提高石英音叉钨丝探针制作成材率
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摘要
针对探针的腐蚀及粘接制约原子力显微镜实验开展的问题,提出一种制作原子力显微镜石英音叉钨丝探针的方法。通过对原有腐蚀装置的改进,提高了钨丝针尖的成材率;钨丝探针粘接装置的开发极大地避免了人为因素的干扰,提高了针尖粘接的效率。最后通过实验来验证腐蚀方法及粘接装置的可行性。
In view of the problems of corrosion and bonding of tungsten that have been restricting conducting AFM experiments,a method for the manufacture of AFM probe which is made of tungsten and quartz tuning fork is proposed.Improving the original etching device can enhance rates of finished tungsten corrosion and a new bonding device has been used to increase efficiency of the bonding,which greatly avoids the interference of human factors.Finally,some experiments to test the performance of the probe are conducted.
In view of the problems of corrosion and bonding of tungsten that have been restricting conducting AFM experiments,a method for the manufacture of AFM probe which is made of tungsten and quartz tuning fork is proposed.Improving the original etching device can enhance rates of finished tungsten corrosion and a new bonding device has been used to increase efficiency of the bonding,which greatly avoids the interference of human factors.Finally,some experiments to test the performance of the probe are conducted.
引文
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[5]Sandoz P,Friedt J M,Carry E.Vibration amplitude of a tip-loaded quartz tuning fork during shear force microscopy scanning[J].Review of Scientific Instruments.2008,79(8):086102-086102-3.
[6]Ooe H,Sakuishi T,Nogami M,et al.Resonance frequency-retuned quartztuning fork as a force sensor for noncontact atomic force microscopy[J].Applied Physics Letters,2014,105(4):043107-043107-4.
[7]An S,Lee K,Kim B,et al.Nanopipette combined with quartz tuning fork-atomic force microscope for force spectroscopy/microscopy and liquid delivery-based nanofabrication[J].Review of Scientific Instruments,2014,85(3):033702-033702-7.
[8]Melmed A J.The art and science and other aspects of making sharp tips[J].Journal of Vacuum Science&Technology B,1991,9(2):601-608.
[9]李英姿,李进,钱建强,等.电化学腐蚀制备原子力显微镜探针[J].实验技术与管理,2014,31(3):31-35.
[10]Jobbins M M,Raigoza A F,Kandel S A.Note:Circuit design for direct current and alternating current electrochemical etching of scanning probe microscopy tips[J].Review of Scientific Instruments,2012,83(3):036105-036105-3.
[11]Müller A-D,Müller F,Hietschold M,et al.Characterization of electrochemically etched tungsten tips for scanning tunneling microscopy[J].Review of scientific instruments,1999,70(10):3970-3972.
[12]Gadelrab K R,Santos S,Chiesa M.Heterogeneous Dissipation and Size Dependencies of Dissipative Processes in Nanoscale Interactions[J].Langmuir,2013,29(7):2200-2206.
[13]Giessibl FJ.Atomic resolution on Si(111)-(7x7)by noncontact atomic force microscopy with a force sensor based on a quartz tuning fork[J].Applied Physics Letters,2000,76(11):1470-1472.
[14]Castellanos-Gomez A,Agrait N,Rubio-Bollinger G.Force-gradient-induced mechanical dissipation of quartz tuning fork force sensors used in atomic force microscopy[J].Ultramicroscopy,2011,111(3):186-190.
[15]Castellanos-Gomez A,Agrait N,Rubio-Bollinger G.Dynamics of quartz tuning fork force sensors used in scanning probe microscopy[J].Nanotechnology,2009,20(21):9431.
[2]田文超,贾建援.扫描探针显微镜系列及其应用综述[J].西安电子科技大学学报,2003,30(1):108-112.
[3]Drechsler M.Erwin Müller and the early development of field emission microscopy[J].Surface Science,1978,70(1):1-18.
[4]Kulawik M,Nowicki M,Thielsch G,et al.A double lamellae dropoff etching procedure for tungsten tips attached to tuning fork atomic force microscopy/scanning tunneling microscopy sensors[J].Review of scientific instruments,2003,74(2):1027-1030.
[5]Sandoz P,Friedt J M,Carry E.Vibration amplitude of a tip-loaded quartz tuning fork during shear force microscopy scanning[J].Review of Scientific Instruments.2008,79(8):086102-086102-3.
[6]Ooe H,Sakuishi T,Nogami M,et al.Resonance frequency-retuned quartztuning fork as a force sensor for noncontact atomic force microscopy[J].Applied Physics Letters,2014,105(4):043107-043107-4.
[7]An S,Lee K,Kim B,et al.Nanopipette combined with quartz tuning fork-atomic force microscope for force spectroscopy/microscopy and liquid delivery-based nanofabrication[J].Review of Scientific Instruments,2014,85(3):033702-033702-7.
[8]Melmed A J.The art and science and other aspects of making sharp tips[J].Journal of Vacuum Science&Technology B,1991,9(2):601-608.
[9]李英姿,李进,钱建强,等.电化学腐蚀制备原子力显微镜探针[J].实验技术与管理,2014,31(3):31-35.
[10]Jobbins M M,Raigoza A F,Kandel S A.Note:Circuit design for direct current and alternating current electrochemical etching of scanning probe microscopy tips[J].Review of Scientific Instruments,2012,83(3):036105-036105-3.
[11]Müller A-D,Müller F,Hietschold M,et al.Characterization of electrochemically etched tungsten tips for scanning tunneling microscopy[J].Review of scientific instruments,1999,70(10):3970-3972.
[12]Gadelrab K R,Santos S,Chiesa M.Heterogeneous Dissipation and Size Dependencies of Dissipative Processes in Nanoscale Interactions[J].Langmuir,2013,29(7):2200-2206.
[13]Giessibl FJ.Atomic resolution on Si(111)-(7x7)by noncontact atomic force microscopy with a force sensor based on a quartz tuning fork[J].Applied Physics Letters,2000,76(11):1470-1472.
[14]Castellanos-Gomez A,Agrait N,Rubio-Bollinger G.Force-gradient-induced mechanical dissipation of quartz tuning fork force sensors used in atomic force microscopy[J].Ultramicroscopy,2011,111(3):186-190.
[15]Castellanos-Gomez A,Agrait N,Rubio-Bollinger G.Dynamics of quartz tuning fork force sensors used in scanning probe microscopy[J].Nanotechnology,2009,20(21):9431.