高面形精度标准镜自重变形的补偿技术
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摘要
为了提高光学检测精度,完善标准镜装配工艺,针对采用胶粘法装配的镜片提出了两种补偿镜片自重变形的方法,即通过改变胶层位置补偿镜片自重变形的方法和通过施加作用力改变镜框形变量补偿镜片自重变形的方法。通过理论计算、建模仿真与光学检测的手段验证不同工况下自重变形对于面形精度的影响。给出了镜片面形与胶层位置、作用力的对应关系,镜片经过补偿可以达到很高的面形精度,明显优于普通胶粘法,实验对象在补偿前的面形精度为4.511nm,补偿后面形精度达到2.134nm,保证了标准镜的高面形精度。
In order to improve the optical detection accuracy, to perfect the standard mirror assembly process, two methods for compensating the lens gravity deformation were put forward in view of the fixed lens with adhesive method. One of them was by changing the adhesive location,the other was by changing the shape variable of frame. The effects of gravity deformation on surface shape accuracy were verified with the theoretical calculation,simulation and optical detection methods. The relationships between the surface shape and the adhesive location,and between the surface shape and the force were put out. The surface shape could achieve a high precision through the combination of the two methods,it is better than the older adhesive methods. The surface shape accuracy is 4.511 nm in front of the compensation,and it is 2.134 nm behind the compensation. The high standard of mirror surface shape accuracy is guaranteed.
In order to improve the optical detection accuracy, to perfect the standard mirror assembly process, two methods for compensating the lens gravity deformation were put forward in view of the fixed lens with adhesive method. One of them was by changing the adhesive location,the other was by changing the shape variable of frame. The effects of gravity deformation on surface shape accuracy were verified with the theoretical calculation,simulation and optical detection methods. The relationships between the surface shape and the adhesive location,and between the surface shape and the force were put out. The surface shape could achieve a high precision through the combination of the two methods,it is better than the older adhesive methods. The surface shape accuracy is 4.511 nm in front of the compensation,and it is 2.134 nm behind the compensation. The high standard of mirror surface shape accuracy is guaranteed.
引文
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[2]薛栋林.大口径标准球面镜组研制与应用[J].中国激光,2014,41(6):0616001.1-0616001.6.
[3]白雪,安志勇,石利霞.光学瞄准镜相对畸变测试技术研究[J].长春理工大学学报:自然科学版,2011,34(1):46-48.
[4]刘冬梅,郑爽,付秀华,等.高精度小口径非球面加工工艺研究[J].长春理工大学学报:自然科学版,2013,36(Z1):24-27.
[5]吴清文,卢锷,王家骐,等.自重作用下中心支撑主反射镜面形变化研究[J].光学精密工程,1996,4(4):23-28.
[6]张德江,刘立人,徐荣伟,等.透镜自重变形引起波像差的有限元分析[J].光学学报,2005,25(4):538-541.
[7]Yoder P R.Opto-mechanical systems design[M].Boca Raton:The Chemical Rubber Company Press,2006:460-461.
[8]Cho M K,Price R S,Moon I K.Optimization of the ATST primarymirror support system[C].SPIE,2006,6273:63731E.
[9]Michels G J,Genberg V L.Finite element modeling of nearly incompressible bonds[J].Proc of SPIE,2002,4771:287-295.
[10]李福,阮萍,赵葆厂等.胶固紧平面反射镜的有限元分析[J].光学技术,2006,32(6):896-899.
[11]程刚,蒋世磊,陈华强.环氧树脂胶在光学部件粘接上的应用[J].中国胶粘剂,2004,13(4):1-4.
[12]武旭华,陈磊,王磊.Φ300mm干涉仪参考镜的设计及测试[J].光学精密工程,2007,15(8):1235-1240.
[13]谭凡教,乔彦峰,李耀斌,等.光电经纬仪主镜系统自重变形的有限元分析[J].光学仪器,2007,29(6):65-68.
[14]雷江,蒋世磊,程刚.高精度光刻物镜的变形研究[J].光电工程,2005,32(2):12-14.
[15]李福,阮萍,赵葆常.重力作用下平面反射镜变形研究[J].光子学报,2005,34(2):272-275.
[16]武东城,高松涛,吴志会,等.高精度光学平板在三点支撑下自重变形的研究[J].光学学报,2015,35(12):1212001.1-1212001.9.