垂直型MoS_2/C_(60)范德华异质结的研究
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  • 英文篇名:Study of Vertical MoS_2/C_(60) van der Waals Heterojunction
  • 作者:潘志伟 ; 邓金祥 ; 张浩 ; 白志英 ; 李瑞东 ; 王贵生 ; 段苹 ; 王吉有
  • 英文作者:Pan Zhiwei;Deng Jinxiang;Zhang Hao;Bai Zhiying;Li Ruidong;Wang Guisheng;Duan Ping;Wang Jiyou;College of Applied Sciences,Beijing University of Technology;
  • 关键词:MoS2 ; C60 ; 薄膜 ; 异质结 ; 导电模型
  • 英文关键词:MoS2;;C60;;thin film;;heterojunction;;conduction model
  • 中文刊名:BDTJ
  • 英文刊名:Semiconductor Technology
  • 机构:北京工业大学应用数理学院;
  • 出版日期:2019-01-03
  • 出版单位:半导体技术
  • 年:2019
  • 期:v.44;No.365
  • 基金:国家自然科学基金资助项目(60876006,60376007);; 北京市教育委员会科技计划重点项目(KZ201410005008);; 北京工业大学研究生科技基金资助项目(ykj-2017-00673)
  • 语种:中文;
  • 页:BDTJ201901005
  • 页数:7
  • CN:01
  • ISSN:13-1109/TN
  • 分类号:27-33
摘要
研究了采用垂直堆垛方式构筑的MoS_2/C_(60)范德华异质结的特性。利用直流磁控溅射法制备Mo薄膜,对Mo薄膜进行硫化退火处理得到MoS_2薄膜,采用真空蒸镀法在MoS_2薄膜上沉积C_(60)进而形成MoS_2/C_(60)范德华异质结,并制备了Au/MoS_2/C_(60)/Al结构的器件。对MoS_2薄膜的晶体结构进行了分析,对MoS_2,C_(60)及MoS_2/C_(60)薄膜的喇曼光谱及光吸收特性进行了测试和表征。结果表明:经过750℃退火后的MoS_2晶型为2H型;由于在MoS_2和C_(60)薄膜之间范德华力的存在,相对于生长在Si/SiO_2衬底上,沉积在MoS_2上的C_(60)薄膜喇曼特征峰发生红移; MoS_2/C_(60)薄膜在可见光范围内具有明显的光吸收特性;异质结表现出良好的整流特性,通过电子导电模型分析得出电子的传输机制包含热电子发射,空间电荷限制电流传导(SCLC)和隧穿现象。
        Characteristics of van der Waals heterojunction of MoS_2/C_(60) fabricated by vertical stacking were investigated.Mo films were prepared by DC magnetron sputtering method,and MoS_2 films were formed by sulfurized and annealed in S(g) atmosphere.The C_(60) films were deposited on MoS_2 films by vacuum evaporation,thus MoS_2/C_(60) van der Waals heterojunction was formed.A device with Au/MoS_2/C_(60)/Al structure was prepared.The crystal structure of MoS_2 film was analyzed.The Raman spectra and absorption properties of MoS_2,C_(60) and MoS_2/C_(60) films were tested and characterized.The results show that the crystal structure of MoS_2 after annealing at 750℃ is trigonal prismatic(2H).When C_(60) is deposited on the MoS_2 film,the Raman peak of C_(60) is slightly red-shifted in comparison with that deposited on Si/SiO_2 substrate,due to van der Waals forces between MoS_2 and C_(60).The MoS_2/C_(60) film has good absorption properties in visible light range.The heterojunction shows good rectification characteristics.Through electron conduction model analysis,the transport mechanisms of the electronics include thermionic emission,space charge limited conduction(SCLC),and tunneling phenomenon.
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