PVDF薄膜压电传感特性及其在工程结构监测应用研究进展
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摘要
PVDF压电薄膜因其体积小、质量轻、稳定性高、传感灵敏度高、制作成本低等优点而被广泛应用于工程结构监测体系中。总结了PVDF压电薄膜基本特点、工作原理及静/动态传感特性,并指出其用作应变传感器在工程结构或构件局部监测中具有的优势;分析了以PVDF压电薄膜作为传感元件在工程实际监测中应用实例,最后对其在结构监测方面应用前景做了相关展望。
PVDF piezoelectric films are widely used in engineering structure monitoring system due to their small size,light weight,high stability,high sensitivity and low production cost.In this paper,the basic feature,function principle,and static/dynamic sensing characteristic of PVDF piezoelectric film are summarized,and the advantages of PVDF film as strain sensor in the local monitoring of engineering structures or components are concluded.The use of PVDF piezoelectric film as a sensing element in the actual monitoring of engineering applications are illustrated,and its application prospects in structural monitoring are also expected.
PVDF piezoelectric films are widely used in engineering structure monitoring system due to their small size,light weight,high stability,high sensitivity and low production cost.In this paper,the basic feature,function principle,and static/dynamic sensing characteristic of PVDF piezoelectric film are summarized,and the advantages of PVDF film as strain sensor in the local monitoring of engineering structures or components are concluded.The use of PVDF piezoelectric film as a sensing element in the actual monitoring of engineering applications are illustrated,and its application prospects in structural monitoring are also expected.
引文
[1] Mao Qibo.Design of shaped piezoelectric modal sensors for cantilever beams with intermediate support by using differential transformation method[J].Applied Acoustics,2012,73(23):144-149.
[2] Mao Qibo.Experimental research on the volume displacement sensor using PVDF array[J].Chinese Journal of Sensors and Actuators,2012,25(8):1054-1058(in Chinese).毛崎波.通过PVDF阵列测量提及位移的实验研究[J].传感技术学报,2012,25(8):1054-1058.
[3] Mao Qibo,Pietrzko S.Design of shaped piezoelectric modal sensors for beam with arbitrary boundary conditions by using a domain decomposition method[J].Journal of Sound and Vibration,2010,32(9):2068-2082.
[4] Wang Yang.Research on dynamic analysis and wireless sensors of PVDF for structural monitoring[D].Dalian:Dalian University of Technology,2010(in Chinese).王杨.结构监测的PVDF动态特性分析和无线传感器研究[D].大连:大连理工大学,2010.
[5] Sun Yu.Structure strain and damage detection using PVDF films[D].Dalian:Dalian University of Technology,2006(in Chinese).孙宇.基于压电薄膜的结构应变与损伤检测研究[D].大连:大连理工大学,2006.
[6] Bai Shi.PVDF’s dynamic strain sensing properties and their applications in structural monitoring[D].Harbin:Harbin Institute of Technology,2006(in Chinese).白石.PVDF动态应变感知特性及其结构监测应用[D].哈尔滨:哈尔滨工业大学,2006.
[7] Meng Renjun.Fabrication of PVDF piezoelectric thin film senor[D].Shanghai:Donghua University,2009(in Chinese).孟仁俊.PVDF压电薄膜传感器的研制[D].上海:东华大学,2009.
[8] Francois A,Man P D,Preumont A.A novel electrode design for piezoelectric film sensor:experimental validation[C].Gheut:6th National Congress on Theoretical and Applied Mechanics,2003.
[9] Ju Dianshu,Zhou Zhi,Ou Jinping.Study on strain sensing of PVDF films[J].Journal of Functional Materials,2004,35(4):451-455(in Chinese).具典淑.PVDF压电薄膜的应变传感特性研究[J].功能材料,2004,35(4):451-455.
[10] Du Yanliang,Song Ying,Sun Baochen.Research on the theory of strain sensing using PVDF film and its strain monitoring system[J].Journal of Shijiazhuang Railway Institute,2006,19(1):1-4(in Chinese).杜彦良,宋颖,孙宝臣.PVDF压电薄膜结构监测传感器应用研究[J].石家庄铁道学院报,2006,19(1):1-4.
