AFM扫描过程的模拟及针尖形状反求
|
摘要
纳米栅格和台阶等结构的线宽准确测量,是国内外计量领域的研究热点与难点。采用原子力显微镜(AFM)能获得上述结构的三维形貌信息,但其扫描图像却是探针针尖的形貌和被测样品表面的形貌共同作用的结果,这种作用往往导致线宽边缘测量失真。为了更加精确地获得样品的表面形貌特征,首先需要重建探针针尖形貌,进而从得到的扫描图像中尽可能地消除由探针形貌带来的失真影响。基于数学形态学的盲重建理论,利用Matlab对不同形状参数的探针针尖扫描台阶样品表面进行了仿真,评价了探针形状对扫描结果的影响,初步实现了基于真实粗糙测量表面的探针针尖形状重建。
To accurate measure the line widths of nano-grid and step structure is the hottest issues in metrology domain. AFM can be used to obtain the three-dimensional topographic information of the above structure,but the scanned image is the result of the interaction between the shape of the tip and the surface morphology of the sample. This interaction often leads to line width edge measurement distortion. To more accurately obtain the surface topography of the sample,firstly,the shape of the tip needs to be reconstructed,and then the distortion effect brought by the tip topography is eliminated as much as possible from the scanned image. Based on the blind reconstruction theory of mathematical morphology,Matlab was used to simulate the stepped sample surface scanned by different shape parameters of tips,the influences of the probe tip shape on the scanning results were evaluated,and got the initial realization of probe tip shape reconstruction based on measuring rough surface.
To accurate measure the line widths of nano-grid and step structure is the hottest issues in metrology domain. AFM can be used to obtain the three-dimensional topographic information of the above structure,but the scanned image is the result of the interaction between the shape of the tip and the surface morphology of the sample. This interaction often leads to line width edge measurement distortion. To more accurately obtain the surface topography of the sample,firstly,the shape of the tip needs to be reconstructed,and then the distortion effect brought by the tip topography is eliminated as much as possible from the scanned image. Based on the blind reconstruction theory of mathematical morphology,Matlab was used to simulate the stepped sample surface scanned by different shape parameters of tips,the influences of the probe tip shape on the scanning results were evaluated,and got the initial realization of probe tip shape reconstruction based on measuring rough surface.
引文
[1]张中太,林元华,唐子龙,等.纳米材料及其技术的应用前景[J].材料工程,2000,(3):42-48.Zhang Z T,Lin Y H,Tang Z L,et al. Nanometer Materials&Nanotechnology and Their Application Prospect[J]. Journal of Materials Engineering,2000,(3):42-48.
[2]郭鑫,施玉书,皮磊,等. Mirau干涉型微纳台阶高度测量系统的研究[J].计量学报,2017,38(2):141-144.Guo X,Shi Y S,Pi L,et al. Research on Micro/nano Step Height Measurement System of Mirau Interference[J]. Acta Metrologica Sinica,2017,38(2):141-144.
[3] Bieni M,赵克功.计量型原子力显微镜[J].计量学报,1998,19(1):2-9.Bieni M, Zhao K G. A Metrological Atomic Force Microscope[J]. Acta Metrologica Sinica,1998,19(1):2-9.
[4]张冬仙,章海军,李博,等.新型原子力显微镜的研制及其应用[J].光子学报,2002,31(1):50-54.Zhang D X,Zhang H J,Li B,et al. A New Type of Atomic Force Microscope and Its Application[J]. Acta Photonica Sinica,2002,31(1):50-54.
[5]林启敬,吴昊,张福政,等. Cu/Ti纳米薄膜表面形貌的分形表征研究[J].计量学报,2018,39(5):593-597.Lin Q J,Wu H,Zhang F Z,et al. Research on Fractal Characterization of the Surface Morphology of Cu/Ti Nano Thin Film[J]. Acta Metrologica Sinica,2018,39(5):593-597.
[6]汪雅丽,熊艳艳,高思田,等.用于音叉式原子力显微镜的探针制备[J].计量学报,2017,38(1):43-46.Wang Y L,Xiong Y Y,Gao S T,et al. Preparation of Probe Tips Applied to Tuning Fork Atomic Force Microscopy[J]. Acta Metrologica Sinica,2017,38(1):43-46.
[7]袁帅,董再励,缪磊,等.基于数学形态学方法的AFM探针建模研究[J].仪器仪表学报,2010,31(5):1102-1107.Yuan S,Dong Z L,Miao L,et al. AFM Tip Estimation Based on Mathematical Morphology[J]. Chinese Journal of Scientific Instrument,2010,31(5):1102-1107.
