电磁悬浮微陀螺概述
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摘要
微陀螺具有体积小、功耗低等优点,但其精度目前仍然较低。在传统陀螺中,电磁悬浮陀螺的精度非常高,因此,对电磁悬浮微陀螺进行研究,有望获得高精度的微陀螺。介绍了电磁悬浮微陀螺的分类、原理、优缺点、结构以及研究现状。首先根据悬浮原理将电磁悬浮微陀螺分为基于磁吸力的电磁悬浮微陀螺、基于排斥力的电磁悬浮微陀螺、静电悬浮微陀螺、反磁悬浮微陀螺和超导磁悬浮微陀螺;然后分别介绍了每种电磁悬浮的悬浮原理和优缺点,以及每种电磁悬浮微陀螺的发展现状、样机结构和转子的悬浮旋转原理;最后,简述了电磁悬浮微陀螺的发展前景。
Micro-gyroscopes have advantages of small volume, low power consumption. However, their precision is somewhat lower. Among traditional gyroscopes, the precision of electromagnetic suspended gyroscopes is best, so, researches of electromagnetic suspended micro-gyroscope, may probably develop a high-precision micro-gyroscope. This review reports an overview of electromagnetic suspended micro-gyroscope, including categorizations, principles, advantages and disadvantages, structures and developments. First, electromagnetic suspended micro-gyroscopes are categorized into electromagnetic suspended micro-gyroscope based on attraction force, electromagnetic suspended micro-gyroscope based on repulsion force, electrostatic suspended micro-gyroscope, diamagnetic suspended micro-gyroscope and superconducting microgyroscope. Then levitated principles, advantages and disadvantages of each micro-gyroscope are introduced separately, as well as their developments, prototypes structures and principles of levitation and rotation of rotors. Finally, development tendency of electromagnetic suspended micro-gyroscope is evaluated.
Micro-gyroscopes have advantages of small volume, low power consumption. However, their precision is somewhat lower. Among traditional gyroscopes, the precision of electromagnetic suspended gyroscopes is best, so, researches of electromagnetic suspended micro-gyroscope, may probably develop a high-precision micro-gyroscope. This review reports an overview of electromagnetic suspended micro-gyroscope, including categorizations, principles, advantages and disadvantages, structures and developments. First, electromagnetic suspended micro-gyroscopes are categorized into electromagnetic suspended micro-gyroscope based on attraction force, electromagnetic suspended micro-gyroscope based on repulsion force, electrostatic suspended micro-gyroscope, diamagnetic suspended micro-gyroscope and superconducting microgyroscope. Then levitated principles, advantages and disadvantages of each micro-gyroscope are introduced separately, as well as their developments, prototypes structures and principles of levitation and rotation of rotors. Finally, development tendency of electromagnetic suspended micro-gyroscope is evaluated.
引文
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[20]李世鹏,张卫平,陈文元,等.抗磁悬浮的原理、特点和应用[J].磁性材料及器件,2011,42(1):1-6.LI Shi-peng,ZHANG Wei-ping,CHEN Wen-yuan,et al.Principle,features and applications of diamagnetic levitation[J].Journal of Magnetic Materials and Devices,2011,42(1):1-6.
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[23]张卫平,陈文元,段永瑞.高温超导稳悬永磁转子微陀螺[P].中国专利,200510027930.7,2005-12-28.ZHANG Wei-ping,CHEN Wen-yuan,DUAN Yongrui.High temperature superconducting stable suspension permanent magnet rotor micro gyroscope[P].China Patent,200510027930.7,2005-12-28.
[2]汤继藤.超导陀螺仪转子支承系统研究.[D].哈尔滨工程大学,2005.TANG Ji-qiang.SCG rotor's bearing system research[D].Harbin Engineering University,2005.
[3]李振杰.静电悬浮轴承转子不平衡振动控制方法的研究[D].郑州大学,2005.LI Zhen-jie.Research on control method of rotor unbalance vibration of electrostatic suspended hearing[D].Zhengzhou University,2005.
[4]Dauwalter C R,Ha J C.A high perfromance magnetically suspended MEMS spinning wheel gyro[J],Position Location and Navigation Symposium,IEEE,2004:70-77.
[5]Dauwalter C R,Ha J C.Magnetically suspended MEMS spinning wheel gyro[J].Aerospace and Electronic Systems Magazine,IEEE,2005,20(2):21-26.
