纳米压痕法测试微纳米涂层的力学性能
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摘要
采用G200型微/纳米压痕仪,测试了不同微纳米级涂层材料的力学性能。结果表明:使用纳米压痕法能检测和表征微纳米涂层材料的硬度和弹性模量及其随涂层厚度的变化趋势,从而了解涂层的力学性能以及与基体的结合质量情况;纳米压痕法测试涂层力学性能时存在明显的表面效应,一般建议压入深度不小于20μm,以保证表面粗糙度引起的压入深度的不确定度小于5%。
G200 micro-nano indentation apparatus was used to measure the mechanical properties of different micro-nano coating materials.The results show that the nano indentation method could be used to detect and characterize the hardness and elastic modulus and the changing trend with the coating thickness of the micro-nano coating materials,so as to understand the mechanical properties of the coating and the bonding quality with the base material.The surface effect was obvious when nano-indentation method was used to measure the mechanical properties of coating materials.It is generally recommended that the compression depth should be no less than20μm to ensure that the uncertainty of compression depth caused by surface roughness was less than 5%.
G200 micro-nano indentation apparatus was used to measure the mechanical properties of different micro-nano coating materials.The results show that the nano indentation method could be used to detect and characterize the hardness and elastic modulus and the changing trend with the coating thickness of the micro-nano coating materials,so as to understand the mechanical properties of the coating and the bonding quality with the base material.The surface effect was obvious when nano-indentation method was used to measure the mechanical properties of coating materials.It is generally recommended that the compression depth should be no less than20μm to ensure that the uncertainty of compression depth caused by surface roughness was less than 5%.
引文
[1]张泰华.微/纳米力学测试技术:仪器化压入的测量、分析、应用及其标准化[M].北京:科学出版社,2013.
[2]刘美华,李鸿琦,王静,等.纳米压痕测量精度的影响因素[J].机械工程材料,2008,32(8):4-8.
[3]徐连勇,荆洪阳,霍立兴,等.金属基陶瓷涂层弹性模量和界面断裂强度[J].焊接学报,2006,27(8):55-58.
[4]戴嘉维,张惠娟,李戈扬.基片与膜厚对硬质薄膜力学性能的影响[J].真空科学与技术学报,2003,23(3):147-151.
[5]弓满锋,乔生儒,张程煜,等.薄膜弹性性能和膜厚对其弹性模量的影响[J].稀有金属材料与工程,2009,38(5):876-880.
[6]蓝林钢,甘海啸.压痕法测试NEPE推进剂/衬层界面的弹性模量[J].理化检验(物理分册),2014,50(10):731-734.
[7]朱涛,金鑫,许学龙.仪器化压痕法在在役设备检测中的应用[J].理化检验(物理分册),2015,51(12):863-866.
[2]刘美华,李鸿琦,王静,等.纳米压痕测量精度的影响因素[J].机械工程材料,2008,32(8):4-8.
[3]徐连勇,荆洪阳,霍立兴,等.金属基陶瓷涂层弹性模量和界面断裂强度[J].焊接学报,2006,27(8):55-58.
[4]戴嘉维,张惠娟,李戈扬.基片与膜厚对硬质薄膜力学性能的影响[J].真空科学与技术学报,2003,23(3):147-151.
[5]弓满锋,乔生儒,张程煜,等.薄膜弹性性能和膜厚对其弹性模量的影响[J].稀有金属材料与工程,2009,38(5):876-880.
[6]蓝林钢,甘海啸.压痕法测试NEPE推进剂/衬层界面的弹性模量[J].理化检验(物理分册),2014,50(10):731-734.
[7]朱涛,金鑫,许学龙.仪器化压痕法在在役设备检测中的应用[J].理化检验(物理分册),2015,51(12):863-866.