基于柔性干电极的肌电信号无线采集系统设计
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摘要
传统Ag/AgCl湿电极存在柔韧性差、稳定性不高等缺点,已不能满足应用于智能可穿戴设备采集表面肌电信号(sEMG)的需求。提出一种通过微电子机械系统(MEMS)技术制备柔性干电极的方法,并针对柔性干电极的特点设计一套便携式16通道sEMG无线采集系统。通过光刻、刻蚀、聚二甲基硅氧烷(PDMS)形貌转移等工艺制成面积1 cm~2、厚度1 mm、底部直径80μm、高度143μm、中心距160～240μm的柔性微针阵列干电极。无线采集系统将采集到的sEMG进行放大、滤波、A/D转换和无线传输后,由LabVIEW编写的上位机进行波形显示和数据存储。整个采集装置尺寸为6 cm×2.5 cm×1.5 cm,电池容量为200 mA·h,充电5 min可在室外50 m范围内工作4 h左右。该无线采集装置配合柔性干电极提取sEMG具有采集通道多、稳定性好、传输距离远、实时显示波形、生物兼容性好等优点。
The traditional Ag/AgCl wet electrode has the disadvantages of poor flexibility and low stability,and cannot meet the application requirement of smart wearable devices to collect the surface electromyography(sEMG).A method for fabricating flexible dry electrodes by microelectromechanical system(MEMS)technology was presented,and a portable 16-channel sEMG wireless acquisition system was designed according to the characteristics of flexible dry electrodes.The flexible microneedle array dry electrode with an area of 1 cm~2,a thickness of 1 mm,a bottom diameter of 80μm,a height of 143μm and a center distance of 160～240μm was prepared by lithography,etching,polydimethylsiloxane(PDMS)shape-transferring and so on.After the amplification,filtering,A/D conversion and wireless transmission through the wireless acquisition system,the collected sEMG was transferred to the upper computer programmed by LabVIEW software for the waveform display and data storage.The acquisition device has a whole size of 6 cm×2.5 cm×1.5 cm and a battery capacity of 200 mA· h,and can work for about 4 h in the range of 50 m outside after charging for 5 min.The wireless acquisition device combined with the flexible dry electrodes for collecting sEMG has the advantages of multiple acquisition channels,good stability,long transmission distance,real-time waveform display,good biocompatibility and so on.
The traditional Ag/AgCl wet electrode has the disadvantages of poor flexibility and low stability,and cannot meet the application requirement of smart wearable devices to collect the surface electromyography(sEMG).A method for fabricating flexible dry electrodes by microelectromechanical system(MEMS)technology was presented,and a portable 16-channel sEMG wireless acquisition system was designed according to the characteristics of flexible dry electrodes.The flexible microneedle array dry electrode with an area of 1 cm~2,a thickness of 1 mm,a bottom diameter of 80μm,a height of 143μm and a center distance of 160～240μm was prepared by lithography,etching,polydimethylsiloxane(PDMS)shape-transferring and so on.After the amplification,filtering,A/D conversion and wireless transmission through the wireless acquisition system,the collected sEMG was transferred to the upper computer programmed by LabVIEW software for the waveform display and data storage.The acquisition device has a whole size of 6 cm×2.5 cm×1.5 cm and a battery capacity of 200 mA· h,and can work for about 4 h in the range of 50 m outside after charging for 5 min.The wireless acquisition device combined with the flexible dry electrodes for collecting sEMG has the advantages of multiple acquisition channels,good stability,long transmission distance,real-time waveform display,good biocompatibility and so on.
引文
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[2] KIM K,COLGATE J E.Haptic feedback enhances grip force control of sEMG-controlled prosthetic hands in targeted reinnervation amputees[J].IEEE Transactions on Neural Systems and Rehabilitation Engineering,2012,20(6):798-805.
[3] KIM M,KIM T,KIM D S,et al.Curved microneedle arraybased sEMG electrode for robust long-term measurements and high selectivity[J].Sensors,2015,15(7):16265-16280.
[4]浦小飞.穿戴式电生理监测系统的超低功耗、低噪声模拟前端集成电路研究与设计[D].上海:复旦大学,2013.
[5]冯媛媛,戴威,王文波,等.肌电信号无线采集装置的研制及应用[J].机械设计与制造工程,2018,47(3):187-189.
[6] CIESLEWSKI G G,CHENEY D,GUGEL K,et al.Neural signal sampling via the low power wireless picosystem[J].IEEE Engineering in Medicine and Biology Society,2006,1:5904-5907.
[7] OBEID I,NICOLELIS M A L,WOLF P D.A multichannel telemetry system for single unit neural recordings[J].Journal of Neuroscience Methods,2004,133(1/2):33-38.
[8]胡巍,赵章琰,路知远,等.无线多通道表面肌电信号采集系统设计[J].电子测量与仪器学报,2009,23(11):30-35.
[9]冯媛媛.自由运动大壁虎肌电信号无线采集及运动关联特性初探[D].南京:南京航空航天大学,2017.
[10] WANG L F,LIU J Q,YANG B,et al.PDMS-based low cost flexible dry electrode for long-term EEG measurement[J].IEEE Sensors Journal,2012,12(9):2898-2904.
[11] MENG Y,LI Z B,CHEN X,et al.A flexible dry microdome electrode for ECG monitoring[J].Microsystem Technologies,2015,21(6):1241-1248.
[12] JUNG H C,MOON J H,BEAK D H,et al.CNT/PDMS composite flexible dry electrodes for long-term ECG monitoring[J].IEEE Transactions on Biomedical Engineering,2012,59(5):1472-1479.
[13] WANG R X,JIANG X M,WANG W,et al.A microneedle electrode array on flexible substrate for long-term EEG monitoring[J].Sensors and Actuators:B,2017,244:750-758.
[14] PEI W H,ZHANG H,WANG Y J,et al.Skin-potential variation insensitive dry electrodes for ECG recording[J].IEEE Transactions on Biomedical Engineering,2016,64(2):463-470.
[15] REN L,JIANG Q,CHEN Z P,et al.Flexible microneedle array electrode using magnetorheological drawing lithography for bio-signal monitoring[J].Sensors and Actuators:A,2017,268:38-45.
[16] KUNDU A,AUSAF T,RAJARAMAN S.3D printing,ink casting and micromachined lamination(3D PICLM):a makerspace approach to the fabrication of biological microdevices[J].Micromachines,2018,9(2):85-1-85-24.
[17] SUN Y W,REN L,JIANG L L,et al.Fabrication of composite microneedle array electrode for temperature and biosignal monitoring[J].Sensors,2018,18(4):1193-1-1193-12.
[18] KIM M,GU G,CHA K J,et al.Wireless sEMG system with a microneedle-based high-density electrode array on a flexible substrate[J].Sensors,2017,18(1):92.
[19]王金凤,李涛,孙漫漫.基于STM32处理器的表面肌电无线采集装置设计[J].电子技术应用,2012,38(7):78-80.
[20]徐伟钊.一种多通道表面肌电采集仪的研制与开发[D].广州:华南理工大学,2018.