基于相位测量偏折术的反射镜三维面形测量
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摘要
基于相位测量偏折术(PMD)测量原理,提出了一种简单、可靠、精度高的三维面形检测新方法,可以运用于非球面反射镜精磨与粗抛光阶段的面形检测。所提检测方法通过利用入射光线、小孔坐标,以及虚拟的辅助表面来得到待测反射镜面的绝对高度和梯度。测量时,在CCD相机前放置一个小孔光阑来实现小孔成像模型,并以该小孔的位置作为相机的位置,同时利用相移法并通过移动LCD显示屏一次,获得摄像机上每个像素点所对应的入射光线。该方法对实验设备的位置无特殊要求,不需要辅助器件,检测过程简单,检测结果可靠。而且,该检测方法采用虚拟的辅助表面对反射镜面进行检测而不是采用入射光线与反射光线的交点,不需要对相机光线进行标定,检测结果受标定误差的影响很小,所以该检测方法具有很高的检测精度。计算机仿真与初步实验验证了该方法的可行性。
A novel three-dimensional(3D) shape measuring method based on phase measuring deflectometry(PMD) is presented, which can be used to measure the aspheric mirror during the stages of fine grinding and the beginning of polish. The proposed method measures the absolute height and slope of the specular surface with incidence ray, camera pinhole and dummy assistant surfaces. During the measurement, a camera with an external stop is used to realize pinhole camera model. The external stop represents the position of the camera and the incidence ray corresponding to the pixels of the camera can be obtained by moving LCD screen once.The procedure of the test is simple and the result is believable because it has no restrict requirements for the experimental devices and no need of other auxiliary devices. What′s more, this method measures the specular surface with dummy auxiliary surfaces instead of the intersection of the incidence ray and the camera ray. So there is no need to calibrate the camera ray. This method can be used to test the specular surface with high precision because the calibration error has little effect on the result of the testing. Computer simulation and experiment validate the feasibility of the proposed method.
A novel three-dimensional(3D) shape measuring method based on phase measuring deflectometry(PMD) is presented, which can be used to measure the aspheric mirror during the stages of fine grinding and the beginning of polish. The proposed method measures the absolute height and slope of the specular surface with incidence ray, camera pinhole and dummy assistant surfaces. During the measurement, a camera with an external stop is used to realize pinhole camera model. The external stop represents the position of the camera and the incidence ray corresponding to the pixels of the camera can be obtained by moving LCD screen once.The procedure of the test is simple and the result is believable because it has no restrict requirements for the experimental devices and no need of other auxiliary devices. What′s more, this method measures the specular surface with dummy auxiliary surfaces instead of the intersection of the incidence ray and the camera ray. So there is no need to calibrate the camera ray. This method can be used to test the specular surface with high precision because the calibration error has little effect on the result of the testing. Computer simulation and experiment validate the feasibility of the proposed method.
引文
1 Liu Yuankun,Evelyn Olesch,Yang Zheng,et al..A one-dimensional phase-shift technique based on dual-frequency crossed fringe for phase measuring deflectometry[J].Chinese J Lasers,2015,42(3):0308005.刘元坤,Olesch E,杨征,等.基于双频正交光栅一维相移的相位测量偏折术研究[J].中国激光,2015,42(3):0308005.
2 Tian Zixia,Chen Wenjing,Su Xianyu.Method for improving accuracy and measurement speed of PMP using error diffusion binary encoded sinusoidal grating[J].Laser&Optoelectronics Progress,2014,51(12):121201.田紫霞,陈文静,苏显渝.采用二元编码的正弦光栅提高PMP测量速度和精度的方法[J].激光与光电子学进展,2014,51(12):121201.
3 Zhao Wenchuan,Zhong Xianyun,Liu Bin.The surface flaws inspection of optical components based on the fringe reflection[J].Acta Photonica Sinica,2014,43(9):0912007.赵文川,钟显云,刘彬.基于条纹反射的光学表面疵病检测法[J].光子学报,2014,43(9):0912007.
4 Wang Huarong,Li Bin,Wang Zhifeng,et al..Surface measurement of parabolic trough unit mirror based on fringe reflection[J].Acta Optica Sinica,2013,33(1):0112007.王华荣,李彬,王志峰,等.基于条纹反射术的槽式抛物面单元镜面形测量[J].光学学报,2013,33(1):0112007.
5 Li W,Huke P,Burke J,et al..Measuring deformations with deflectometry[C].SPIE,2014,9203:92030F.
6 Bothe T,Li W,von Kopylow C,et al..High-resolution 3D shape measurement on specular surfaces by fringe reflection[C].SPIE,2004,5457:411-422.
7 Su P,Khreishi M A H,Su T,et al..Aspheric and freeform surfaces metrology with software configurable optical test system:a computerized reverse Hartmann test[J].Opt Eng,2014,53(3):031305.
8 Huang R,Su P,Horne T,et al..Optical metrology of a large deformable aspherical mirror using software configurable optical test system[J].Opt Eng,2014,53(8):085106.
9 Su P,Parks R E,Wang L,et al..Software configurable optical test system:a computerized reverse Hartmann test[J].Appl Opt,2010,49(23):4404-4412.
10 Zhang Yubei,Tang Jia,Yang Danggang.Detection of defects on a shining-metal surface using reflective fringe pattern[J].Measuring Technology,2013,33(s):100-102.张于北,唐佳,杨党纲.对某金属件反光表面缺陷的反射条纹检测[J].计测技术,2013,33(s):100-102.
11 Liu Yuankun,Su Xianyu,Wu Qingyang.Three-dimensional shape measurement for specular surface based on fringe reflection[J].Acta Optica Sinica,2006,26(11):1636-1640.刘元坤,苏显渝,吴庆阳.基于条纹反射的类镜面三维面形测量方法[J].光学学报,2006,26(11):1636-1640.
