摘要
介绍了贯穿式旋片真空泵的结构及工作原理,建立了贯穿式旋片真空泵的几何模型,讨论了贯穿式旋片真空泵泵腔型线的建立以及工作腔的容积计算,精选了贯穿式旋片真空泵的性能计算,包括抽速、极限真空度以及真空度与时间的关系。最后测试某一贯穿式旋片真空泵的抽气性能,将测试值与计算值进行对比分析,验证了建立的贯穿式旋片真空泵性能的计算方法。关于贯穿式旋片真空泵的几何分析以及抽气性能的计算,对贯穿式旋片真空泵的设计分析具有一定的参考意义。
The working principle of a single vane vacuum pump is fully described. The geometry analysis of vane vacuum pump is fully studied,including cylinder profile and intake volume. Meanwhile,the calculation methods for pumping speed,maximum vacuum and the relationship between time and vacuum are established. The characteristics of a single vane vacuum pump are test with a benchmark test rig,and the experimental data are compared with the calculated results. The comparison validates the calculation methods for pumping performance of a single vane vacuum pump presented. The calculation methods for a single vane vacuum pump are useful for designing the single vane vacuum pump.
引文
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