[11] Ji Tao,Wan Zhou,Sun Bin.Research on flexible structural vibration parameters monitoring based on PVDF sensors[J].Journal of Yunnan University,2009,31(S2):212-214(in Chinese).纪涛,万舟,孙斌.基于PVDF的柔性结构振动参数监测研究[J].云南大学学报,2009,31(S2):212-214.
[12] Zhao Dongsheng.Theoretical study of PVDF piezoelectric film for designing sensor[J].Physics Examination and Testing,2005,(23):23-25(in Chinese).赵东升.PVDF压电薄膜制作传感器的理论研究[J].物理测试,2005,(23):23-25.
[13] Zhang Qiwei.Conception of long-span bridge health monitoring and monitoring system design[J].Journal of Tongji University,2001,29(1):65-69.张启伟.大型桥梁健康检测概念与监测系统设计[J].同济大学学报,2001,(1)29:65-69.
[14] Xu Kejun,Huang Yunzhi,Lv Xunhong.Power-spectrum-analysis-based signal processing system of vortex flowmeters[J].IEEE Transactions on Instrumentation&Measurement,2006,55(3):1006-1011.
[15] Pan Qi,Wan Zhou,Yi Shilin.Design of three-dimensional force tactile sensor for robot based on PVDF[J].Chinese Journal of sensors and Actuators,2015,28(5):648-653(in Chinese).潘奇,万舟,易士琳.基于PVDF的三维力机器人触觉传感器的设计[J].传感技术学报,2015,28(5):648-653.
[16] Ma Chaozhe,Du Jinsong,Liu Yiyang.Design of micro force sensor based on PVDF[J].Manufacturing Automation,2015,37(4):148-150(in Chinese).马超哲,杜劲松,刘意杨.基于PVDF的微力传感器设计[J].制造业自动化,2015,37(4):148-150.
[17] Zhu Jinhai.Preparation and performance study of PVDF piezoelectric film and sensor[D].Harbin:Harbin Institute of Technology,2011(in Chinese).朱金海,PVDF压电薄膜及其传感器的制备与性能研究[D].哈尔滨:哈尔滨工业大学,2011.
[18] Zong Zhouhong,Ren Xinwei,Ruan Yi.Recent advances in research on damage diagnosis for civil engineering structures[J].China Civil Engineering Journal,2003,36(5):105-110(in Chinese).宗周红,任伟新,阮毅.土木工程结构损伤诊断研究进展[J].土木工程学报,2003,36(5):105-110.
[19] Du Yanliang,Song Ying,Sun Baochen.Research on the theory of strain sensing using PVDF film and its strain monitoring system[J].Journal of Shi Jia Zhuang Railway Institute,2006,19(1):3-5(in Chinese).杜彦良,宋颖,孙宝臣PVDF压电薄膜结构监测传感器应用研究[J].石家庄铁道学院报,2006,19(1):3-5.
[20] Liu Jiansheng,Wang Tongqing,Wang Guixin.PVDF Sensors used for on line measurement of stayed cable tension of Cable-Stayed bridges[J].Journal of Transducer Technology,2002,(12):3-5(in Chinese).刘建胜,汪同庆,王贵新.PVDF传感器实现斜拉桥桥索张力的在线监测[J].传感器技术,2002,(12):3-5.
[21] Yu Shangjiang,Zeng Hui,Ding Shijing.PVDF soil pressure sensor[J].Journal of Transducer Technology,2003,22(9):16-18(in Chinese).余尚江,曾辉,丁世敬.PVDF土压力传感器[J].传感器技术,2003,22(9):16-18.
[22] Nie Yanping.Vibration-based techniques for beam-type structures using non-destructive damage detection[D].Nanchang:Nanchang Aeronautical University,2013(in Chinese).聂彦平.基于PVDF传感器和工作曲率变形实现裂纹梁裂纹检测[D].南昌:南昌航空大学,2013.
[23] Meng Yi,Yi Jianwei.Design and calibration of PVDF stress gauge and its application in the impact test of concrete[J].Journal of Hunan University(Natural Sciences),2009,36(12):1-5(in Chinese).孟一,易建伟.PVDF应力传感器的设计、标定及其在混凝土中冲击实验中的应用[J].湖南大学学报(自然科学版),2009,36(12):1-5.
[24] Hurlebaus S,Stobener U,Gaul L.Vibration reduction of curved panels by active modal control[J].Computers and Structures,2008,86(3-5):251-57.