[6]Xue G,Zhang X,Zhang H.Electromagnetic design of a magnetically,suspended gyroscope prototype[J].International Conference on Applied Superconductivity and Electromagnetic Devices,IEEE,2009:369-372.
[7]Bedford B D,Peer L H B,Tonks L.The electromagnetic levitator[J].General Electric Review 1939,42(6):246-247.
[8]Williams C B,Shearwood C,Mellor P H,et al.Modelling·and testing of a frictionless levitated micromotor[J].Sensors and Actuators A:Physical,1997,61(1):469-473.
[9]Shearwmood C,Ho K Y,Williamis C B,et al.Development of a levitated micromotor for application as a gtriscioe[J].Sensors and Actuators A:Physical,2000,83(1):85-92.
[10]吴校生.磁悬浮转子微陀螺的设计制造及其特性研究[D].上海交通大学,2004.WU Xiao-sheng.Design and fabrication of micromachined gyroscope with electromagnetically levitated rotor and its characteristics study[D].Shanghai Jiao Tong University,2004.
[11]吴校生,陈文元,张卫平.磁悬浮转子微陀螺及其悬浮力与稳定性的分析[J].传感器技术,2004,22(12):12-14.WU Xiao-sheng,CHEN Wen-yuan,ZHANG Wei-ping,Micromachined gyroscope of electromagnetic levitating rotor and its analysis of levitating force and stability[J].Journal of Transducer Technology,2004,22(12):12-14.
[12]Wu X,Deng T,Chen W,et al.Electromagnetic levitation micromotor with stator embedded(ELMSE):levitation and lateral stability characteristics analysis[J].Microsystem Technologies,2011,17(1):59-69.
[13]Hawkey T,Torti R,Johnson B.Electrostatically controlled micromechanical gyroscope[P].U.S.Patent 5353656,1994-10-11.
[14]Terasawa T,Watanabe T,Murakoshi T.Electrostatically levitated ring-shaped rotational-gyro/accelerometer using all-digital OFDM detection with TAD[J].Sensors,IEEE,2012:1-4.
[15]Murakoshi T,Endo Y.Fukatsu K,et al.Electrostatically levitated ring-shaped rotational-gyro/accelerometer[J].Japanese Journal of Applied Physics,2003,42:2468-2472.
[16]Damrongsak B,Kraft M,Rajgopal S,et al.Design and fabrication of a micromachined electrostatically suspended gyroscope,Proceedings of the Institution of Mechanical Engineers(Part C)[J].Journal of Mechanical Engineering Science,2008,222(1):53-63.
[17]Xiao Q,Chen W.Ma G,et al.Simulation of levitation control for a micromachined electrostatically levitated gyroscope[C].4~(th)IEEE International Conference on Nano/Micro Engineered and Molecular Systems,2009:160-163.
[18]Han F T,Liu Y F,Wang L,et al.Micromachined electrostatically suspended gyroscope with a spinning ringshaped rotor[J].Journal of Micromechanics and Microengineering,2012,22(10):105032.
[19]刘武.抗磁悬浮转子式微器件的相关技术研究[D].上海交通大学,2009.LIU Wu.Related techniques of micromac hi ned device with diamagnetic levitation rotor[D].Shanghai Jiao Tong University,2009.
[20]李世鹏,张卫平,陈文元,等.抗磁悬浮的原理、特点和应用[J].磁性材料及器件,2011,42(1):1-6.LI Shi-peng,ZHANG Wei-ping,CHEN Wen-yuan,et al.Principle,features and applications of diamagnetic levitation[J].Journal of Magnetic Materials and Devices,2011,42(1):1-6.
[21]Liu W,Chen W Y,Zhang W P,et al.Variable-capacitance micromotor with levitated diamagnetic rotor[J].Electronics Letters,2008,44(11):681-683.
[22]Liu K,Zhang W,Liu W,et al.An innovative micro-diamagnetic levitation system with coils applied in micro-gyroscope[J].Microsystem Technologies,2010,16(3):431-439.
[23]张卫平,陈文元,段永瑞.高温超导稳悬永磁转子微陀螺[P].中国专利,200510027930.7,2005-12-28.ZHANG Wei-ping,CHEN Wen-yuan,DUAN Yongrui.High temperature superconducting stable suspension permanent magnet rotor micro gyroscope[P].China Patent,200510027930.7,2005-12-28.