新型成膜技术机械成膜法的研发及其应用
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摘要
机械成膜法(MCT)作为一种新型的成膜工艺,是基于球磨机运行过程中基材与粉末颗粒之间的摩擦与冲击而开发的,它具有简便、低成本且高效等特征。通过MCT法,在基材(氧化铝球、不锈钢球等)上能制备出多种金属薄膜,如Ti膜、Cu膜、Ni膜、Fe膜、Zn膜。本文从物理、化学、机械和工艺因素4个方面研究了成膜过程及其影响因素,将成膜过程概括为黏附成核、离散岛状的形成和连接、连续薄膜的形成和增厚、薄膜的剥落4个阶段。在此基础上,开发出两步MCT法,在氧化铝球上直接制备金属与氧化物复合膜。在MCT法成膜技术的应用方面,本文重点探讨了多种光催化薄膜材料的制备方法,并对今后的研究方向进行了展望。
Mechanical coating technique( MCT) as a novel coating formation process was proposed and developed based on mechanical frictional wear and impacts among alumina balls,columns,disks and metal powder particles in the bowl of a planetary ball mill or pot mill. MCT is a simple,low cost and useful coating formation process. Metal coating of Ti,Cu,Ni,Fe and Zn on alumina balls were prepared by MCT. The influence effects of the coating formation were investigated from four views of physical,chemical,mechanical and process factors. The formation process of the metal coatings in MCT includes four stages: nucleation by adhesion,formation and coalescence of discrete islands,formation and thickening of continuous coatings,exfoliation of continuous coatings. Further,2-stap MCT was developed based on MCT concept for preparing composite coatings on alumina balls. Based on MCT,the fabrications of photocatalyst coatings were summarized,and an outlook to the research direction was discussed.
Mechanical coating technique( MCT) as a novel coating formation process was proposed and developed based on mechanical frictional wear and impacts among alumina balls,columns,disks and metal powder particles in the bowl of a planetary ball mill or pot mill. MCT is a simple,low cost and useful coating formation process. Metal coating of Ti,Cu,Ni,Fe and Zn on alumina balls were prepared by MCT. The influence effects of the coating formation were investigated from four views of physical,chemical,mechanical and process factors. The formation process of the metal coatings in MCT includes four stages: nucleation by adhesion,formation and coalescence of discrete islands,formation and thickening of continuous coatings,exfoliation of continuous coatings. Further,2-stap MCT was developed based on MCT concept for preparing composite coatings on alumina balls. Based on MCT,the fabrications of photocatalyst coatings were summarized,and an outlook to the research direction was discussed.
引文
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[24]DOZZI M V,SELLI E.Doping Ti O2with p-block elements:Effects on photocatalytic activity[J].Journal of Photochemistry Photobiology C:Photochemistry Reviews 2013,14:13-28.
[25]KUMAR S G,DEVI L G.Review on modified Ti O2photocatalysis under UV/visible light:Selected results and related mechanisms on interfacial charge carrier transfer dynamics[J].The Journal of Physical Chemistry A 2011,115:13211-13241.
[26]NAKATA K,FUJISHIMA A.Ti O2photocatalysis:Design and applications.Journal of Photochemistry Photobiology C:Photochemistry Reviews 2012,13:169-189.
[27]LIU M,QIU X,HASHIMOTO K,et al.Cu(II)oxide amorphous nanoclusters grafted Ti3+self-doped Ti O2:An efficient visible light photocatalyst.Journal Materials Chemistry A 2014,2:13571-13579.
[28]KAKIUCHI K,HOSONO E,IMAI H,et al.{111}-faceting of low-temperature processed rutile Ti O2rods[J].Journal of Crystal Growth,2006,293:541-545.
[29]YAN M,CHEN F,ZHANG J,et al.Preparation of controllable crystalline titania and study on the photocatalytic properties[J].The Journal of Physical Chemistry B,2005,109:8673-8678.
[30]LIU X,ZHANG H,LIU C,et al.UV and visible light photoelectrocatalytic bactericidal performance of 100%{111}-faceted rutile Ti O2photoanode[J].Catalysis Today.2014,224:77-82.
