相移Rugate薄膜空间滤波器的设计
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摘要
介绍了相移Rugate薄膜空间滤波器的基本结构和原理,设计了相移Rugate薄膜滤波器,根据实际制备的条件进行了误差分析,给出了制备技术需要达到的精度和所需要的薄膜材料的消光系数,计算了相应的损耗,并分析了空间滤波器内部的电场分布。
The basic structure and principles of phase-shift Rugate thin spatial filter is presented.The phase-shifted Rugate film filter is designed and the error analysis is prepared in accordance with the actual conditions.The corresponding loss and extinction coefficient and the preparation of technical precision are discussed to achieve excellent performance for the preparation of the thin film.The corresponding loss and internal electric field of the phase-shift Rugate film filter is calculated.
The basic structure and principles of phase-shift Rugate thin spatial filter is presented.The phase-shifted Rugate film filter is designed and the error analysis is prepared in accordance with the actual conditions.The corresponding loss and extinction coefficient and the preparation of technical precision are discussed to achieve excellent performance for the preparation of the thin film.The corresponding loss and internal electric field of the phase-shift Rugate film filter is calculated.
引文
1 JT Hunt,J A Glaze,W W Simmons,et al..Suppression of selffocusing through low-pass spatial filtering and relay imaging[J].Appl Opt,1978,17(13):2053-2057.
2 B M V Wonterghem,J R Murray,J H Campbell,et al..Performance of a prototype for a large-aperture multipass Nd:glass laser for inertial confinement fusion[J].Appl Opt,1997,21(20):4932-4953.
3 AK Potemkin,T V Barmashova,A V Kirsanov,et al..Spatial filters for high-peak-power multistage laser amplifiers[J].Appl Opt,2007,46(20):4423-4430.
4 Wang Fang,Zhu Qihua,Jiang Dongbin,et al..The analysis and control of self-excitation oscillation in multi-pass systems[J].Laser Journal,2005,26(3):19-20.王方,朱启华,蒋东镔,等.多程放大系统中自激振荡的分析和抑制[J].激光杂志,2005,26(3):19-20.
5 Zhang Xin,Yuan Qiang,Zhao Junpu,et al..Characteristics of plasma in spatial filter pinhole of high power laser system[J].High Power Laser and Particle Beams,2010,22(12):2921-2924.张鑫,袁强,赵军普,等.高功率激光系统空间滤波小孔等离子体特性[J].强激光与粒子束,2010,22(12):2921-2924.
6 Zhang Xin,Liu Hongjie,Zhao Junpu,et al..Pinhole design of spatial filter in high energy solid-state laser system[J].Laser&Optoelectronics Progress,2010,47(11):111402.张鑫,刘红婕,赵军普,等.高功率固体激光系统空间滤波小孔尺寸设计[J].激光与光电子学进展,2010,47(11):111402.
7 Liu Hongjie,Jing Feng,Li Qiang,et al..The effect of spatial filter pinhole on output beams qualityin high power laser[J].Journal of Yunnan University,2005,27(5A):184-189.刘红婕,景峰,李强,等.高功率固体激光装置空间滤波器小孔对输出光束质量的影响[J].云南大学学报,2005,27(5A):184-189.
8 Yanqi Gao,Baoqiang Zhu,Daizhong Liu,et al..Characteristics of beam alignment in high power four-pass laser amplifier[J].Appl Opt,2009,48(8):1591-1597.
9 Yanqi Gao,Baoqiang Zhu,Daizhong Liu,et al..Influences of the alignment and misalignment spatial filters on the beam quality in high power laser systems[J].J Opt,2010,12(9):095704.
10 Thomas D Rahmlow.Rugate Filter Having Suppressed Harmonics[P].United States Patent:5523882,[1996-6-4].
11 T D Rahmlow,A Turner.Broadband Rugate Filter:United States Patent,5475531[P].1995-12-12.
12 WJ Gunning.Rugate Filter Incorporating Parallel and Series Addition:United States Patent,4952025[P].1990-8-28.
13 NP Murarka,K J Kogler,C S Bartholomew,et al..Rugate Optical Filter Systems[P].United States Patent:4837044,[1989-6-6].
14 AC V Popta,M M Hawkeye,J C Sit,et al..Gradient-index narrow-bandpass filter fabricated with glancing-angle deposition[J].Opt Lett,2004,29(21):2545-2547.
15 KRobbie,G Beydaghyan,T Brown,et al..Ultrahigh vacuum glancing angle deposition system for thin films with controlled three-dimensional nanoscale structure[J].Review of Scientific Instruments,2004,75(4):1089-1097.
16 R Leitel,O Stenzel,S Wilbrandt,et al..Fabrication and characterization of rugatestructures composed of SiO2and Nb2O5[J].Optics and Precision Engineering,2005,13(4):505-511.
17 TK L Wong,L Brzozowski,E H Sargent.Analysis of nonquarter-wave grating by a modified Fourier-transform method[J].Appl Opt,2002,41(32):6763-6767.
18 FA Ríos,F V Villa,J A G Armenta.Dichroic Rugate filters[J].Appl Opt,2006,45(3):495-500.
19 KRobbie,G Beydaghyan,T Brown,et al..Ultrahigh vacuum glancing angle deposition system for thin films with controlled three-dimensional nanoscale structure[J].Review of Scientific Instruments,2004,75(4):1089-1097.