12 Tang Y,Su X,Wu F,et al..A novel phase measuring deflectometry for aspheric mirror test[J].Opt Express,2009,17(22):19778-19784.
13 Knauer M C,Kaminski J,Hausler G.Phase measuring deflectometry:a new approach to measure specular free-form surfaces[C].SPIE,2004,5457:366-376.
14 Tang Yan,Su Xianyu,Liu Yuankun,et al..Three-dimensional shape measurement of aspheric mirror based on fringe reflection[J].Acta Optica Sinica,2009,29(4):965-969.唐燕,苏显渝,刘元坤,等.基于条纹反射的非球面镜三维面形测量[J].光学学报,2009,29(4):965-969.
15 E Hu,Y He,Y Chen.Study on a novel phase-recovering algorithm for partial intensity saturation in digital projection grating phase-shifting profilometry[J].Optik,2010,121(1):23-28.
16 Parks RE,Kuhn WP.Optical alignment using the point source microscope[C].SPIE,2005,5877:58770B.
17 Southwell W H.Wave-front estimation from wave-front slope measurements[J].J Opt Soc Am A,1980,70(8):998-1006.
18 Burge J H,Su P,Zhao C,et al..Use of a commercial laser tracker for optical alignment[C].SPIE,2007,6676:66760E.
19 Albanese M,Wirth A,Jankevics A.Verification of the James Webb Space Telescope coarse phase sensor using the Keck Telescope[C].SPIE,2006,6265:62650Z.
2 Tian Zixia,Chen Wenjing,Su Xianyu.Method for improving accuracy and measurement speed of PMP using error diffusion binary encoded sinusoidal grating[J].Laser&Optoelectronics Progress,2014,51(12):121201.田紫霞,陈文静,苏显渝.采用二元编码的正弦光栅提高PMP测量速度和精度的方法[J].激光与光电子学进展,2014,51(12):121201.
3 Zhao Wenchuan,Zhong Xianyun,Liu Bin.The surface flaws inspection of optical components based on the fringe reflection[J].Acta Photonica Sinica,2014,43(9):0912007.赵文川,钟显云,刘彬.基于条纹反射的光学表面疵病检测法[J].光子学报,2014,43(9):0912007.
4 Wang Huarong,Li Bin,Wang Zhifeng,et al..Surface measurement of parabolic trough unit mirror based on fringe reflection[J].Acta Optica Sinica,2013,33(1):0112007.王华荣,李彬,王志峰,等.基于条纹反射术的槽式抛物面单元镜面形测量[J].光学学报,2013,33(1):0112007.
5 Li W,Huke P,Burke J,et al..Measuring deformations with deflectometry[C].SPIE,2014,9203:92030F.
6 Bothe T,Li W,von Kopylow C,et al..High-resolution 3D shape measurement on specular surfaces by fringe reflection[C].SPIE,2004,5457:411-422.
7 Su P,Khreishi M A H,Su T,et al..Aspheric and freeform surfaces metrology with software configurable optical test system:a computerized reverse Hartmann test[J].Opt Eng,2014,53(3):031305.
8 Huang R,Su P,Horne T,et al..Optical metrology of a large deformable aspherical mirror using software configurable optical test system[J].Opt Eng,2014,53(8):085106.
9 Su P,Parks R E,Wang L,et al..Software configurable optical test system:a computerized reverse Hartmann test[J].Appl Opt,2010,49(23):4404-4412.
10 Zhang Yubei,Tang Jia,Yang Danggang.Detection of defects on a shining-metal surface using reflective fringe pattern[J].Measuring Technology,2013,33(s):100-102.张于北,唐佳,杨党纲.对某金属件反光表面缺陷的反射条纹检测[J].计测技术,2013,33(s):100-102.
11 Liu Yuankun,Su Xianyu,Wu Qingyang.Three-dimensional shape measurement for specular surface based on fringe reflection[J].Acta Optica Sinica,2006,26(11):1636-1640.刘元坤,苏显渝,吴庆阳.基于条纹反射的类镜面三维面形测量方法[J].光学学报,2006,26(11):1636-1640.
12 Tang Y,Su X,Wu F,et al..A novel phase measuring deflectometry for aspheric mirror test[J].Opt Express,2009,17(22):19778-19784.
13 Knauer M C,Kaminski J,Hausler G.Phase measuring deflectometry:a new approach to measure specular free-form surfaces[C].SPIE,2004,5457:366-376.
14 Tang Yan,Su Xianyu,Liu Yuankun,et al..Three-dimensional shape measurement of aspheric mirror based on fringe reflection[J].Acta Optica Sinica,2009,29(4):965-969.唐燕,苏显渝,刘元坤,等.基于条纹反射的非球面镜三维面形测量[J].光学学报,2009,29(4):965-969.
15 E Hu,Y He,Y Chen.Study on a novel phase-recovering algorithm for partial intensity saturation in digital projection grating phase-shifting profilometry[J].Optik,2010,121(1):23-28.
16 Parks RE,Kuhn WP.Optical alignment using the point source microscope[C].SPIE,2005,5877:58770B.
17 Southwell W H.Wave-front estimation from wave-front slope measurements[J].J Opt Soc Am A,1980,70(8):998-1006.
18 Burge J H,Su P,Zhao C,et al..Use of a commercial laser tracker for optical alignment[C].SPIE,2007,6676:66760E.
19 Albanese M,Wirth A,Jankevics A.Verification of the James Webb Space Telescope coarse phase sensor using the Keck Telescope[C].SPIE,2006,6265:62650Z.