[31]LIU B,AYDIL E.Growth of oriented single-crystalline rutile Ti O2nanorods on transparent conducting substrates for dye-sensitized solar cells[J].The Journal of American Chemical Society,2009,131:3985-3990.
[32]ZHANG X,LEI L.One step preparation of visible-light responsive Fe-Ti O2coating photocatalysts by MOCVD.Materials Letters,2008,62:895-897.
[33]GOROKHOVSKY A V,ESCALANTE-GARCIA J I,SANCHEZ-MONJARAS T,et al.Synthesis of potassium polytitanate precursors by treatment of Ti O2with molten mixtures of KNO3and KOH[J].Journal of European Ceramic Society,2004,24:3541-3546.
[34]MASAKI N,UCHIDA S,YAMANE H,et al.Hydrothermal synthesis of potassium titanates in Ti-KOH-H2O system[J].Journal of Materials Science,2000,35:3307-3311.
[35]MASAKI N,UCHIDA S,YAMANE H,et al.Hydrothermal synthesis of potassium titanates in Ti-KOH-H2O system[J].Journal of Materials Science,2000,35:3307-3311.
[2]FREUND L B,SURESH S.Thin film materials-stress,defect formation and surface evolution[M].Cambridge:Cambridge University Press,2004.
[3]LU Y,GUAN S,HAO L,et al.Review on the photocatalyst coatings of Ti O2:Fabrication by mechanical coating technique and its application[J].Coatings,2015,5:425-464.
[4]MATTOX D M.Handbook of physical vapor deposition(PVD)processing[M].Burlington:William Andrew,2010.
[5]PIERSON H O.Handbook of chemical vapor deposition-principles,technology and application[M].New York:William Andrew Publishing,1999.
[6]WASA K,KITABATAKE M,ADACHI H.Thin film materials technology:sputtering of compound materials[M].New York:William Andrew Publishing,2003.
[7]LU Y,HIROHASHI M,ZHANG S.Fabrication of oxide film by mechanical coating technique[R].International Conference on Surfaces,Coatings and Nanostructured Materials,Aveiro,PORTUGAL,2005,FP117.
[8]YOSHIDA H,LU Y,HIROHASHI M.Fabrication of metallic titanium film by mechanical coating technique[R].In Proceedings of the5th International Forum on Advanced Material Science and Technology,Zhangjiajie,China,2006.
[9]HAO L,LU Y,SATO H,et al.Fabrication of Sn coatings on alumina balls by mechanical coating technique and relevant process analysis[J].Advanced in Materials Physics and Chemistry,2012,2(4B):126-129.
[10]HAO L,LU Y,SATO H,et al.Fabrication of Ni coatings by mechanical coating technique[J].Journal of Engineering and Technology,2012,1(1):131-134.
[11]HAO L,LU Y,SATO H,et al.Influence of metal properties on the formation and evolution of metal coatings during mechanical coating[J].Metallurgical and Materials Transactions A,2013,44(6):2717-2724.
[12]HAO L,LU Y,SATO H,et al.Fabrication of zinc coatings on alumina balls from zinc powder by mechanical coating technique and the process analysis[J].Powder Technology,2012,228:377-384.
[13]YOSHIDA H,LU Y,NAKAYAMA H,et al.Fabrication of Ti O2film by mechanical coating technique and its photocatalytic activity[J].Journal of Alloys and Compounds,2009,475(1-2):383-386.
[14]LU Y,KOBAYASHI K,GUAN S,et al.Influence of oxidation process on photocatalytic activity of photocatalyst coatings by mechanical coating technique[J].Materials Science in Semiconductor Processing,2015,30:128-134.
[15]GUAN S,HAO L,YOSHIDA H,et al.Fabrication and characterization of photocatalyst composite coatings of Ti O2/Ti C-Ti using Ti and Ti C powders[J].Surface and Coatings Technology,2016,307:627-632.
[16]GUAN S,HAO L,YOSHIDA H,et al.Enhanced photocatalytic activity of photocatalyst coatings by heat treatment in carbon atmosphere[J].Materials Letters,2016,167:43-46.
