基于强度传输方程的激光损伤应力检测技术研究
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摘要
提出了基于强度传输方程(TIE)的光学元件激光损伤应力检测方法,通过采集损伤点区域聚焦位置附近的三幅强度图像,直接计算出损伤点产生的应力双折射相位分布,并在此基础上实现了激光损伤应力的定量检测。相较于其他相位测量技术,TIE方法在恢复的相位结果中不会出现幅度为π的相位跃变,而且可以采用非相干光照明,具有光路结构简单、操作方便和测量速度快等优势,适用于光学元件损伤的快速检测。对石英玻璃在二氧化碳激光器作用下所产生的系列损伤点进行了实际验证测量,测量结果完全符合理论预期。
A transport of intensity equation(TIE)based technique is proposed to measure the stress generated by the laser induced damage on the optical elements.By recording three intensity images around the focal plane in damage point area,we directly calculate the stress birefringence phase distribution generated by the damage point,and realize the quantitative detection of stress generated by laser induced damage.Compared to other phase measurement techniques,the proposed TIE based technique doesn′t suffer the disadvantage of the amplitude ofπsudden change in the retrieval phase,and can be realized with incoherent light beam illumination.It has the advantages of simple optical path structure,easy operation and rapid measurement,thus it′s an ideal technique for the fast measurement of residual stress generated by laser induced damage on the optical elements.We detect a series of damage points produced by quartz glass under the action of CO2 laser,and the results are completely consistent with theoretical expectations.
A transport of intensity equation(TIE)based technique is proposed to measure the stress generated by the laser induced damage on the optical elements.By recording three intensity images around the focal plane in damage point area,we directly calculate the stress birefringence phase distribution generated by the damage point,and realize the quantitative detection of stress generated by laser induced damage.Compared to other phase measurement techniques,the proposed TIE based technique doesn′t suffer the disadvantage of the amplitude ofπsudden change in the retrieval phase,and can be realized with incoherent light beam illumination.It has the advantages of simple optical path structure,easy operation and rapid measurement,thus it′s an ideal technique for the fast measurement of residual stress generated by laser induced damage on the optical elements.We detect a series of damage points produced by quartz glass under the action of CO2 laser,and the results are completely consistent with theoretical expectations.
引文
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[16]Zuo C,Chen Q,Huang L,et al.Phase discrepancy analysis and compensation for fast Fourier transform based solution of the transport of intensity equation[J].Optics Express,2014,22(14):17172-17186.
[17]Zhang X J,Cheng B,Liu C,et al.Quantitative birefringence distribution measurement using mixedstate ptychography[J].Optics Express,2017,25(25):30851-30861.
[2]Rubenchik A M,Feit M D.Initiation,growth,and mitigation of UV-laser-induced damage in fused silica[J].Proceedings of SPIE,2002,4679:79-95.
[3]Moses E I.The National Ignition Facility high-energy ultraviolet laser system[J].Optical Materials,2004,26(4):515-521.
[4]Feit M D,Matthews M J,Soules T F.Densification and residual stress induced by CO2 laser-based mitigation of SiO2surfaces[J].Proceedings of SPIE,2010,7842:78420O.
[5]Patterson E A,Wang Z F.Towards full field automated photoelastic analysis of complex components[J].Strain,1991,27(2):49-53.
[6]Kebbel V,Hartmann H J,Jueptner W P O.Characterization of micro-optics using digital holography[J].Proceedings of SPIE,2006,4101:459-469.
[7]Doualle T,OlléA,Cormont P,et al.Laser-induced birefringence measurements by quantitative polarizedphase microscopy[J].Optics Letters,2017,42(8):1616-1619.
[8]Zuo C,Chen Q,Sun J S,et al.Non-interferometric phase retrieval and quantitative phase microscopy based on transport of intensity equation:a review[J].Chinese Journal of Lasers,2016,43(6):0609002.左超,陈钱,孙佳嵩,等.基于光强传输方程的非干涉相位恢复与定量相位显微成像:文献综述与最新进展[J].中国激光,2016,43(6):0609002.
[9]Cheng H.Study on deterministic phase retrieval based on the intensity measurement[D].Hefei:Anhui University,2012.程鸿.基于强度测量的确定性相位检索[D].合肥:安徽大学,2012.
[10]Roddier F.Curvature sensing and compensation:a new concept in adaptive optics[J].Applied Optics,1988,27(7):1223-1225.
[11]Nugent K A,Gureyev T E,Cookson D J,et al.Quantitative phase imaging using hard X rays[J].Physical Review Letters,1996,77(14):2961-2964.
[12]McMahon P J,Allman B E,Jacobson D L,et al.Quantitative phase radiography with polychromatic neutrons[J].Physical Review Letters,2003,91(14):145502.
[13]Theocaris P S,Gdoutos E E.Matrix theory of photoelasticity[M].Yang J H,transl.Beijing:Science Press,1987.西奥卡里斯P S,格道托斯E E.光测弹性学矩阵理论[M].杨霁辉,译.北京:科学出版社,1987.
[14]Zhao Q C.Photodynamic mechanics[M].Shanghai:Shanghai Scientific&Technical Publishers,1982.赵清澄.光测力学[M].上海:上海科学技术出版社,1982.
[15]Allen L J,Oxley M P.Phase retrieval from series of images obtained by defocus variation[J].Optics Communications,2001,199(1/2/3/4):65-75.
[16]Zuo C,Chen Q,Huang L,et al.Phase discrepancy analysis and compensation for fast Fourier transform based solution of the transport of intensity equation[J].Optics Express,2014,22(14):17172-17186.
[17]Zhang X J,Cheng B,Liu C,et al.Quantitative birefringence distribution measurement using mixedstate ptychography[J].Optics Express,2017,25(25):30851-30861.