基于电化学腐蚀法的钨探针制备装置研究
|
摘要
基于电化学腐蚀法制备钨探针的原理,设计了一套钨探针制备装置,并对钨探针制备参数进行了研究。装置的实验部分用于调整探针与电解槽的相对位置和运动参数,控制部分用于监测、控制并记录电化学反应的状态。与传统腐蚀探针相比,该装置通过控制电路控制探针腐蚀过程中运动参数,获得了形状可控的大长径比探针;同时通过精确控制腐蚀反应时间,可制备针尖曲率半径范围为5~20 nm的探针。
A tungsten probe fabrication device is proposed based on electrochemical etching method and the parameter of fabricating tungsten probe is researched. The experimental part can be used to adjust the relative position and motion parameters of the probe and the electrolyzer. The control part can be used to control and record the state of electrochemical etching. Compared with traditional fabrication device,the present device ensured to fabricate large length-to-width ratio tip by controlling the motion of tungsten probe,meanwhile,the radius of tips can be precisely controlled within 5 ~ 20 nm by controlling the etching time.
A tungsten probe fabrication device is proposed based on electrochemical etching method and the parameter of fabricating tungsten probe is researched. The experimental part can be used to adjust the relative position and motion parameters of the probe and the electrolyzer. The control part can be used to control and record the state of electrochemical etching. Compared with traditional fabrication device,the present device ensured to fabricate large length-to-width ratio tip by controlling the motion of tungsten probe,meanwhile,the radius of tips can be precisely controlled within 5 ~ 20 nm by controlling the etching time.
引文
[1]Melmed A J.The Art and Science and Other Aspects of Making Sharp Tips[J].Journal of Vacuum Science&Technology A,1991,9(2):601-608.
[2]伏明明.大范围、高深宽比扫描隧道显微镜技术研究[D].杭州:浙江大学,2010.
[3]汪雅丽,熊艳艳,高思田,等.用于音叉式原子力显微镜的探针制备[J].计量学报,2017,38(1):43-46.
[4]Ge Y,Zhang W,Chen Y L,et al.A reproducible electropolishing technique to customize tungsten SPM probe:From mathematical modeling to realization[J].Journal of Materials Processing Tech,2013,213(1):11-19.
[5]Yu Z Q,Wang C M,Du Y,et al.Reproducible tip fabrication and cleaning for UHV STM[J].Ultramicroscopy,2008,108(9):873-877.
[6]潘金福,黄旭,王云,等.STM探针电化学腐蚀装置的设计及实验研究[J].现代机械,2008,(5):14-16.
[7]孙宏君,裘进浩,季宏丽,等.基于电化学腐蚀法的钨探针制备研究[J].应用化工,2015,44(4):761-763.
[8]姚琲,李春艳,刘平,等.STM钨针尖电化学加工及其装置的改进[J].电子显微学报,2003,22(3):256-258.
[9]吴雪梅,杨礼富,甘俊彦,等.扫描隧道显微镜针尖的电化学腐蚀制备方法[J].苏州大学学报(自然科学),1997,13(3):47-50.
[10]高思田.计量型原子力显微镜的研究[D].天津:天津大学,2007.
[11]张华坤,高思田,李伟.原子力显微镜的双探针接触测量研究[J].计量学报,2016,37(1):1-5.
[12]刘雷华,郭彤,李伟,等.基于石英音叉探针的原子力显微镜测头开发[J].计量学报,2016,37(3):225-229.
[13]Ju B F,Chen Y L,Ge Y.The art of electrochemical etching for preparing tungsten probes with controllable tip profile and characteristic parameters[J].Review of Scientific Instruments,2011,82(1):2359.
[14]Rajurkar K P,Levy G,Malshe A,et al.Micro and nano machining by electro-physical and chemical processes[J].Annuals of the CIRP,2006,55(2):643-666.
[2]伏明明.大范围、高深宽比扫描隧道显微镜技术研究[D].杭州:浙江大学,2010.
[3]汪雅丽,熊艳艳,高思田,等.用于音叉式原子力显微镜的探针制备[J].计量学报,2017,38(1):43-46.
[4]Ge Y,Zhang W,Chen Y L,et al.A reproducible electropolishing technique to customize tungsten SPM probe:From mathematical modeling to realization[J].Journal of Materials Processing Tech,2013,213(1):11-19.
[5]Yu Z Q,Wang C M,Du Y,et al.Reproducible tip fabrication and cleaning for UHV STM[J].Ultramicroscopy,2008,108(9):873-877.
[6]潘金福,黄旭,王云,等.STM探针电化学腐蚀装置的设计及实验研究[J].现代机械,2008,(5):14-16.
[7]孙宏君,裘进浩,季宏丽,等.基于电化学腐蚀法的钨探针制备研究[J].应用化工,2015,44(4):761-763.
[8]姚琲,李春艳,刘平,等.STM钨针尖电化学加工及其装置的改进[J].电子显微学报,2003,22(3):256-258.
[9]吴雪梅,杨礼富,甘俊彦,等.扫描隧道显微镜针尖的电化学腐蚀制备方法[J].苏州大学学报(自然科学),1997,13(3):47-50.
[10]高思田.计量型原子力显微镜的研究[D].天津:天津大学,2007.
[11]张华坤,高思田,李伟.原子力显微镜的双探针接触测量研究[J].计量学报,2016,37(1):1-5.
[12]刘雷华,郭彤,李伟,等.基于石英音叉探针的原子力显微镜测头开发[J].计量学报,2016,37(3):225-229.
[13]Ju B F,Chen Y L,Ge Y.The art of electrochemical etching for preparing tungsten probes with controllable tip profile and characteristic parameters[J].Review of Scientific Instruments,2011,82(1):2359.
[14]Rajurkar K P,Levy G,Malshe A,et al.Micro and nano machining by electro-physical and chemical processes[J].Annuals of the CIRP,2006,55(2):643-666.