[8]刘斌,冯其波,匡萃方.表面粗糙度测量方法综述[J].光学仪器,2004,26(5):54-58.Liu B,Feng Q B,Kuang C F. Survey of measurement methods for surface roughness[J]. Optical Instruments,2004,26(5):54-58.
[9]张瑞军,高思田,李伟,等.计量型扫描电子显微镜测控系统研究[J].计量学报,2016,37(5):457-461.Zhang R J, Gao S T, Li W, et al. Study on the Measuring and Control System of Metrological Scanning Electron Microscope[J]. Acta Metrologica Sinica,2016,37(5):457-461.
[10]刘雷华,郭彤,李伟,等.基于石英音叉探针的原子力显微镜测头开发[J].计量学报,2016,37(3):225-229.Liu L H,Guo T,Li W,et al. Development of Atomic Force Microscopy Measuring Head Based on Quartz Tuning Fork Probe[J],Acta Metrologica Sinica,2016,37(3):225-229.
[11] Keller D. Reconstruction of STM and AFM images distorted by finite-size tips[J]. Surface Science,1991,253(1-3):353-364.
[12] Villarrubia J S. Algorithms for Scanned Probe Microscope Image Simulation,Surface Reconstruction,and Tip Estimation:[J]. Journal of Research of the National Institute of Standards&Technology,1997,102(4):425-454.
[2]郭鑫,施玉书,皮磊,等. Mirau干涉型微纳台阶高度测量系统的研究[J].计量学报,2017,38(2):141-144.Guo X,Shi Y S,Pi L,et al. Research on Micro/nano Step Height Measurement System of Mirau Interference[J]. Acta Metrologica Sinica,2017,38(2):141-144.
[3] Bieni M,赵克功.计量型原子力显微镜[J].计量学报,1998,19(1):2-9.Bieni M, Zhao K G. A Metrological Atomic Force Microscope[J]. Acta Metrologica Sinica,1998,19(1):2-9.
[4]张冬仙,章海军,李博,等.新型原子力显微镜的研制及其应用[J].光子学报,2002,31(1):50-54.Zhang D X,Zhang H J,Li B,et al. A New Type of Atomic Force Microscope and Its Application[J]. Acta Photonica Sinica,2002,31(1):50-54.
[5]林启敬,吴昊,张福政,等. Cu/Ti纳米薄膜表面形貌的分形表征研究[J].计量学报,2018,39(5):593-597.Lin Q J,Wu H,Zhang F Z,et al. Research on Fractal Characterization of the Surface Morphology of Cu/Ti Nano Thin Film[J]. Acta Metrologica Sinica,2018,39(5):593-597.
[6]汪雅丽,熊艳艳,高思田,等.用于音叉式原子力显微镜的探针制备[J].计量学报,2017,38(1):43-46.Wang Y L,Xiong Y Y,Gao S T,et al. Preparation of Probe Tips Applied to Tuning Fork Atomic Force Microscopy[J]. Acta Metrologica Sinica,2017,38(1):43-46.
[7]袁帅,董再励,缪磊,等.基于数学形态学方法的AFM探针建模研究[J].仪器仪表学报,2010,31(5):1102-1107.Yuan S,Dong Z L,Miao L,et al. AFM Tip Estimation Based on Mathematical Morphology[J]. Chinese Journal of Scientific Instrument,2010,31(5):1102-1107.
[8]刘斌,冯其波,匡萃方.表面粗糙度测量方法综述[J].光学仪器,2004,26(5):54-58.Liu B,Feng Q B,Kuang C F. Survey of measurement methods for surface roughness[J]. Optical Instruments,2004,26(5):54-58.
[9]张瑞军,高思田,李伟,等.计量型扫描电子显微镜测控系统研究[J].计量学报,2016,37(5):457-461.Zhang R J, Gao S T, Li W, et al. Study on the Measuring and Control System of Metrological Scanning Electron Microscope[J]. Acta Metrologica Sinica,2016,37(5):457-461.
[10]刘雷华,郭彤,李伟,等.基于石英音叉探针的原子力显微镜测头开发[J].计量学报,2016,37(3):225-229.Liu L H,Guo T,Li W,et al. Development of Atomic Force Microscopy Measuring Head Based on Quartz Tuning Fork Probe[J],Acta Metrologica Sinica,2016,37(3):225-229.
[11] Keller D. Reconstruction of STM and AFM images distorted by finite-size tips[J]. Surface Science,1991,253(1-3):353-364.
[12] Villarrubia J S. Algorithms for Scanned Probe Microscope Image Simulation,Surface Reconstruction,and Tip Estimation:[J]. Journal of Research of the National Institute of Standards&Technology,1997,102(4):425-454.