[17]HAO L,GUAN S,TAKAYA S,et al.Preparation of visiblelight-responsive Ti O2coatings using molten KNO3treatment and their photocatalytic activity[J].Applied Surface Science,2017,407:276-281.
[18]GUAN S,HAO L,YOSHIDA H,et al.Black composites photocatalyst coatings of K2Ti6O13-Ti O2/Ti C with nanosheet flower-like structure by heat treatment in molten salt[J].Materials Letters,2017,188:55-58.
[19]HAO L,GUAN S,LU Y,et al.Surface topography evolution of Ti O2/Sn O2coatings during thermal oxidation of Ti/Sn composite coatings[J].Surface and Coatings Technology,2016,291:325-333.
[20]JOHN A D.Lange’s handbook of chemistry,14th ed.[M],New York:Mc Graw-Hill:1999.
[21]ALLEN L C.Electronegativity is the average one-electron energy of the valence-shell electrons in ground-state free atoms[J].Journal of the American Chemical Society,1989,111:9003-9014.
[22]HAO L,LU Y,SATO H,et al.Analysis on energy transfer during mechanical coating and ball milling-supported by electric power measurement in planetary ball mill[J].Interinational Journal of Mineral Processing,2013,121:51-58.
[23]HAO L,LU Y,ASANUMA H,et al.The influence of the processing parameters on the formation of iron thin films on alumina balls by mechanical coating technique[J].Journal of Materials Processing Technology,2012,212:1169-1176.
[24]DOZZI M V,SELLI E.Doping Ti O2with p-block elements:Effects on photocatalytic activity[J].Journal of Photochemistry Photobiology C:Photochemistry Reviews 2013,14:13-28.
[25]KUMAR S G,DEVI L G.Review on modified Ti O2photocatalysis under UV/visible light:Selected results and related mechanisms on interfacial charge carrier transfer dynamics[J].The Journal of Physical Chemistry A 2011,115:13211-13241.
[26]NAKATA K,FUJISHIMA A.Ti O2photocatalysis:Design and applications.Journal of Photochemistry Photobiology C:Photochemistry Reviews 2012,13:169-189.
[27]LIU M,QIU X,HASHIMOTO K,et al.Cu(II)oxide amorphous nanoclusters grafted Ti3+self-doped Ti O2:An efficient visible light photocatalyst.Journal Materials Chemistry A 2014,2:13571-13579.
[28]KAKIUCHI K,HOSONO E,IMAI H,et al.{111}-faceting of low-temperature processed rutile Ti O2rods[J].Journal of Crystal Growth,2006,293:541-545.
[29]YAN M,CHEN F,ZHANG J,et al.Preparation of controllable crystalline titania and study on the photocatalytic properties[J].The Journal of Physical Chemistry B,2005,109:8673-8678.
[30]LIU X,ZHANG H,LIU C,et al.UV and visible light photoelectrocatalytic bactericidal performance of 100%{111}-faceted rutile Ti O2photoanode[J].Catalysis Today.2014,224:77-82.
[31]LIU B,AYDIL E.Growth of oriented single-crystalline rutile Ti O2nanorods on transparent conducting substrates for dye-sensitized solar cells[J].The Journal of American Chemical Society,2009,131:3985-3990.
[32]ZHANG X,LEI L.One step preparation of visible-light responsive Fe-Ti O2coating photocatalysts by MOCVD.Materials Letters,2008,62:895-897.
[33]GOROKHOVSKY A V,ESCALANTE-GARCIA J I,SANCHEZ-MONJARAS T,et al.Synthesis of potassium polytitanate precursors by treatment of Ti O2with molten mixtures of KNO3and KOH[J].Journal of European Ceramic Society,2004,24:3541-3546.
[34]MASAKI N,UCHIDA S,YAMANE H,et al.Hydrothermal synthesis of potassium titanates in Ti-KOH-H2O system[J].Journal of Materials Science,2000,35:3307-3311.
[35]MASAKI N,UCHIDA S,YAMANE H,et al.Hydrothermal synthesis of potassium titanates in Ti-KOH-H2O system[J].Journal of Materials Science,2000,35:3307-3311.