高衍射效率连续面形分束器的设计与制备
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摘要
为了解决目前光学分束器件衍射效率低的问题,在传统的Gerchberg-Saxton(GS)算法基础上,对初始相位和迭代算法中的振幅限制方式作改进.先利用二次相位来作为迭代算法的初始相位,再在迭代过程中将输出平面分为信号区和噪音区两部分,保持这两部分的相位不变,信号区内振幅乘上一个随迭代次数不断变化的因子,噪音区内振幅保持不变.通过该方法设计9×9连续面形的分束器件,并与传统GS算法设计的分束器进行了对比,结果表明:GS算法设计得到的分束器相位存在严重的突变和不连续等问题,而本文方法设计得到的分束器相位连续平滑,可利用移动掩模技术加工.最终制备出1×3和1×9分束器,其实测的衍射效率分别为83.5%和89.4%,均匀性误差分别为3.56%和15.23%.
Aiming at the low diffraction efficiency of optical beam splitting devices,based on the traditional Gerchberg-Saxton(GS)algorithm,the initial phase and the amplitude limitation method is improved.The secondary phase is used as the initial phase of the iterative algorithm,and then the output plane is divided into the signal area and the noise area.Keeping the phase of the two parts unchanged,the amplitude in the region is multiplied by a factor which varies with the number of iterations,and the amplitude in the noise region remains unchanged.A 9×9 continuous-face beam splitting device designed by the proposed method is compared with the beam splitter designed by the traditional GS algorithm.The results show that the phase of the beam splitter designed by GS algorithm has serious mutation and discontinuity.However,the beam splitter phase designed by the proposed method is continuously smoothand can be processed by the moving mask technique.The 1×3 and 1×9 beam splitters are prepared,the measured diffraction efficiency are 83.5% and 89.4%,the uniformity error are 3.56% and 15.23%,respectively.
Aiming at the low diffraction efficiency of optical beam splitting devices,based on the traditional Gerchberg-Saxton(GS)algorithm,the initial phase and the amplitude limitation method is improved.The secondary phase is used as the initial phase of the iterative algorithm,and then the output plane is divided into the signal area and the noise area.Keeping the phase of the two parts unchanged,the amplitude in the region is multiplied by a factor which varies with the number of iterations,and the amplitude in the noise region remains unchanged.A 9×9 continuous-face beam splitting device designed by the proposed method is compared with the beam splitter designed by the traditional GS algorithm.The results show that the phase of the beam splitter designed by GS algorithm has serious mutation and discontinuity.However,the beam splitter phase designed by the proposed method is continuously smoothand can be processed by the moving mask technique.The 1×3 and 1×9 beam splitters are prepared,the measured diffraction efficiency are 83.5% and 89.4%,the uniformity error are 3.56% and 15.23%,respectively.
引文
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[2]FENG Jin-ling,WANG Yi-jun,LIU Shi-yu,et al.Three-dimensional display with directional beam splitter array[J].Optics Express,2017,25(2):1564-1572.
[3]SUN Zhu-mei,ZHOU Chang-he,CAO Hong-chao,et al.Unified beam splitter of fused silica grating under the second Bragg incidence[J].Optical Society of America,2015,32(11):1952-1957.
[4]ROMERO L A,DICKEY F M.Theory of optimal beam splitting by phase grating.I.One-dimensional gratings[J].Optical Society of America,2007,24(8):2280-2295.
[5]STURMER M,WAPLER M C,SCHMITT J,et al.Phase gratings with tunable diffraction efficiency[J].Optics Express,2016,24(21):23765-23776.
[6]HO I-Lin,LI Wang-yang.Study of wide-spectrum and high-resolution diffraction optical elements by stacks of binary phase gratings[J].Applied Optics,2018,57(34):9958-9962.
[7]BARLEV O,GOLUB M A.Multifunctional binary diffractive optical elements for structured light projectors[J].Optics Express,2018,26(16):21092-21107.
[8]ARRIZON V,TESTORF M.Efficiency limit of spatially quantized Fourier array illuminators[J].Optical Letters,1997,22(4):197-199.
[9]ZHOU Guang-ya,ZHAO Xiao-lin,ZHANG Tong,et al.Design of continuous surface efficient grating splitting device[J].Acta Optical Sinica,2000,20(6):831-837.周光亚,赵小林,张彤,等.连续面形高效光栅分束器件的设计[J].光学学报,2000,20(6):831-837.
[10]GALE M T,ROSSI M,SCHUTZ H,et al.Continuous-relief diffractive optical elements for two-dimensional array generation[J].Applied Optics,1993,32(14):2526-2533.
[11]PRONGUE D,HERZIG H P,DANDLIKER R,et al.Optimized kinoform structures for highly efficient fan-out elements[J].Applied Optics,1992,31(26):5706-5711.
[12]ARRIZN V,TESTORF M,SINZINGER S,et al.Iteration optimization of phase-only diffractive optical elements based on a lenslet array[J].Optical Society of America,2000,17(12):2157-2164.
[13]GERCHBERG R W,SAXTON W O,et al.A practical algorithm for the determination of phase from image and diffraction plane pictures[J].Optik,1972,35(2):1-6.
[14]STREIBL N,NOLSCHER U,JAHNSJ,et al.Array generation with lenslet arrays[J].Applied Optics,1991,30(19):2739-2742.
[15]CUSACK R,HUNTLEY J M,GOLDREIN H T,et al.Improved noise-immune phase-unwrapping algorithm[J].Applied Optics,1995,34(5):781-789.
[16]ZENG Hong-jun,CHEN Bo,GUO Lv-rong,et al.Edge effect and its application in mask moving technique[J].OptoElectronic Engineering,2000,27(5):19-22.曾红军,陈波,郭履容,等.掩模移动中的边框效应及其应用[J].光电工程,2000,27(5):19-22.
[17]XIE Yu-ping,WU Peng,YANG Zheng,et al.Continuous microstructure etching process polyimide based moving mask exposure[J].Acta Photonica Sinica,2015,44(9):0922004.谢玉萍,吴鹏,杨正,等.基于移动掩模曝光的聚酰亚胺连续微结构刻蚀工艺研究[J].光子学报,2015,44(9):0922004.
[18]TONG Jun-min,HU Song,DONG Xiao-chun,et al.Effect of stage moving linear error on exposure in mask moving technique[J].Opto-Electronic Engineering,2007,34(11):54-60.佟军民,胡松,董小春,等.工件台移动直线性对掩模移动曝光的影响[J].光电工程,2007,34(11):54-60.
[19]FELAMAN M R,GUEST C C.Iterative encoding of high-efficiency holograms for generation of spot arrays[J].Optics Letters,1989,14(10):479-481.