磁控溅射制备V_2O_5薄膜及全固态薄膜锂电池研究
|
摘要
V_2O_5具有容量高、循环稳定、易于制备成薄膜等特点,是全固态薄膜锂电池理想的正极材料。采用磁控溅射法,以V_2O_5为靶材制备了薄膜,研究了溅射气体Ar/O_2对薄膜结构、形貌及电化学性能的影响,优化了薄膜制备工艺。最终采用磁控溅射法依次沉积集流体薄膜、钒氧化物薄膜、固态电解质薄膜,真空热蒸发金属锂薄膜,成功制备了Al/V_2O_5/Li P ON/Li/Cu全固态薄膜锂电池。薄膜电池在1.7～3.4 V电压范围内,以10μA/cm~2恒电流充放电测试,电池比容量达到25μAh/cm~2,稳定循环超过500次。
V_2O_5 is an ideal cathode material for all solid state thin film lithium battery, which has the characteristics of high capacity, stable circulation and easy to prepare into thin film. The films were prepared by RF magnetron sputtering with V_2O_5 target. The effect of sputtering gas Ar/O_2 on the structure, morphology and electrochemical performance of the films was studied, and the preparation process of the films was optimized. Finally, the Al/V_2O_5/LiPON/Li/Cu solid state thin film lithium battery was successfully prepared by magnetron sputtering followed by deposition of collector films, V_2O_5 thin film, solid state electrolyte thin film and vacuum thermal evaporation of lithium metal thin film. The battery was tested in the range of 1.7～3.4 V voltage, with 10 μA/cm~2 constant current. The specific capacity of the battery reached 25 μA/cm~2, and the stable cycle numbers were more than 500 times.
V_2O_5 is an ideal cathode material for all solid state thin film lithium battery, which has the characteristics of high capacity, stable circulation and easy to prepare into thin film. The films were prepared by RF magnetron sputtering with V_2O_5 target. The effect of sputtering gas Ar/O_2 on the structure, morphology and electrochemical performance of the films was studied, and the preparation process of the films was optimized. Finally, the Al/V_2O_5/LiPON/Li/Cu solid state thin film lithium battery was successfully prepared by magnetron sputtering followed by deposition of collector films, V_2O_5 thin film, solid state electrolyte thin film and vacuum thermal evaporation of lithium metal thin film. The battery was tested in the range of 1.7～3.4 V voltage, with 10 μA/cm~2 constant current. The specific capacity of the battery reached 25 μA/cm~2, and the stable cycle numbers were more than 500 times.
引文
[1] NAVONE C, TINTIGNAC S, PEREIRA-RAMOS J P, et al. Electrochemical behaviour of sputtered C-V2O5and LiCoO2thin films for solid state lithium microbatteries[J]. Solid State Ionics, 2011, 192:343-346.
[2] KOO M, PARK K, LEE S, et al. Bendable inorganic thin-film battery for fully flexible electronic systems[J]. Nano Lett, 2012, 12:4810-4816.
[3] QUINZENI I, FERRARI S, QUARTARONE E, et al. Structural,morphological and electrochemical properties of nanocrystalline V2O5thin films deposited by means of radiofrequency magnetron sputtering[J].Journal of Power Sources, 2011, 196:10228-10233.
[4]刘文元,傅正文,秦启宗.以LiCoO2为阴极的全固态薄膜锂电池的研究[J].化学物理学报,2005,18(6):1043-1047.
[5]赵胜利,文九巴,祝要民,等.全固态薄膜锂电池0.3Ag-V2O5/LiPON/Li的制备及电化学性能[J].功能材料,2008,39(1):91-94.
[6] GIES A, PECQUENARD B, BENAYAD A, et al. Effect of silver co-sputtering on V2O5thin films for lithium microbatteries[J].Thin Solid Films, 2008, 516:7271-7281.
[7] OUKASSI S, SALOT R, PEREIRA-RAMOS J P. Elaboration and characterization of crystalline RF-deposited V2O5positive electrode for thin film batteries[J].Applied Surface Science,2009,256:149-155.
[8] YU D M, ZHANG S T, LIU D W, et al. Effect of manganese doping on Li-ion intercalation properties of V2O5films[J].J Mater Chem,2010, 20:10841-10846.
[9]?STRENG E, GANDRUD K B, HU Y, et al. High power nanostructured V2O5thin film cathodes by atomic layer deposition[J]. J Mater Chem A, 2014, 2:15044.
[2] KOO M, PARK K, LEE S, et al. Bendable inorganic thin-film battery for fully flexible electronic systems[J]. Nano Lett, 2012, 12:4810-4816.
[3] QUINZENI I, FERRARI S, QUARTARONE E, et al. Structural,morphological and electrochemical properties of nanocrystalline V2O5thin films deposited by means of radiofrequency magnetron sputtering[J].Journal of Power Sources, 2011, 196:10228-10233.
[4]刘文元,傅正文,秦启宗.以LiCoO2为阴极的全固态薄膜锂电池的研究[J].化学物理学报,2005,18(6):1043-1047.
[5]赵胜利,文九巴,祝要民,等.全固态薄膜锂电池0.3Ag-V2O5/LiPON/Li的制备及电化学性能[J].功能材料,2008,39(1):91-94.
[6] GIES A, PECQUENARD B, BENAYAD A, et al. Effect of silver co-sputtering on V2O5thin films for lithium microbatteries[J].Thin Solid Films, 2008, 516:7271-7281.
[7] OUKASSI S, SALOT R, PEREIRA-RAMOS J P. Elaboration and characterization of crystalline RF-deposited V2O5positive electrode for thin film batteries[J].Applied Surface Science,2009,256:149-155.
[8] YU D M, ZHANG S T, LIU D W, et al. Effect of manganese doping on Li-ion intercalation properties of V2O5films[J].J Mater Chem,2010, 20:10841-10846.
[9]?STRENG E, GANDRUD K B, HU Y, et al. High power nanostructured V2O5thin film cathodes by atomic layer deposition[J]. J Mater Chem A, 2014, 2:15044.