电子级磷酸研发现状及芯片级磷酸展望
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摘要
由于液晶显示器(LCD)工业和半导体芯片工业在中国迅速普及,用于清洗和蚀刻的电子级磷酸的需求正在日益增加,对磷酸中金属离子含量的要求也越来越高,为满足中国对电子级磷酸的需求,此方向成为许多研究学者研究的重点。本文介绍了近年来电子级磷酸的研发现状,以及在LCD工业和半导体芯片工业的应用,并对芯片级磷酸进行了展望。
With the rapid development of liquid crystal display(LCD) industry and semiconductor chipindustry in China, the demand for electronic-grade phosphoric acids is increasing day by day,and the purity requirement for phosphoric acid is also getting higher and higher. At present,it has become a hot-point of fine phosphorus chemical research. In this paper,the recent research progresses on electronic-grade phosphoric acid and their applications for LCD industry and semiconductor chip industry were introduced,and the prospects of microchip-grade phosphoric acid were discussed.
With the rapid development of liquid crystal display(LCD) industry and semiconductor chipindustry in China, the demand for electronic-grade phosphoric acids is increasing day by day,and the purity requirement for phosphoric acid is also getting higher and higher. At present,it has become a hot-point of fine phosphorus chemical research. In this paper,the recent research progresses on electronic-grade phosphoric acid and their applications for LCD industry and semiconductor chip industry were introduced,and the prospects of microchip-grade phosphoric acid were discussed.
引文
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[5]姜晓滨.熔融结晶法制备高纯磷酸过程研究[D].天津大学,2012.
[6]Dermatas D, Meng X. Utilization of fly ash for stabilization/solidification of heavy metal contaminated soils[J]. Engineering Geology,2003,70(3-4):377-394.
[7]Halmemies S, Gr?ndahl S, Arffman M, et al. Vacuum extraction based response equipment for recovery of fresh fuel spills from soil[J]. Journal of hazardous materials,2003,97(1-3):127-143.
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[9]Masatomi T,Hikita S.Manufacture of high purity phosphoric acid[P]JP3043741,2000-05-22
[10]黄千钧.电子级磷酸的研究与生产进展[J].无机盐工业,2012,44(2):1.
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[12]朱健.熔融结晶法制备电子级磷酸的方法:2006.
[13]李天祥,解旧,刘飞,等.一种电子级磷酸的生产方法:中国,1843900[P].2006-10-11.
[14]J.阿尔顿,S.瑞赫马克,P.伊霖,等.通过磷酸半水合物的结晶制备磷酸的方法[P].CN1344226,2002-04-10
[15]陈安银,杜惠蓉,高尚芬,et al.电子级磷酸的生产工艺及发展现状[J].广州化工,2014,42(4):11-12.
[16]刘海岛,尹秋响.熔融结晶及其耦合技术研究的进展[J].化学工业与工程,2004,21(5):367-371.
[17]骆吉林,李军,杨三可,et al.电渗析法制电子级高纯磷酸[J].磷肥与复肥,2009,24(3):33-36.
[18]谷至华.薄膜晶体管(TFT)阵列制造技术[M].复旦大学出版社,2007.
[19]荣楠.湿式化学蚀刻在半导体工业中的应用[D].2005.
[20]林明祥.集成电路制造工艺[M].机械工业出版社,2005.
[21]宋文超,陈仲武,姚立新,et al.全自动单晶圆铝腐蚀清洗机工艺原理与工作过程介绍[J].电子工业专用设备,2013(6):1-4.