摘要
本文研究了高压二氧化碳电镀钴薄膜颗粒形貌的影响。实验高压二氧化碳分别为液态((15 MPa,25℃),亚临界态((15 MPa,30℃),超临界态((15 MPa,40℃)。高压二氧化碳电镀在高压釜中进行电镀,电镀液使用20%体积分数的高压二氧化碳和80%体积分数的钴电镀液。本文同时研究了温度和电流密度的影响。钴薄膜颗粒形貌随着温度的下降和电流密度的上升由片状转变为棱锥状以及半球状结构。
High pressure CO_2 was applied in electrodeposition of Co films to examine its effects on the particles morphology. The high pressure CO_2 is referring to CO_2 in liquid state(15 MPa and 25 ℃), subcritical state(15 MPa and 30 ℃), and supercritical state(15 MPa and 40 ℃) here. The electrodeposition with high pressure CO_2 was conducted in a high-pressure cell, and the electrolyte was a mixture composed of 20 vol.% of the high pressure CO_2 and 80 vol.% of the Co electrolyte. Influences of the temperature and applied current density were also studied. Particles morphology of the Co films changed from ridge-like to pyramid-like and hemi-spherical-like structures with a decrease in the temperature and an increase in the applied current density.
引文
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