微尺度质谱仪离子源结构设计及离子光学系统仿真
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摘要
文章针对多领域对便携式质谱仪的需求,对微尺度质谱仪的核心部件离子源进行结构设计,并利用离子光学模拟软件SIMION进行仿真,探究电极电压、透镜结构、电极结构等对离子传输的影响并进行优化,获取相关参数研究规律,为微尺度质谱仪的研制提供设计依据。
In view of the demand of the portable mass spectrometer in many fields, the structure of the ion source, as the core functional component of the microscale mass spectrometers, is designed, and its ion optical system is simulated by the software SIMION. The effect of the electrode voltage, the lens structure, and the electrode structure on the ion width and the divergence angle are investigated and optimized. The related parameters obtained may provide a basis for the development of microscale mass spectrometers.
In view of the demand of the portable mass spectrometer in many fields, the structure of the ion source, as the core functional component of the microscale mass spectrometers, is designed, and its ion optical system is simulated by the software SIMION. The effect of the electrode voltage, the lens structure, and the electrode structure on the ion width and the divergence angle are investigated and optimized. The related parameters obtained may provide a basis for the development of microscale mass spectrometers.
引文
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[11]VIGNE S,ALAVA T,TASSETTI C M,et al.Optimization of an electron impact ion source on a MEMStime-of-flight mass spectrometer[J].Sensors&Actuators(B):Chemical,2017,243:690-695
[12]SILLON N,BAPTIST R.Micromachined mass spectrometer[J].Sensors&Actuators(B):Chemical,2002,83(1/2/3):129-137
[13]郭美如,张伟文,李得天,等.空间小型磁偏转质谱计的研制[J].真空科学与技术学报,2015,35(4):381-385GUO M R,ZHANG W W,LI D T,et al.Development of miniaturized magnetic sector mass spectrometer for space exploration[J].Chinese Journal of Vacuum Science and Technology,2015,35(4):381-385
[14]WANG J,ZHANG X,MAO F,et al.Study of a micro chamber quadrupole mass spectrometer[J].Journal of Vacuum Science&Technology(A):Vacuum Surfaces&Films,2008,26(2):239-243
[15]HE M,XUE Z,ZHANG Y,et al.Development and characterizations of a miniature capillary electrophoresis mass spectrometry system[J].Analytical Chemistry,2015,87(4):2236-2241
[16]GAHL D A.SIMION 3D[G].Version 6.0,1995
[17]季欧.质谱分析法[M].北京:原子能出版社,1978
[18]朱一心,曹麟刚.用于聚焦微离子束装置的静电透镜系统的设计分析[J].微细加工技术,1986(3):35-39ZHU Y X,CAO L G.Design analysis of electrostatic lens system for focusing micro ion beam devices[J].Microfabrication Technology,1986(3):35-39
[2]SYMS R R A,WRIGHT S.MEMS mass spectrometers:the next wave of miniaturization[J].Journal of Micromechanics&Microengineering,2015,26(2):023001
[3]LEBEDEV A T.Environmental mass spectrometry[J].Analytical Chemistry,2013,6(18):163-189
[4]PALMER P T,LIMERO T F.Mass spectrometry in the US space program:past,present,and future[J].Journal of the American Society for Mass Spectrometry,2001,12(6):656-675
[5]GIANNOUKOS S,BRKI?B,TAYLOR S,et al.Membrane inlet mass spectrometry for homeland security and forensic applications[J].Journal of the American Society for Mass Spectrometry,2015,26(2):231-239
[6]BLAIN M G,RITER L S,CRUZ D,et al.Towards the hand-held mass spectrometer:design considerations,simulation,and fabrication of micrometer-scaled cylindrical ion traps[J].Int J Mass Spectrum,2004,236:91-104
[7]CHAUDHARY A,AMEROM F H W V,SHORT R T.Development of microfabricated cylindrical ion trap mass spectrometer arrays[J].Journal of Microelectromechanical Systems,2009,18(2):442-448
[8]CHEUNG K,VELASQUEZ-GARCIA L F,AKINWANDEA I.High-performance MEMS square electrode quadrupole mass filters for chip-scale mass spectrometry[C]//IEEEInternational Conference on Micro Electro Mechanical Systems,2010:867-870
[9]HAN K,LEE Y,JUN D,et al.Field emission ion source using a carbon nanotube array for micro time-of-flight mass spectrometer[J].Japanese Journal of Applied Physics,2013,50(6):345-359
[10]TASSETTI C M,DURAFFOURG L,DANEL J S,et al.AMEMS electron impact ion source integrated in a microtime-of-flight mass spectrometer[J].Procedia Engineering,2012,47:538-541
[11]VIGNE S,ALAVA T,TASSETTI C M,et al.Optimization of an electron impact ion source on a MEMStime-of-flight mass spectrometer[J].Sensors&Actuators(B):Chemical,2017,243:690-695
[12]SILLON N,BAPTIST R.Micromachined mass spectrometer[J].Sensors&Actuators(B):Chemical,2002,83(1/2/3):129-137
[13]郭美如,张伟文,李得天,等.空间小型磁偏转质谱计的研制[J].真空科学与技术学报,2015,35(4):381-385GUO M R,ZHANG W W,LI D T,et al.Development of miniaturized magnetic sector mass spectrometer for space exploration[J].Chinese Journal of Vacuum Science and Technology,2015,35(4):381-385
[14]WANG J,ZHANG X,MAO F,et al.Study of a micro chamber quadrupole mass spectrometer[J].Journal of Vacuum Science&Technology(A):Vacuum Surfaces&Films,2008,26(2):239-243
[15]HE M,XUE Z,ZHANG Y,et al.Development and characterizations of a miniature capillary electrophoresis mass spectrometry system[J].Analytical Chemistry,2015,87(4):2236-2241
[16]GAHL D A.SIMION 3D[G].Version 6.0,1995
[17]季欧.质谱分析法[M].北京:原子能出版社,1978
[18]朱一心,曹麟刚.用于聚焦微离子束装置的静电透镜系统的设计分析[J].微细加工技术,1986(3):35-39ZHU Y X,CAO L G.Design analysis of electrostatic lens system for focusing micro ion beam devices[J].Microfabrication Technology,1986(3):35-39