飞秒激光烧蚀石英微孔的时间分辨阴影成像
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摘要
建立了基于飞秒激光抽运-探测原理的时间分辨阴影成像平台,直接获取了飞秒激光烧蚀石英微孔的超快过程图像。在不同能量密度、时间延迟、脉冲数量条件下,观察到随时间延迟变化的等离子体通道衰退、冲击波膨胀和微孔伸长现象。实验结果表明,所提系统有助于飞秒激光烧蚀诱导透明介质内部微纳结构的原位观察。
A time-resolved shadowgraphic imaging system based on femtosecond laser pump and probe is established for directly imaging the ultrafast process of femtosecond laser ablating of micro-holes in silica glass. The time-delay dependent phenomena of plasma channel decay, shock wave expansion, and micro-hole stretch are observed when the energy density, time-delay, and pulse number change. The experimental results show that the proposed system is very efficient for the in situ observation of the micro-nanostructures in transparent media induced by femtosecond laser ablation.
A time-resolved shadowgraphic imaging system based on femtosecond laser pump and probe is established for directly imaging the ultrafast process of femtosecond laser ablating of micro-holes in silica glass. The time-delay dependent phenomena of plasma channel decay, shock wave expansion, and micro-hole stretch are observed when the energy density, time-delay, and pulse number change. The experimental results show that the proposed system is very efficient for the in situ observation of the micro-nanostructures in transparent media induced by femtosecond laser ablation.
引文
[1] Muck A,Wang J,Jacobs M,et al.Fabrication of poly (methyl methacrylate) microfluidic chips by atmospheric molding[J].Analytical Chemistry,2004,76(8):2290-2297.
[2] Shen X F,Chen T,Wu J X.Fabrication of microfluidic chip with two-step using excimer laser ablation micromachining technique and replica molding technology[J].Chinese Journal of Lasers,2011,38(9):0903004.申雪飞,陈涛,吴靖轩.准分子激光微加工技术结合模塑技术加工微流控芯片[J].中国激光,2011,38(9):0903004.
[3] Davis K M,Miura K,Sugimoto N,et al.Writing waveguides in glass with a femtosecond laser[J].Optics Letters,1996,21(21):1729-1731.
[4] Kawata S,Sun H B,Tanaka T,et al.Finer features for functional microdevices[J].Nature,2001,412(6848):697-698.
[5] Yang Q B,Deng B,Wang Y T,et al.Superhydrophobic surface of aluminium base induced by femtosecond laser[J].Laser & Optoelectronics Progress,2017,54(10):101408.杨奇彪,邓波,汪于涛,等.飞秒激光诱导铝基的超疏水表面[J].激光与光电子学进展,2017,54(10):101408.
[6] Li C,Cheng G H,Stoian R.Investigation of femtosecond laser-induced periodic surface structure on tungsten [J].Acta Optica Sinica,2016,36(5):0532001.李晨,程光华,Stoian Razvan.飞秒激光诱导金属钨表面周期性自组织结构的研究[J].光学学报,2016,36(5):0532001.
[7] Gattass R R,Mazur E,Femtosecond laser micromachining in transparent materials[J].Nature Photoincs,2008,2(4):219-225.
[8] Miura K,Qiu J R,Inouye H,et al.Photowritten optical waveguides in various glasses with ultrashort pulse laser[J].Applied Physics Letters,1998,71(23):3329-3331.
[9] Kanehira S,Si J H,Qiu J R,et al.Periodic nanovoid structures via femtosecond laser irradiation[J].Nano Letters,2005,5(8):1591-1595.
[10] Li Y,Qu S L,Water-assisted femtosecond laser ablation for fabricating three-dimensional microfluidic chips[J].Current Applied Physics,2013,13(7):1292-1295.
[11] Li Y N,Chen T,Pan A,et al.Fabrication of high-aspect-ratio allsilicon grooves using femtosecond laser irradiation and wet etching[J].Chinese Journal of Lasers,2015,42(1):0103007.李艳娜,陈涛,潘安,等.利用飞秒激光辐照结合湿法腐蚀方法制备高纵横比全硅槽的研究[J].中国激光,2015,42(1):0103007.
[12] Zhang N,Zhu X N,Yang J J,et al.Time-resolved shadowgraphs of materials ejection in intense femtosecond laser ablation of aluminum[J].Physical Review Letters,2007,99(16):167602.
