一种采用穴番-A敏感膜的新型声表面波瓦斯传感器的研究
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摘要
本文利用笼形超分子材料穴番-A对甲烷分子的特异性包合作用,提出了一种能够在室温下工作的采用穴番-A敏感膜的新型声表面波瓦斯传感器。设计研制了中心频率为300 MHz的低损耗、高Q值SAW谐振器,并以所研制的谐振器构成双通道差分振荡器。分别以点涂法和旋涂法在传感通道SAW谐振器表面进行了敏感膜的镀膜。通过实验观察对比了采用两种镀膜方式的SAW瓦斯传感器在常温下对5%甲烷气体的响应。实验结果显示点涂镀膜的传感器响应约为1 k Hz,远大于旋涂镀膜方式。AFM表面形貌表征显示了敏感膜表面粗糙度是造成这一差异的主要原因。实验还研究了传感器对不同浓度甲烷气体的响应,结果表明传感器响应随气体浓度降低而减小,两者存在良好的线性关系,测试灵敏度为205 Hz/%,检测下限约为0.2%。
Utilizing the supramolecular compound cryptophane- A's specific absorption to methane molecules,anovel room-temperature SAW methane sensor covered with cryptophane-A film is proposed. A 300 MHz SAW reso-nator with low insertion loss and high quality factor is designed. Two-channel differential oscillator using SAW reso-nators as feedback elements is fabricated.The film deposition on the SAW resonator is completed by drop-coatingand spin-coating method respectively. Experiments have been conducted to study the response to 5% methane ofsensors coated via two coating methods. The results show that the response of drop-coated sensors achieves 1 k Hz,much larger than spin-coated ones. The surface topography via AFM illustrates that the surface roughness of sensingfilms is the main cause of the difference. The sensor's response to various methane concentrations is also studied.The result demonstrates that the sensor's response and methane concentrationare in approximatelinear relationship.The measured detection sensitivity is 205 Hz/%,and the detection limit is about 0.2%.
Utilizing the supramolecular compound cryptophane- A's specific absorption to methane molecules,anovel room-temperature SAW methane sensor covered with cryptophane-A film is proposed. A 300 MHz SAW reso-nator with low insertion loss and high quality factor is designed. Two-channel differential oscillator using SAW reso-nators as feedback elements is fabricated.The film deposition on the SAW resonator is completed by drop-coatingand spin-coating method respectively. Experiments have been conducted to study the response to 5% methane ofsensors coated via two coating methods. The results show that the response of drop-coated sensors achieves 1 k Hz,much larger than spin-coated ones. The surface topography via AFM illustrates that the surface roughness of sensingfilms is the main cause of the difference. The sensor's response to various methane concentrations is also studied.The result demonstrates that the sensor's response and methane concentrationare in approximatelinear relationship.The measured detection sensitivity is 205 Hz/%,and the detection limit is about 0.2%.
引文
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[13]谢晓,王文,刘明华,等.覆盖聚合物敏感膜的水平剪切型声表面波气体传感器机理分析[J].传感技术学报,2012,25(12):1627-1630.
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[15]温广明,周萍,张彩红,等.一种新型超分子化合物穴番-A合成的改进研究[J].山西大学学报(自然科学版),2008,31(2):218-220.
[2]张正勇,徐定钧,于震,等.热催化气体传感器的特性分析及其设计原则[J].传感技术学报,2008,21(9):1501-1506.
[3]丁海东,赵宇龙,孙智,等.氧化物半导体甲烷传感器研究进展[J].煤炭科学技术,2005,33(7):69-71,76.
[4]李乐宇,韩晓阳,张涛,等.基于红外吸收原理的甲烷探测器的研究[J].大众科技,2014,(11):21-24.
[5]Wohltjen H,Dessy R.Surface Acoustic Wave Probe for Chemical Analysis.Parts I-III[J].Anal.Chem,1979,5:1458-1475.
[6]王艳,张淑仪,杨跃涛,等.基于In2O3-Zn O复合敏感膜的声表面波室温H2传感器[C]//中国声学学会第九届青年学术会议论文集,2011:175-176.
[7]潘勇,杨柳,刘卫卫.一种用于检测H2S气体的SAW传感器技术[J].化学传感器,2012,32(4):49-52.
[8]Wen C,Zhu C,Ju Y,et al.A Novel NO2Gas Sensor Using Dual Track SAW Device[J].Sensors&Actuators A Physical,2010,159(2):168-173.
[9]秦墨林,潘勇.SAW技术在化学毒剂检测中的应用[C]//第十届全国化学传感器学术会议论文集,2008:101-102.
[10]Anisimkim V I,Penza M,Valentini A,et al.Detection of Combustible Gases by Means of a Zn O-on-Si Surface Acoustic Wave(SAW)Delay Line[J].Sensors and Actuators B:Chemical,1995,23(2/3):197-201.
[11]Garel L,Dutasta J,Collet A.Complexation of Methane and Chlorofluorocarbons by Cryptophane-A in Organic Solution[J].Angewandte Chemie International Edition in English,1993,32(8):1169-1171.
[12]Khoshaman A H,Li P C H,Merbouh N,et al.Highly Sensitive Supra-Molecular Thin Films for Gravimetric Detection of Methane[J].Sensors&Actuators B Chemical,2012,161(1):954-960.
[13]谢晓,王文,刘明华,等.覆盖聚合物敏感膜的水平剪切型声表面波气体传感器机理分析[J].传感技术学报,2012,25(12):1627-1630.
[14]Wohltjen H.Mechanism of Operation and Design Considerations for Surface Acoustic Wave Device Vapoursensors[J].Sensors&Actuators,1984,5(84):307-325.
[15]温广明,周萍,张彩红,等.一种新型超分子化合物穴番-A合成的改进研究[J].山西大学学报(自然科学版),2008,31(2):218-220.