扫频调幅式真空镀膜电源设计与实现
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摘要
准确控制真空镀膜电源的输出功率,确保镀膜厚度一致是镀膜工艺的关键。本文针对现有中频感应加热电源采用移相控制存在的诸多问题,如调整开关频率会引起负载阻抗和相位的强烈变化,造成功率控制不准确、功率因数低、装置繁琐、单体设备无法级联等缺陷。提出了采用扫频调幅控制策略实现,并完成了实际产品的研制。结果表明,采用扫频调幅控制策略实现的真空镀膜电源具有效率高、功率精准控制、加热均匀等优点。
We reported the solution of the control problems of conventional power supply for mid-frequency induction heating in industrial thin film deposition reactor: including the low control accuracy,great current distortion,small power factor,large fluctuations of load resistance and phase,complicated control unit,incapability of cascading individual power supply,and importantly,non-uniform thickness. The solution was the modification of the conventional phase-shift frequency control with the frequency-sweeping amplitude-modulation control. The prototyped power supply with the modified control scheme has been field tested for over 3 years. The results show that the newly-developed power supply outperforms the conventional one because of higher control procession,lower distortion,more uniform heating and film thickness,greater productivity,and importantly,capability of cascading multiple power supplies as required. We suggest the new power supply be of some technological interest in coating industries.
We reported the solution of the control problems of conventional power supply for mid-frequency induction heating in industrial thin film deposition reactor: including the low control accuracy,great current distortion,small power factor,large fluctuations of load resistance and phase,complicated control unit,incapability of cascading individual power supply,and importantly,non-uniform thickness. The solution was the modification of the conventional phase-shift frequency control with the frequency-sweeping amplitude-modulation control. The prototyped power supply with the modified control scheme has been field tested for over 3 years. The results show that the newly-developed power supply outperforms the conventional one because of higher control procession,lower distortion,more uniform heating and film thickness,greater productivity,and importantly,capability of cascading multiple power supplies as required. We suggest the new power supply be of some technological interest in coating industries.
引文
[1]李云奇.真空镀膜技术与设备设计安装及操作维护实用手册[M].北京:化学工业出版社,2006
[2]龚庆祝.真空镀膜感应加热电源研究与设计[D].成都:电子科技大学,2012
[3]李宏,贺昱曜,王崇武.一种全桥负载串联谐振逆变器谐振频率跟踪和输出功率控制方法[J].电工技术学报,2010,25(7):93-99
[4] Kifune H,Yamaguchi Y,Yoshida D,et al. Novel Load Adaptive Frequency Tracking Control Scheme for PSM High Frequency Inverter without PLL Scheme[J]. Annual IEEE Power Electronics Specialists Conference,2004,3:2421-2427
[5] Ogiwara H,Nakaoka M. ZCS High Frequency Inverter Using SIT for Induction Heating Applications[J]. IEEE Proc-Electr Power Appl,2003,150(2):185-192
[6]廖永福,林磊,李傲,等.移相串联谐振高压电容器充电电源谐振参数设计方法及其电流控制策略[J].电工技术学报,2016,31(16):83-92
[7]刘潇.谐振式中频感应加热电源研究与设计[D].长沙:湖南大学,2009
[2]龚庆祝.真空镀膜感应加热电源研究与设计[D].成都:电子科技大学,2012
[3]李宏,贺昱曜,王崇武.一种全桥负载串联谐振逆变器谐振频率跟踪和输出功率控制方法[J].电工技术学报,2010,25(7):93-99
[4] Kifune H,Yamaguchi Y,Yoshida D,et al. Novel Load Adaptive Frequency Tracking Control Scheme for PSM High Frequency Inverter without PLL Scheme[J]. Annual IEEE Power Electronics Specialists Conference,2004,3:2421-2427
[5] Ogiwara H,Nakaoka M. ZCS High Frequency Inverter Using SIT for Induction Heating Applications[J]. IEEE Proc-Electr Power Appl,2003,150(2):185-192
[6]廖永福,林磊,李傲,等.移相串联谐振高压电容器充电电源谐振参数设计方法及其电流控制策略[J].电工技术学报,2016,31(16):83-92
[7]刘潇.谐振式中频感应加热电源研究与设计[D].长沙:湖南大学,2009