[25] Sun Yongming,Liu Wu,Zhang Weiping.Design on thermal shear stress sensor based on polyimide substrate[J].Transducer and Microsystem Technologies,2013,32(8):92-94(in Chinese).孙永明,刘武,张卫平,等.基于聚酰亚胺基底的热剪切应力传感器设计[J].传感器与微系统,2013,32(8):92-94.
[26] Shen Y,Xi N,Lai K W C,et al.A novel PVDF microforce rate sensor for practical applications in micromanipulation[J].Sensor Review,2004,24(3):274-283.
[27] Wan Zhou,Ji Tao.Research on metal structural damage crack monitoring based on PVDF sensors[C].Proceeding of 2009 China Intelligent Automation Conference(the Second Volume),2009(in Chinese).万舟,纪涛.基于PVDF的金属结构损伤裂纹监测研究[C].中国智能自动化会议论文集(第二分册),2009.
[2] Mao Qibo.Experimental research on the volume displacement sensor using PVDF array[J].Chinese Journal of Sensors and Actuators,2012,25(8):1054-1058(in Chinese).毛崎波.通过PVDF阵列测量提及位移的实验研究[J].传感技术学报,2012,25(8):1054-1058.
[3] Mao Qibo,Pietrzko S.Design of shaped piezoelectric modal sensors for beam with arbitrary boundary conditions by using a domain decomposition method[J].Journal of Sound and Vibration,2010,32(9):2068-2082.
[4] Wang Yang.Research on dynamic analysis and wireless sensors of PVDF for structural monitoring[D].Dalian:Dalian University of Technology,2010(in Chinese).王杨.结构监测的PVDF动态特性分析和无线传感器研究[D].大连:大连理工大学,2010.
[5] Sun Yu.Structure strain and damage detection using PVDF films[D].Dalian:Dalian University of Technology,2006(in Chinese).孙宇.基于压电薄膜的结构应变与损伤检测研究[D].大连:大连理工大学,2006.
[6] Bai Shi.PVDF’s dynamic strain sensing properties and their applications in structural monitoring[D].Harbin:Harbin Institute of Technology,2006(in Chinese).白石.PVDF动态应变感知特性及其结构监测应用[D].哈尔滨:哈尔滨工业大学,2006.
[7] Meng Renjun.Fabrication of PVDF piezoelectric thin film senor[D].Shanghai:Donghua University,2009(in Chinese).孟仁俊.PVDF压电薄膜传感器的研制[D].上海:东华大学,2009.
[8] Francois A,Man P D,Preumont A.A novel electrode design for piezoelectric film sensor:experimental validation[C].Gheut:6th National Congress on Theoretical and Applied Mechanics,2003.
[9] Ju Dianshu,Zhou Zhi,Ou Jinping.Study on strain sensing of PVDF films[J].Journal of Functional Materials,2004,35(4):451-455(in Chinese).具典淑.PVDF压电薄膜的应变传感特性研究[J].功能材料,2004,35(4):451-455.
[10] Du Yanliang,Song Ying,Sun Baochen.Research on the theory of strain sensing using PVDF film and its strain monitoring system[J].Journal of Shijiazhuang Railway Institute,2006,19(1):1-4(in Chinese).杜彦良,宋颖,孙宝臣.PVDF压电薄膜结构监测传感器应用研究[J].石家庄铁道学院报,2006,19(1):1-4.
[11] Ji Tao,Wan Zhou,Sun Bin.Research on flexible structural vibration parameters monitoring based on PVDF sensors[J].Journal of Yunnan University,2009,31(S2):212-214(in Chinese).纪涛,万舟,孙斌.基于PVDF的柔性结构振动参数监测研究[J].云南大学学报,2009,31(S2):212-214.
[12] Zhao Dongsheng.Theoretical study of PVDF piezoelectric film for designing sensor[J].Physics Examination and Testing,2005,(23):23-25(in Chinese).赵东升.PVDF压电薄膜制作传感器的理论研究[J].物理测试,2005,(23):23-25.
[13] Zhang Qiwei.Conception of long-span bridge health monitoring and monitoring system design[J].Journal of Tongji University,2001,29(1):65-69.张启伟.大型桥梁健康检测概念与监测系统设计[J].同济大学学报,2001,(1)29:65-69.
