2016,36(5):0531001.
[17] Luo H H,Liu D Q,Yin X,et al.Packing density of germaniumthinfilmsatdifferentdeposited temperature[J].Opto-Electronic Engineering,2011,38(12):90-93.罗海瀚,刘定权,尹欣,等.锗(Ge)光学薄膜在不同沉积温度下的聚集密度研究[J].光电工程,2011,38(12):90-93.
[18] Feng Y D,Qin Y,Yu T Y.Influence of ion-assisted deposition on crystal structures and optical characteristics of ZnS films[J].Laser&Optoelectronics Progress,2017,54(10):103101.冯毅东,秦杨,于天燕.离子辅助沉积对ZnS薄膜晶体结构及光学特性的影响[J].激光与光电子学进展,2017,54(10):103101.