硬脆非球面光学镜精密磨削与自适应控制方法
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摘要
针对硬脆非球面光学镜硬度高、型面特殊、加工面积大、加工质量要求高的特点,提出了一种基于法向跟踪的、以圆筒形砂轮端面进行磨削的非球面范成精密加工方法。在此基础上,进一步设计了智能化的实时检测与自适应控制方法。应用这些方法实现了磨削运动轨迹的精确控制、砂轮磨损的自动补偿、磨削压力的自动控制、工艺参数的自动调节。实验结果表明:以圆筒砂轮端面进行磨削的、基于法向跟踪的非球面范成精密磨削法可以保证非球面的面形精度,砂轮磨损实时检测与自适应控制方法能提高加工质量和效率。
For hard and brittle aspheric optical mirror with characteristics of high hardness,special profile,large processing area and high processing quality requirement,agenerating grinding method for aspheric surface based on the normal tracking and grinding with cylindrical grinding wheel end is developed.Based on this,intelligent realtime detection and adaptive control method are designed.Applying these methods,the precise control of the grinding motion track,automatic compensation of grinding wheel wear,automatic control of grinding pressure and automatic adjustment of process parameters are realized.Experimental results show that the method for generating precision grinding of aspheric surfaces which is grinded with cylindrical grinding wheel end and based on normal tracking can ensure the accuracy of the aspheric surfaces.The real time detection of grinding wheel wearing and adaptive control method can improve the machining quality and efficiency.
For hard and brittle aspheric optical mirror with characteristics of high hardness,special profile,large processing area and high processing quality requirement,agenerating grinding method for aspheric surface based on the normal tracking and grinding with cylindrical grinding wheel end is developed.Based on this,intelligent realtime detection and adaptive control method are designed.Applying these methods,the precise control of the grinding motion track,automatic compensation of grinding wheel wear,automatic control of grinding pressure and automatic adjustment of process parameters are realized.Experimental results show that the method for generating precision grinding of aspheric surfaces which is grinded with cylindrical grinding wheel end and based on normal tracking can ensure the accuracy of the aspheric surfaces.The real time detection of grinding wheel wearing and adaptive control method can improve the machining quality and efficiency.
引文
1 Xu Qiao,Wang Jian,Ma Ping,et al..Progress of advanced optical manufacturing technology[J].High Power Laser and Particle Beams,2013,25(12):3098-3105.许乔,王健,马平,等.先进光学制造技术进展[J].强激光与粒子束,2013,25(12):3098-3105.
2 Kang Nianhui,Li Shengyi,Zheng Ziwen.Error model and compensation technology of aspheric grinding based on multibody system theory[J].Journal of Mechanical Engineering,2008,44(4):143-149.康念辉,李圣怡,郑子文.基于多体系统理论的非球面磨削误差模型与补偿技术[J].机械工程学报,2008,44(4):143-149.
3 Piao Chenghao,Gao Wenxin,Cai Li.Precision analysis of precisely grinding machining machine for locus shaping method[J].Optical Technology,1999(1):54-57.朴承镐,高文信,蔡立.轨迹成型法精密磨削加工机床的精度分析[J].光学技术,1999(1):54-57.
4 Han Chengshun,Dong Shen.Study on ultra-precision grinding of large optical aspherical elements[J].Opto-Electronic Engineering,2003,30(6):43-46.韩成顺,董申.超精密磨削大型光学非球面器件的研究[J].光电工程,2003,30(6):43-46.
5 Bifano T G,Dowand T A,Scattergood R O.Ductile-regime grinding:A new technology for machining brittle materials[J].Journal of Engineering for Industry,1991,113(2):184-189.
6 Cheng Yanjiang,Hu Zhonghui,Ma Wensheng,et al..Research on the quality control of ultra-precision grinding of aspheric surface[J].Journal of Astronautics,2006,27(B12):222-226.程延江,胡忠辉,马文生,等.光学非球面超精密磨削质量控制技术研究[J].宇航学报,2006,27(B12):222-226.
7 Liu Zhenyu.Grinding 2mdiameters aspheric SiC mirror with multi-mode optimization technique[J].Acta Optica Sinica,2015,35(s1):s122005.刘振宇.应用组合加工技术加工2m口径非球面碳化硅反射镜[J].光学学报,2015,35(s1):s122005.
