一种热壁LPTEOS设备自动供液系统
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摘要
介绍了一种自主开发的自动供液系统。该系统适用于多台SVG7000热壁LPTEOS立式炉。详细介绍了系统的结构、原理及动作流程等。与传统的自动供液系统相比,该系统增加了多回路控制,优化了自动供液的时间,可同时控制多台设备,并保持每次运行程序前设备液态源液位一致。对使用该系统前后设备运行的数据进行对比,发现该自动供液系统将立式炉的稳定性提升了10%以上。
A self-developed automatic liquid supply system was presented. It was suitable for multiple SVG7000 hot well LPTEOS vertical furnace. The structure, circuit principle and process flow of the automatic liquid supply system were introduced in detailed. Compared with traditional automatic liquid supply systems, the proposed system mainly added multi-loop control elements and optimized the time of automatic liquid supply. It had the characteristics of controlling multiple equipment at the same time and keeping the liquid level consistent before each operation procedure. By comparing the equipment operation data before and after using the system, the stability of the equipment was effectively improved by more than 10 percent after using the automatic liquid supply system.
A self-developed automatic liquid supply system was presented. It was suitable for multiple SVG7000 hot well LPTEOS vertical furnace. The structure, circuit principle and process flow of the automatic liquid supply system were introduced in detailed. Compared with traditional automatic liquid supply systems, the proposed system mainly added multi-loop control elements and optimized the time of automatic liquid supply. It had the characteristics of controlling multiple equipment at the same time and keeping the liquid level consistent before each operation procedure. By comparing the equipment operation data before and after using the system, the stability of the equipment was effectively improved by more than 10 percent after using the automatic liquid supply system.
引文
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[2] SVG Company.VTR7000 maintenance manual [Z].1991:187-222.
[3] SVG Company.Thermco systems series 7000 VTR maintenance manual [Z].1996:121-143.
[4] SVG Company.VTR 7000 mechanical and automation training [Z].1996:103-302.
[5] 吴海.热壁LPCVD设备TEOS工艺炉管的使用与维护 [J].半导体技术,2012,37(10):786-789.
[6] SCHUMACHER Company.TrabsFill II-SS chemical refill system installation and operation manual [Z].1994.
[7] SCHUMACHER Company.MDOT installation and operation manual [Z].1991.
[8] GMST Company.Liquid chemical delivery system LCSS-200CHD (TEOS) safety/operation manual [Z].2010.
[9] 2803 Thru 2824 high-voltage high-current Darlington arrays data sheet [EB/OL].http://www.allegromicro.com.