平面光学元件PMD面形检测的调整技术研究
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摘要
针对相位测量偏折术(PMD)检测平面光学元件面形的光路结构,系统地分析了各部件因各自由度的不确定度变化对重建面形的影响,并且提出了一种高精度的平面元件调整方法。通过对相移算法得到的显示器坐标与通过光线追迹得出的参考面显示器坐标进行比较,能够将被测镜调节至理想测试状态,从而能准确求出被测面上各点斜率,再采用波前重建算法,实现了光学元件面形重建。实验结果显示,有效口径为Ф140mm的平面元件在去掉Zernike多项式前6项的面形数据与干涉仪的测量结果差值在RMS=5nm以内,结果远优于未经过该方法调整的结果。因此,该调整方法可行,能够有效完成对平面元件的精密调整,具有很大的应用价值。
According to the light path structure of the flat optical surface detection by phase measurement deflectometry(PMD),the influence of the test components'uncertainty variation caused by freedom degree on the reconstructed surface is systematically analyzed in this paper.And a kind of high accurate optical flat element adjustment method is proposed as well.By comparing the display coordinates obtained by the phase shift algorithm with the reference plane display coordinates obtained by ray tracing,the measured mirror can be adjusted to an ideal test status so as to accurately obtain the slope of each point on the measured surface.Then,the surface of optical elements can be reconstructed by the wavefront reconstruction algorithm.The experimental results show that the maximum of RMS difference between the test results and the interferometer measurement result is only 5nm when the first 6items of the Zernike polynomials is removed for a flat optics with an efficient diameter ofФ140mm.The result is far better than the ones without this adjustment.The adjustment method is feasible and can effectively complete the accurate adjustment and reach a high accuracy for a measurement of flat optics.
According to the light path structure of the flat optical surface detection by phase measurement deflectometry(PMD),the influence of the test components'uncertainty variation caused by freedom degree on the reconstructed surface is systematically analyzed in this paper.And a kind of high accurate optical flat element adjustment method is proposed as well.By comparing the display coordinates obtained by the phase shift algorithm with the reference plane display coordinates obtained by ray tracing,the measured mirror can be adjusted to an ideal test status so as to accurately obtain the slope of each point on the measured surface.Then,the surface of optical elements can be reconstructed by the wavefront reconstruction algorithm.The experimental results show that the maximum of RMS difference between the test results and the interferometer measurement result is only 5nm when the first 6items of the Zernike polynomials is removed for a flat optics with an efficient diameter ofФ140mm.The result is far better than the ones without this adjustment.The adjustment method is feasible and can effectively complete the accurate adjustment and reach a high accuracy for a measurement of flat optics.
引文
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[2]王富国,杨飞,赵宏超,等.TMT望远镜三镜系统的研究进展[J].中国激光,2013,6(5):644-651.WANG Fu-guo,YANG Fei,ZHAO Hong-chao,et al.Progress in TMT M3system[J].Chinese Journal of Lasers,2013,6(5):644-651.
[3]朱硕,张晓辉.高精度瑞奇-康芒检测法研究及测试距离精度影响分析[J].光学学报,2014,34(1):0112001-1-8.ZHU Shuo,ZHANG Xiao-hui.Study on high precision on Ritcheey-Common test and analysis of test distance influence[J].Acta Optical Sinica,2014,34(1):0112001-1-8.
[4]田秀云,吴时彬,伍凡,等.高精度大口径平面镜瑞奇-康芒定量检测方法研究[J].光学技术,2004,30(4):486-488.TIAN Xiu-yun,WU Shi-bin,WU Fan,et al.Quantitative test method of Ritchey-Common testin large high precision flat measurements[J].Optical Technique,2004,30(4):486-488.
[5]Faber C,Olesch E,Krobot R,et al.Deflectometry challenges interferometry—the competition gets tougher![C].SPIE,2012,8493:84930R.
[6]Husler G,Faber C,Olesch E,et al.Deflectometry vs.Interferometry[C].SPIE,2013,8788:87881C.
[7]Peng Su,Yuhao Wang,James H Burge,et al.Nonnull full field X-ray mirror metrology using SCOTS:a reflection deflectometry approach[J].Opt.Express,2012,20(11):12393-12406.
[8]Lirong Wang,Peng Su,Robert Parks,et al.A lowcost,flexible,high dynamic range test for free-form illumination optics[C].SPIE,2010,7652:76521H.
[9]Margaret Z Dominguez,John Armstrong,Peng Su,et al.SCOTS:a useful tool for specifying and testing optics in slope space[C].SPIE,2012,8493:84931D.
[10]Su P,Parks R E,Wang L,et al.Software configurable optical test system-computerized reverse Hartmann test[J].Appl.Opt.,2010,49(23):4405-4412.
[11]Kewei E,Dahai Li,Lijie Yang,et al.A new optical flat surface measurement method based on machine vision and deflectometry[C].SPIE,2016,10155:101551X.
[12]Kewei E,Dahai Li,Chen Zhang,et al.Four-step shear method for the absolute measurement of a flat surface based on phase measuring deflectometry[J].Appl.Opt.,2016,55(30):8419-8425.
[13]Wu Y X,Yue H M,Yi J Y,et al.Phase error analysis and reduction in phase measuring deflectometry[J].Opt.Eng.,2015,54.
[14]鄂可伟,李大海,李萌阳,等.基于斜率传感的平面元件面形检测技术研究[J].光学学报,2014,34(s1):s112004-1-7.E Ke-wei,LI Da-hai,LI Meng-yang,et al.Study on the surface shape measurement of planar element based on slope sensor method[J].Acta Optical Sinica,2014,34:sll2004-1-7.
[15]李萌阳,李大海,王琼华,等.用方形区域内的标准正交多项式重构波前[J].中国激光,2012,11:153-160.LI Meng-yang,LI Da-hai,WANG Qiong-hua,et al.Wavefront reconstrution with orthonormal polynomials in a square area[J].Chinese Journal of Lasers,2012,11:153-160.
[16]Su P,Parks R E,Wang L,et al.Software configurable optical test system-computerized reverse Hartmann test[J].Appl.Opt.,2010,49(23):4405-4412.
[17]ZHANG Zheng-you.A flexible new technique for camera calibration[J].IEEE Transactions on Pattern Analysis and Machine Intelligence,2000,22(11):1331-1334.
[18]代贞强,李大海,杨丽杰,等.基于光线角度标定的坐标测量方法[J].光学与光电技术,2015,13(3):29-33.DAI Zhen-qiang,LI Da-hai,YANG Li-jie,et al.Coordinate measuring method based on the angel calibration of ray[J].Optics&Optoelectronic Technology,2015,13(3):29-33.
[19]Chunyu Zhao,James H.Burge,Orthonormal vector polynomials in a unit circle,PartⅡ:completing the basis set[J].Optics Express,2008,16(9):6586-6591.