20 Zheng Guangwei.Study on Non-Focusing Low-Pass Spatial Filtering Technology for High-Power Laser Beam[D].Changsha:National University of Defense Technology,2011.144 -147.郑光威.高功率激光非聚焦型空间低通滤波技术研究[D].长沙:国防科技大学,2011.144-147.
21 M G Moharam,T K Gaylord.Chain-matrix analysis of arbitrarythickness dielectric reflection gratings[J].J Opt Soc Am,1982,72(2):187-190.
2 B M V Wonterghem,J R Murray,J H Campbell,et al..Performance of a prototype for a large-aperture multipass Nd:glass laser for inertial confinement fusion[J].Appl Opt,1997,21(20):4932-4953.
3 AK Potemkin,T V Barmashova,A V Kirsanov,et al..Spatial filters for high-peak-power multistage laser amplifiers[J].Appl Opt,2007,46(20):4423-4430.
4 Wang Fang,Zhu Qihua,Jiang Dongbin,et al..The analysis and control of self-excitation oscillation in multi-pass systems[J].Laser Journal,2005,26(3):19-20.王方,朱启华,蒋东镔,等.多程放大系统中自激振荡的分析和抑制[J].激光杂志,2005,26(3):19-20.
5 Zhang Xin,Yuan Qiang,Zhao Junpu,et al..Characteristics of plasma in spatial filter pinhole of high power laser system[J].High Power Laser and Particle Beams,2010,22(12):2921-2924.张鑫,袁强,赵军普,等.高功率激光系统空间滤波小孔等离子体特性[J].强激光与粒子束,2010,22(12):2921-2924.
6 Zhang Xin,Liu Hongjie,Zhao Junpu,et al..Pinhole design of spatial filter in high energy solid-state laser system[J].Laser&Optoelectronics Progress,2010,47(11):111402.张鑫,刘红婕,赵军普,等.高功率固体激光系统空间滤波小孔尺寸设计[J].激光与光电子学进展,2010,47(11):111402.
7 Liu Hongjie,Jing Feng,Li Qiang,et al..The effect of spatial filter pinhole on output beams qualityin high power laser[J].Journal of Yunnan University,2005,27(5A):184-189.刘红婕,景峰,李强,等.高功率固体激光装置空间滤波器小孔对输出光束质量的影响[J].云南大学学报,2005,27(5A):184-189.
8 Yanqi Gao,Baoqiang Zhu,Daizhong Liu,et al..Characteristics of beam alignment in high power four-pass laser amplifier[J].Appl Opt,2009,48(8):1591-1597.
9 Yanqi Gao,Baoqiang Zhu,Daizhong Liu,et al..Influences of the alignment and misalignment spatial filters on the beam quality in high power laser systems[J].J Opt,2010,12(9):095704.
10 Thomas D Rahmlow.Rugate Filter Having Suppressed Harmonics[P].United States Patent:5523882,[1996-6-4].
11 T D Rahmlow,A Turner.Broadband Rugate Filter:United States Patent,5475531[P].1995-12-12.
12 WJ Gunning.Rugate Filter Incorporating Parallel and Series Addition:United States Patent,4952025[P].1990-8-28.
13 NP Murarka,K J Kogler,C S Bartholomew,et al..Rugate Optical Filter Systems[P].United States Patent:4837044,[1989-6-6].
14 AC V Popta,M M Hawkeye,J C Sit,et al..Gradient-index narrow-bandpass filter fabricated with glancing-angle deposition[J].Opt Lett,2004,29(21):2545-2547.
15 KRobbie,G Beydaghyan,T Brown,et al..Ultrahigh vacuum glancing angle deposition system for thin films with controlled three-dimensional nanoscale structure[J].Review of Scientific Instruments,2004,75(4):1089-1097.
16 R Leitel,O Stenzel,S Wilbrandt,et al..Fabrication and characterization of rugatestructures composed of SiO2and Nb2O5[J].Optics and Precision Engineering,2005,13(4):505-511.
17 TK L Wong,L Brzozowski,E H Sargent.Analysis of nonquarter-wave grating by a modified Fourier-transform method[J].Appl Opt,2002,41(32):6763-6767.
18 FA Ríos,F V Villa,J A G Armenta.Dichroic Rugate filters[J].Appl Opt,2006,45(3):495-500.
19 KRobbie,G Beydaghyan,T Brown,et al..Ultrahigh vacuum glancing angle deposition system for thin films with controlled three-dimensional nanoscale structure[J].Review of Scientific Instruments,2004,75(4):1089-1097.
20 Zheng Guangwei.Study on Non-Focusing Low-Pass Spatial Filtering Technology for High-Power Laser Beam[D].Changsha:National University of Defense Technology,2011.144 -147.郑光威.高功率激光非聚焦型空间低通滤波技术研究[D].长沙:国防科技大学,2011.144-147.
21 M G Moharam,T K Gaylord.Chain-matrix analysis of arbitrarythickness dielectric reflection gratings[J].J Opt Soc Am,1982,72(2):187-190.