Sc_2O_3掺杂对Y_2O_3-Gd_2O_3-HfO_2难熔稀土氧化物直热式阴极热发射性能的影响
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  • 英文篇名:Effect of Sc_2O_3-Doping on Thermal Emission Properties of Y_2O_3-Gd_2O_3-HfO_2 Thermal Cathode
  • 作者:陈晓倩 ; 王小霞 ; 张兆传 ; 李云 ; 赵庆兰
  • 英文作者:Chen Xiaoqian;Wang Xiaoxia;Zhang Zhaochuan;Li Yun;Zhao Qinglan;Key Laboratory of High Power Microwave Sources and Technology,Institute of Electronics,Chinese Academy of Sciences;University of Chinese Academy of Sciences;
  • 关键词:直热式阴极 ; Y_2O_3-Gd_2O_3-HfO_2 ; Sc_2O_3掺杂 ; 热发射电流密度
  • 英文关键词:Direct thermal cathode;;Y_2O_3-Gd_2O_3-HfO_2;;Sc_2O_3 doping;;Thermal emission current density
  • 中文刊名:ZKKX
  • 英文刊名:Chinese Journal of Vacuum Science and Technology
  • 机构:中国科学院电子学研究所高功率微波源与技术重点实验室;中国科学院大学;
  • 出版日期:2019-02-15
  • 出版单位:真空科学与技术学报
  • 年:2019
  • 期:v.39
  • 基金:国家自然科学基金项目(批准号:61771454)
  • 语种:中文;
  • 页:ZKKX201902007
  • 页数:5
  • CN:02
  • ISSN:11-5177/TB
  • 分类号:41-45
摘要
Y_2O_3-Gd_2O_3-HfO_2难熔稀土氧化物直热式阴极具有制备工艺简单,热发射电流密度大,次级电子发射系数大,寿命长等优点,在大功率连续波磁控管中具有很好的应用潜力。为进一步提高Y_2O_3-Gd_2O_3-HfO_2阴极的热发射性能,本文对该阴极的发射物质进行了不同比例Sc_2O_3的掺杂,结果表明,Sc_2O_3的掺杂能有效提高Y_2O_3-Gd_2O_3-HfO_2阴极的热发射电流密度,其中,掺杂10%(质量比)Sc_2O_3的Y_2O_3-Gd_2O_3-HfO_2阴极热发射电流密度在1500℃下达到5.3 A/cm~2,比未掺杂时提升了35.5%。由于在阴极激活过程中Sc_2O_3与Y_2O_3形成了固溶体,合成氧化物中Sc得到电子并释放出游离Sc,增强了涂层的导电性,所以,Sc_2O_3掺杂Y_2O_3-Gd_2O_3-HfO_2难熔稀土氧化物直热式阴极热发射性能具有显著提高。
        The Sc_2O_3-doped Y_2O_3-Gd_2O_3-HfO_2 coatings,an advanced direct-heating cathode material with excellent thermal emission properties,were synthesized via solid state reaction of refractory and rare-earth metal oxides.The influence of the Sc_2O_3-doping on the thermal emission properties of Y_2O_3-Gd_2O_3-HfO_2 coatings was investigated with scanning electron microscopy and energy dispersive spectroscopy.The results show that the Sc_2O_3-doping effectively increased the emission current density of the cathode.To be specific,doping with 10%(wt) Sc_2O_3 increased the emission current density up to 5.3 A/cm~2 at 1500℃,35.5% higher than that of the un-doped cathode.The free Sc atoms,possibly released in formation of Sc_2O_3 and Y_2O_3 solid solution and considerably increasing the conductivity of Y_2O_3-Gd_2O_3-HfO_2 coatings,explained the mechanism responsible for the significant enhancement of thermal emission current density.
引文
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