[13] Pan C J,Jiang L,Wang Q S,et al.Temporal-spatial measurement of electron relaxation time in femtosecond laser induced plasma using two-color pump-probe imaging technique[J].Applied Physics Letters,2018,112(19):191101.
[14] Zhou G F,Hu H D,Niu X D,et al.Investigation on etching parameter of fused silica based on femtosecond laser[J].Applied Laser,2012,32(1):45-48.
[15] Sedov L I.Similarity and dimensional methods in mechanics[M].Boca Raton:CRC Press,1993.
[16] Zhang H,Zhang F T,Du X,et al.Influence of laser induced air breakdown on femtosecond laser ablation of aluminum[J].Optics Express,2015,23(2):1370-1376.
[2] Shen X F,Chen T,Wu J X.Fabrication of microfluidic chip with two-step using excimer laser ablation micromachining technique and replica molding technology[J].Chinese Journal of Lasers,2011,38(9):0903004.申雪飞,陈涛,吴靖轩.准分子激光微加工技术结合模塑技术加工微流控芯片[J].中国激光,2011,38(9):0903004.
[3] Davis K M,Miura K,Sugimoto N,et al.Writing waveguides in glass with a femtosecond laser[J].Optics Letters,1996,21(21):1729-1731.
[4] Kawata S,Sun H B,Tanaka T,et al.Finer features for functional microdevices[J].Nature,2001,412(6848):697-698.
[5] Yang Q B,Deng B,Wang Y T,et al.Superhydrophobic surface of aluminium base induced by femtosecond laser[J].Laser & Optoelectronics Progress,2017,54(10):101408.杨奇彪,邓波,汪于涛,等.飞秒激光诱导铝基的超疏水表面[J].激光与光电子学进展,2017,54(10):101408.
[6] Li C,Cheng G H,Stoian R.Investigation of femtosecond laser-induced periodic surface structure on tungsten [J].Acta Optica Sinica,2016,36(5):0532001.李晨,程光华,Stoian Razvan.飞秒激光诱导金属钨表面周期性自组织结构的研究[J].光学学报,2016,36(5):0532001.
[7] Gattass R R,Mazur E,Femtosecond laser micromachining in transparent materials[J].Nature Photoincs,2008,2(4):219-225.
[8] Miura K,Qiu J R,Inouye H,et al.Photowritten optical waveguides in various glasses with ultrashort pulse laser[J].Applied Physics Letters,1998,71(23):3329-3331.
[9] Kanehira S,Si J H,Qiu J R,et al.Periodic nanovoid structures via femtosecond laser irradiation[J].Nano Letters,2005,5(8):1591-1595.
[10] Li Y,Qu S L,Water-assisted femtosecond laser ablation for fabricating three-dimensional microfluidic chips[J].Current Applied Physics,2013,13(7):1292-1295.
[11] Li Y N,Chen T,Pan A,et al.Fabrication of high-aspect-ratio allsilicon grooves using femtosecond laser irradiation and wet etching[J].Chinese Journal of Lasers,2015,42(1):0103007.李艳娜,陈涛,潘安,等.利用飞秒激光辐照结合湿法腐蚀方法制备高纵横比全硅槽的研究[J].中国激光,2015,42(1):0103007.
[12] Zhang N,Zhu X N,Yang J J,et al.Time-resolved shadowgraphs of materials ejection in intense femtosecond laser ablation of aluminum[J].Physical Review Letters,2007,99(16):167602.
[13] Pan C J,Jiang L,Wang Q S,et al.Temporal-spatial measurement of electron relaxation time in femtosecond laser induced plasma using two-color pump-probe imaging technique[J].Applied Physics Letters,2018,112(19):191101.
[14] Zhou G F,Hu H D,Niu X D,et al.Investigation on etching parameter of fused silica based on femtosecond laser[J].Applied Laser,2012,32(1):45-48.
[15] Sedov L I.Similarity and dimensional methods in mechanics[M].Boca Raton:CRC Press,1993.
[16] Zhang H,Zhang F T,Du X,et al.Influence of laser induced air breakdown on femtosecond laser ablation of aluminum[J].Optics Express,2015,23(2):1370-1376.