三氯氧磷制备电子级磷酸
|
摘要
电子级磷酸是磷化工精细化发展的主要产品之一。近年来,国内许多高校、研究机构和企业都投入了很多力量进行研究。用工业三氯氧磷作原料,进行一系列的提纯工艺,先制备高纯三氯氧磷,再水解制得电子级磷酸,完全可以满足硅片的清洗、集成电路蚀刻等要求高的工序。
The electroric grade phosphoric acid is one of main products in fine phosphorus chemical industry. In the recently years,the preparation of electronic grade phosphoric acid has been investigated in universities,research institutions and enterprises of China. The electronic grade phosphorus oxychloride was prepared by industrial grade phosphorus oxychloride,and the electronic grade phosphoric acid was obtained by a series of hydrdysis and purification processes. The requirement of silicon wafer and integrated circuit etching application can be meeted.
The electroric grade phosphoric acid is one of main products in fine phosphorus chemical industry. In the recently years,the preparation of electronic grade phosphoric acid has been investigated in universities,research institutions and enterprises of China. The electronic grade phosphorus oxychloride was prepared by industrial grade phosphorus oxychloride,and the electronic grade phosphoric acid was obtained by a series of hydrdysis and purification processes. The requirement of silicon wafer and integrated circuit etching application can be meeted.
引文
[1]欧阳贻德,唐正姣,王存文,等.电子级磷酸的制备与研究进展[J].现代化工,2009,29(3):26-36.
[2]骆吉林,李军,杨三可,等.电渗析法制备电子级高纯磷酸[J].磷肥与复肥,2009,24(3):33-36.
[3]张跃军,王新龙.电子化学品生产与应用[M].江苏科学技术出版社,2005.
[2]骆吉林,李军,杨三可,等.电渗析法制备电子级高纯磷酸[J].磷肥与复肥,2009,24(3):33-36.
[3]张跃军,王新龙.电子化学品生产与应用[M].江苏科学技术出版社,2005.