8 Xiong Ling,Luo Xiao,Liu Zhenyu,et al..Measurement of 2mSiC asphere mirror based on swing arm profilometer[J].Acta Optica Sinica,2015,35(12):1212002.熊玲,罗霄,刘振宇,等.2m量级SiC非球面反射镜的摆臂轮廓检测[J].光学学报,2015,35(12):1212002.
9 Wang Xu,Zhang Binzhi.Study on the artificial neural network of the RB-SiC mirror surface roughness fabricated with the fixed abrasive technology[J].Acta Optica Sinica,2014,34(s1):s122006.王旭,张斌智.固着磨料加工高精度碳化硅反射镜粗糙度的人工神经网络研究[J].光学学报,2014,34(s1):s122006.
10 Hu Dejin.Principle and control method for precisely grinding quadratic rotated conicoid[J].Journal of Mechanical Engineering,2014,50(13):178-183.胡德金.二次旋转曲面精密磨削原理与运动控制方法研究[J].机械工程学报,2014,50(13):178-183.
11胡德金.一种密封环内球面数控精密磨削装置与磨削方法:中国,CN102744666B[P].2014-11-19.
12胡德金,郁翔,李峰,等.精密磨削与检测一体化电主轴:中国,CN104551981A[P].2015-04-29.
2 Kang Nianhui,Li Shengyi,Zheng Ziwen.Error model and compensation technology of aspheric grinding based on multibody system theory[J].Journal of Mechanical Engineering,2008,44(4):143-149.康念辉,李圣怡,郑子文.基于多体系统理论的非球面磨削误差模型与补偿技术[J].机械工程学报,2008,44(4):143-149.
3 Piao Chenghao,Gao Wenxin,Cai Li.Precision analysis of precisely grinding machining machine for locus shaping method[J].Optical Technology,1999(1):54-57.朴承镐,高文信,蔡立.轨迹成型法精密磨削加工机床的精度分析[J].光学技术,1999(1):54-57.
4 Han Chengshun,Dong Shen.Study on ultra-precision grinding of large optical aspherical elements[J].Opto-Electronic Engineering,2003,30(6):43-46.韩成顺,董申.超精密磨削大型光学非球面器件的研究[J].光电工程,2003,30(6):43-46.
5 Bifano T G,Dowand T A,Scattergood R O.Ductile-regime grinding:A new technology for machining brittle materials[J].Journal of Engineering for Industry,1991,113(2):184-189.
6 Cheng Yanjiang,Hu Zhonghui,Ma Wensheng,et al..Research on the quality control of ultra-precision grinding of aspheric surface[J].Journal of Astronautics,2006,27(B12):222-226.程延江,胡忠辉,马文生,等.光学非球面超精密磨削质量控制技术研究[J].宇航学报,2006,27(B12):222-226.
7 Liu Zhenyu.Grinding 2mdiameters aspheric SiC mirror with multi-mode optimization technique[J].Acta Optica Sinica,2015,35(s1):s122005.刘振宇.应用组合加工技术加工2m口径非球面碳化硅反射镜[J].光学学报,2015,35(s1):s122005.
8 Xiong Ling,Luo Xiao,Liu Zhenyu,et al..Measurement of 2mSiC asphere mirror based on swing arm profilometer[J].Acta Optica Sinica,2015,35(12):1212002.熊玲,罗霄,刘振宇,等.2m量级SiC非球面反射镜的摆臂轮廓检测[J].光学学报,2015,35(12):1212002.
9 Wang Xu,Zhang Binzhi.Study on the artificial neural network of the RB-SiC mirror surface roughness fabricated with the fixed abrasive technology[J].Acta Optica Sinica,2014,34(s1):s122006.王旭,张斌智.固着磨料加工高精度碳化硅反射镜粗糙度的人工神经网络研究[J].光学学报,2014,34(s1):s122006.
10 Hu Dejin.Principle and control method for precisely grinding quadratic rotated conicoid[J].Journal of Mechanical Engineering,2014,50(13):178-183.胡德金.二次旋转曲面精密磨削原理与运动控制方法研究[J].机械工程学报,2014,50(13):178-183.
11胡德金.一种密封环内球面数控精密磨削装置与磨削方法:中国,CN102744666B[P].2014-11-19.
12胡德金,郁翔,李峰,等.精密磨削与检测一体化电主轴:中国,CN104551981A[P].2015-04-29.