[14] Xu Kejun,Huang Yunzhi,Lv Xunhong.Power-spectrum-analysis-based signal processing system of vortex flowmeters[J].IEEE Transactions on Instrumentation&Measurement,2006,55(3):1006-1011.
[15] Pan Qi,Wan Zhou,Yi Shilin.Design of three-dimensional force tactile sensor for robot based on PVDF[J].Chinese Journal of sensors and Actuators,2015,28(5):648-653(in Chinese).潘奇,万舟,易士琳.基于PVDF的三维力机器人触觉传感器的设计[J].传感技术学报,2015,28(5):648-653.
[16] Ma Chaozhe,Du Jinsong,Liu Yiyang.Design of micro force sensor based on PVDF[J].Manufacturing Automation,2015,37(4):148-150(in Chinese).马超哲,杜劲松,刘意杨.基于PVDF的微力传感器设计[J].制造业自动化,2015,37(4):148-150.
[17] Zhu Jinhai.Preparation and performance study of PVDF piezoelectric film and sensor[D].Harbin:Harbin Institute of Technology,2011(in Chinese).朱金海,PVDF压电薄膜及其传感器的制备与性能研究[D].哈尔滨:哈尔滨工业大学,2011.
[18] Zong Zhouhong,Ren Xinwei,Ruan Yi.Recent advances in research on damage diagnosis for civil engineering structures[J].China Civil Engineering Journal,2003,36(5):105-110(in Chinese).宗周红,任伟新,阮毅.土木工程结构损伤诊断研究进展[J].土木工程学报,2003,36(5):105-110.
[19] Du Yanliang,Song Ying,Sun Baochen.Research on the theory of strain sensing using PVDF film and its strain monitoring system[J].Journal of Shi Jia Zhuang Railway Institute,2006,19(1):3-5(in Chinese).杜彦良,宋颖,孙宝臣PVDF压电薄膜结构监测传感器应用研究[J].石家庄铁道学院报,2006,19(1):3-5.
[20] Liu Jiansheng,Wang Tongqing,Wang Guixin.PVDF Sensors used for on line measurement of stayed cable tension of Cable-Stayed bridges[J].Journal of Transducer Technology,2002,(12):3-5(in Chinese).刘建胜,汪同庆,王贵新.PVDF传感器实现斜拉桥桥索张力的在线监测[J].传感器技术,2002,(12):3-5.
[21] Yu Shangjiang,Zeng Hui,Ding Shijing.PVDF soil pressure sensor[J].Journal of Transducer Technology,2003,22(9):16-18(in Chinese).余尚江,曾辉,丁世敬.PVDF土压力传感器[J].传感器技术,2003,22(9):16-18.
[22] Nie Yanping.Vibration-based techniques for beam-type structures using non-destructive damage detection[D].Nanchang:Nanchang Aeronautical University,2013(in Chinese).聂彦平.基于PVDF传感器和工作曲率变形实现裂纹梁裂纹检测[D].南昌:南昌航空大学,2013.
[23] Meng Yi,Yi Jianwei.Design and calibration of PVDF stress gauge and its application in the impact test of concrete[J].Journal of Hunan University(Natural Sciences),2009,36(12):1-5(in Chinese).孟一,易建伟.PVDF应力传感器的设计、标定及其在混凝土中冲击实验中的应用[J].湖南大学学报(自然科学版),2009,36(12):1-5.
[24] Hurlebaus S,Stobener U,Gaul L.Vibration reduction of curved panels by active modal control[J].Computers and Structures,2008,86(3-5):251-57.
[25] Sun Yongming,Liu Wu,Zhang Weiping.Design on thermal shear stress sensor based on polyimide substrate[J].Transducer and Microsystem Technologies,2013,32(8):92-94(in Chinese).孙永明,刘武,张卫平,等.基于聚酰亚胺基底的热剪切应力传感器设计[J].传感器与微系统,2013,32(8):92-94.
[26] Shen Y,Xi N,Lai K W C,et al.A novel PVDF microforce rate sensor for practical applications in micromanipulation[J].Sensor Review,2004,24(3):274-283.
[27] Wan Zhou,Ji Tao.Research on metal structural damage crack monitoring based on PVDF sensors[C].Proceeding of 2009 China Intelligent Automation Conference(the Second Volume),2009(in Chinese).万舟,纪涛.基于PVDF的金属结构损伤裂纹监测研究[C].中国智能自动化会议论文集(第二分册),2009.