电子级磷酸的生产工艺及发展现状
|
摘要
电子级磷酸常用于高精度、大规模集成电路以及精密电子元器件等生产过程中的清洗以及蚀刻阶段。随着各类高精度电子元器件的更新换代速度加快,对电子级磷酸控制微粒的要求也更高。已经工业化的MOS以及BVI级磷酸已经实现了工业生产,但是更加精细化的电子级磷酸市场依旧在发达国家垄断下,进口依赖度高,我国尚未有相应的工业化生产线,配套的检测设备以及分析方法也不甚健全。本文主要介绍电子级磷酸生产工艺及其市场应用,同时对电子级磷酸工业化发展战略进行了分析。
Electronic grade phosphoric acid was often used in the cleaning and etching stages of high precision,large scale integrated circuit(IC) and precision electronic components,such in the process of production.With the renewal speed of all kinds of high precision electronic components,the controlling of electronic grade phosphoric acid grain also needed to fit higher requirements.The MOS and BVI grade achieved industrial phosphoric acid production,but the market of more sophisticated electronic grade phosphoric acid remained under monopoly by developed countries.The import dependence of our country was very high.China did not possess a corresponding industrialization production line,also a complete set of testing equipment and analysis method was not set completely.The production technology and the market application of electronic grade phosphoric acid were focused on.At the mean time,the industrialization development strategy of the electronic grade phosphoric acid industrialization development strategy was also analyzed.
Electronic grade phosphoric acid was often used in the cleaning and etching stages of high precision,large scale integrated circuit(IC) and precision electronic components,such in the process of production.With the renewal speed of all kinds of high precision electronic components,the controlling of electronic grade phosphoric acid grain also needed to fit higher requirements.The MOS and BVI grade achieved industrial phosphoric acid production,but the market of more sophisticated electronic grade phosphoric acid remained under monopoly by developed countries.The import dependence of our country was very high.China did not possess a corresponding industrialization production line,also a complete set of testing equipment and analysis method was not set completely.The production technology and the market application of electronic grade phosphoric acid were focused on.At the mean time,the industrialization development strategy of the electronic grade phosphoric acid industrialization development strategy was also analyzed.
引文
[1]刘飞.电子级磷酸的纯化技术及其发展现状[J].贵州工业职业技术学院学报,2013,8(2):1-4.
[2]黄千钧.电子级磷酸的研究与生产进展[J].无机盐工业,2012,44(2):1-5.
[3]林军,吴小海,洪春美,等.电子级磷酸的制备工艺与应用研究进展[J].化工技术与发,2012,41(2):32-34.
[4]殷宪国.电子级磷酸制备中杂质的吸附与膜分离技术进展[J].硫磷设计与粉体工程,2010(5):11-13.
[5]殷宪国.高纯黄磷与电子级磷酸制备方法[J].硫磷设计与粉体工程,2009(6):19-24.
[6]骆吉林,李军,杨三可,等.电渗析法制电子级高纯磷酸[J].磷肥与复肥,2009,24(3):33-36.
[7]欧阳贻德,唐正姣,王存文,等.电子级磷酸的制备与研究进展[J].现代化工,2009(3):22-26.
[8]肖立华,曾波.电子级磷酸的研究进展[J].云南化工,2007,34(6):60-63.
[9]雷波,梅毅,杨亚斌.热法磷酸的发展趋势与研究方向[J].云南化工,2007,34(6):64-68.
[2]黄千钧.电子级磷酸的研究与生产进展[J].无机盐工业,2012,44(2):1-5.
[3]林军,吴小海,洪春美,等.电子级磷酸的制备工艺与应用研究进展[J].化工技术与发,2012,41(2):32-34.
[4]殷宪国.电子级磷酸制备中杂质的吸附与膜分离技术进展[J].硫磷设计与粉体工程,2010(5):11-13.
[5]殷宪国.高纯黄磷与电子级磷酸制备方法[J].硫磷设计与粉体工程,2009(6):19-24.
[6]骆吉林,李军,杨三可,等.电渗析法制电子级高纯磷酸[J].磷肥与复肥,2009,24(3):33-36.
[7]欧阳贻德,唐正姣,王存文,等.电子级磷酸的制备与研究进展[J].现代化工,2009(3):22-26.
[8]肖立华,曾波.电子级磷酸的研究进展[J].云南化工,2007,34(6):60-63.
[9]雷波,梅毅,杨亚斌.热法磷酸的发展趋势与研究方向[J].云南化工,2007,34(6):64-68.