考虑尺度效应的微振动能量采集器建模
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摘要
考虑尺度效应~([1]),引入等效杨氏模量以便于对微压电悬臂梁进行有限元建模。搭建了振动特性实验平台,验证了考虑尺度效应的微梁动力学模型准确有效。在此基础上完善了微振动能量采集器的动力学模型,设计并制备了T型Si悬臂梁振动能量采集器。通过实验测试得到采集器的谐振频率、尖端位移和输出电压,与有限元分析结果相比较,改进模型比宏观模型的误差降低了13%,35%和22%。
Young's modulus changes in micro world with size effect. Considering this, a micro piezoelectric cantilever beam was analyzed by ANSYS. A vibration characteristics experimental platform was established. Considering size effect, the dynamic equation of the micro beam was studied. Results show that it is accurate. The dynamic model of micro vibration energy harvester was improved based on that. A T-type micro vibration energy harvester was designed and fabricated. Resonant frequency, tip displacement and output voltage of the harvester were obtained. Comparing with the macroscopic model of vibration harvester, the improved model reduces errors by 13%,35%, and 22%.
Young's modulus changes in micro world with size effect. Considering this, a micro piezoelectric cantilever beam was analyzed by ANSYS. A vibration characteristics experimental platform was established. Considering size effect, the dynamic equation of the micro beam was studied. Results show that it is accurate. The dynamic model of micro vibration energy harvester was improved based on that. A T-type micro vibration energy harvester was designed and fabricated. Resonant frequency, tip displacement and output voltage of the harvester were obtained. Comparing with the macroscopic model of vibration harvester, the improved model reduces errors by 13%,35%, and 22%.
引文
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[21]郑子君,陈璞,王大钧.杆、梁有限元模型的模态的振荡性质[J].振动与冲击,2012,31(20):79-83.ZHENG Zijun,CHEN Pu,WANG Dajun.Oscillation property of modes for FE models of bars and beams[J].Journal of Vibration and Shock,2012,31(20):79-83.
[2]LEE I,LEE K.The Internet of Things(Io T):Applications,investments,and challenges for enterprises[J].Business Horizons,2015,58(4):431-440.
[3]TURKANOVI C'M,BRUMEN B,H■LBL M.A novel user authentication and key agreement scheme for heterogeneous ad hoc wireless sensor networks,based on the Internet of Things notion[J].Ad Hoc Networks,2014,20:96-112.
[4]HALLER S,KARNOUSKOS S,SCHROTH C.The internet of things in an enterprise context[J].Lecture Notes in Computer Science(including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics),2009(5468):14-28.
[5]唐刚,刘景全,马华安,等.微型压电振动能量采集器的研究进展[J].机械设计与研究,2010,26(4):61-64.TANG Gang,LIU Jingquan,MA Huaan,et al.A survey on research of micro piezoelectric vibration energy harvesters[J].Machine Design and Research,2010,26(4):61-64.
[6]夏桦康,陈仁文,朱莉娅,等.压电-电磁复合动能采集器无量纲参数建模与分析[J].振动与冲击,2017,36(12):128-133.XIA Huakang,CHEN Renwen,ZHU Liya,et al.A study on the dimensionless parameter model of a piezoelectricelectromagnetic hybrid vibration energy harvester[J].Journal of Vibration and Shock,2017,36(12):128-133.
[7]朱莉娅,陈仁文,雷娴.压电振动发电机的研究现状与发展趋势[J].中国机械工程,2011,22(24):3016-3022.ZHU Liya,CHEN Renwen,LEI Xian.Current status and development trends of vibration-based piezoelectric generator[J].China Mechanical Engineering,2011,22(24):3016-3022.
[8]余寿文.微电子机械系统的几个力学问题[J].机械强度,2001,23(4):380-384.YU Shouwen.Some problems of solid mechanics for microelectro-mechanical systems[J].Journal of Mechanical Strength,2001,23(4):380-384.
[9]余寿文.复杂微力-电系统的细微尺度力学[J].力学进展,1995,25(2):249-259.YU Shouwen.Micro-mechanics of complex micro solidelectronic system[J].Advances in Mechanics,1995,25(2):249-259.
[10]聂志峰,周慎杰,韩汝军,等.应变梯度弹性理论下微构件尺寸效应的数值研究[J].工程力学,2012,29(6):38-46.NIE Zhifeng,ZHOU Shenjie,HAN Rujun,et al.Numerical study on size effects of the microstructures based on strain gradient elasticity[J].Eengineering Mechanics,2012,29(6):38-46.
[11]王志东,霍睿,张道坤.基于微尺度压电振动发电机的微电源设计[J].压电与声光,2016,38(2):320-323.WANG Zhidong,HUO Rui,ZHANG Daokun.Design of micro power supply based on micro-scale piezoelectric vibration generator[J].Piezoelectrics and Acoustooptics,2016,38(2):320-323.
[12]MCFARLAND A W,COLTON J S.Role of material microstructure in plate stiffness with relevance to microcantilever sensors[J].Journal of Micromechanics and Microengineering,2005,15(5):1060.
[13]LAM D C C,YANG F,CHONG A C M,et al.Experiments and theory in strain gradient elasticity[J].Journal of the Mechanics and Physics of Solids,2003,51(8):1477-1508.
[14]FLECK N A,MULLER G M,ASHBY M F,et al.Strain gradient plasticity:theory and experiment[J].Acta Metallurgica et Materialia,1994,42(2):475-487.
[15]STELMASHENKO N A,WALLS M G,BROWN L M,et al.Microindentations on W and Mo oriented single crystals:An STM study[J].Acta Metallurgica et Materialia,1993,41(10):2855-2865.
[16]方华斌.基于MEMS技术的压电能量采集器研究[D].上海:上海交通大学,2007.
[17]DEFOSSEUX M,ALLAIN M,DEFAY E,et al.Highly efficient piezoelectric micro harvester for low level of acceleration fabricated with a CMOS compatible process[J].Sensors and Actuators A:Physical,2012,188:489-494.
[18]KUDIMI J M R,MOHD-YASIN F,DIMITRIJEV S.Si C-based piezoelectric energy harvester for extreme environment[J].Procedia Engineering,2012,47:1165-1172.
[19]TANG Gang,YANG Bin,LIU Jingquan,et al.Development of high performance piezoelectric d33 mode MEMS vibration energy harvester based on PMN-PT single crystal thick film[J].Sensors and Actuators A:Physical,2014,205:150-155.
[20]吴晓,罗佑新.用Timoshenko梁修正理论研究功能梯度材料梁的动力响应[J].振动与冲击,2011,30(10):245-248.WU Xiao,LUO Youxin.Dynamic responses of a beam with functionally graded materials with Timoshenko beam correction theory[J].Journal of Vibration and Shock,2011,30(10):245-248.
[21]郑子君,陈璞,王大钧.杆、梁有限元模型的模态的振荡性质[J].振动与冲击,2012,31(20):79-83.ZHENG Zijun,CHEN Pu,WANG Dajun.Oscillation property of modes for FE models of bars and beams[J].Journal of Vibration and Shock,2012,31(20):79-83.