用于10μm微测辐射热计的红外光学天线设计
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摘要
微测辐射热计利用热敏电阻对温度的敏感特性来实现红外探测,将光学天线场局域的能力应用于微测辐射热计,可以集中入射能量至热敏电阻,提高电阻的温度响应。基于这一思想设计了一种工作在红外波段的改进型蝶形光学天线,其中心场强最高可增强83倍。采用了多物理分析方法,结合两种常用的热敏材料(铝和氧化钒)对耦合结构的电磁特性和热学特性进行了分析。结果显示,在1000 W/m~2的入射功率密度下,铝温升可达1.85 mK,氧化钒温升0.85 mK,与同类工作相比温度响应增强了数倍。该改进型蝶形光学天线可用于微测辐射热计提升红外探测效率,在高密度红外成像器件应用中发挥作用。
Micro-bolometers make use of the sensitivity of thermistor to temperature to realize infrared detection. By combining field enhancement of optical antenna with micro-bolometer, the incident energy can focus on thermistor and the temperature response of the thermistor will be improved. Based on this idea, we design an improved bow-tie antenna working in the infrared band, which can enhance the electric field by 83 times. A multi-physics simulation is used to analyze the antenna with two kinds of thermistor(aluminum and vanadium oxide). The results show that at an incident power density of 1000 W/m~2, the temperature rise of Al is 1.85 mK and the temperature rise of VOx is 0.85 mK. The temperature response is several times of other similar work. The improved bow-tie antenna can be used on micro-bolometer to increase the detection efficiency and play a role in high density imaging device applications.
Micro-bolometers make use of the sensitivity of thermistor to temperature to realize infrared detection. By combining field enhancement of optical antenna with micro-bolometer, the incident energy can focus on thermistor and the temperature response of the thermistor will be improved. Based on this idea, we design an improved bow-tie antenna working in the infrared band, which can enhance the electric field by 83 times. A multi-physics simulation is used to analyze the antenna with two kinds of thermistor(aluminum and vanadium oxide). The results show that at an incident power density of 1000 W/m~2, the temperature rise of Al is 1.85 mK and the temperature rise of VOx is 0.85 mK. The temperature response is several times of other similar work. The improved bow-tie antenna can be used on micro-bolometer to increase the detection efficiency and play a role in high density imaging device applications.
引文
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[2] 胡伟达,梁健,越方禹,等.新型亚波长陷光结构HgCdTe红外探测器研究进展[J].红外与毫米波学报,2016,35(1):25-36 Hu W D,Liang J,Yue F Y,et al.Recent progress of sub-wavelength photon trapping HgCdTe infrared detector[J].Journal of Infrared & Millimeter Waves,2016,35(1):25-36
[3] González F J,Abdel-Rahman M,Boreman G D.Antenna-coupled VOx thin-film micro-bolometer array[J].Microwave & Optical Technology Letters,2010,38(3):235-237
[4] Crozier K B,Sundaramurthy A,Kino G S,et al.Optical antennas:resonators for local field enhancement[J].Journal of Applied Physics,2003,94(7):4632-4642
[5] Alda J,González F J.Multiphysics simulation for the optimization of optical nanoantennas working as distributed bolometers in the infrared[J].Journal of Nanophotonics,2013,7(10):238-245
[6] González F J,Boreman G D.Comparison of dipole,bowtie,spiral and log-periodic IR antennas[J].Infrared Physics & Technology,2005,46(5):418-428
[7] Gou J,Niu Q,Liang K,et al.Frequency modulation and absorption improvement of THz micro-bolometer with micro-bridge structure by spiral-type antennas.[J].Nanoscale Research Letters,2018,13(1):74
[8] Han X,Ji X,Wen H,et al.H-Shaped resonant optical antennas with slot coupling[J].Plasmonics,2012,7(1):7-11
[9] Zhang J,Yang J,Gong Q.Electric field enhancing properties of the V-shaped optical resonant antennas[J].Optics Express,2007,15(25):16852-16859
[10] Biagioni P,Huang J S,Hecht B.Nanoantennas for visible and infrared radiation[J].Reports on Progress in Physics,2012,75(2):024402
[11] Muhlschlegel P,Eisler H J,Martin O J F,et al.Resonant optical antennas[J].Science,2005,308(5728):1607-1609