基于四分之一波片的菲佐型同步移相干涉测量方法
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摘要
为了实现干涉测量平面的抗振,提出了一种同步移相干涉测量方案并搭建了实验装置。整个测量系统在菲佐移相干涉仪的基础上,利用四分之一波片作为参考镜,获得一对正交偏振光,经过棋盘相位光栅分光,利用光阑选取对于理想光栅衍射效率一致的(±1,±1)级衍射光作为测量分光路,使之先后通过相位延迟阵列和偏振片获得4幅移相量依次为π/2的干涉图。按照传统的4步移相算法,对被测波面进行了复原。分析了光强畸变和移相误差对系统测量误差的影响。与泰曼型同步移相干涉测量相比,该方案可以简化系统结构,减小系统误差,并且更易装校,更适合用于平面的测量。
For the purpose of anti-vibration for interference measurement of flat surface,a method of simultaneous phase shifting interferometry is proposed in this paper,and the experimental device is set up.Based on Fizeau phase-shifting interferometer and using quarter-wave plate as reference mirror,the whole measurement system acquires a pair of orthogonal polarized light.By using beam splitting of the chessboard phase grating,diffracted beams of(± 1,± 1) orders are selected by the aperture for the same ideal grating diffracting efficiency as measured beams.The four diffracted beams pass through a phase delay array and a polarizing plate to obtain four interference patterns with phase-shifting of π/2 respectively.According to the traditional four step phase shifting algorithm,the measured wave front is restored.The influence of light intensity distortion and phase shift error on the system measuring error is analyzed.It can simplify the structure of the system,reduce the system error,make installation the easier and the measurement more suitable for the plane,by comparing to the Twyman simultaneous phase shifting interferometry.
For the purpose of anti-vibration for interference measurement of flat surface,a method of simultaneous phase shifting interferometry is proposed in this paper,and the experimental device is set up.Based on Fizeau phase-shifting interferometer and using quarter-wave plate as reference mirror,the whole measurement system acquires a pair of orthogonal polarized light.By using beam splitting of the chessboard phase grating,diffracted beams of(± 1,± 1) orders are selected by the aperture for the same ideal grating diffracting efficiency as measured beams.The four diffracted beams pass through a phase delay array and a polarizing plate to obtain four interference patterns with phase-shifting of π/2 respectively.According to the traditional four step phase shifting algorithm,the measured wave front is restored.The influence of light intensity distortion and phase shift error on the system measuring error is analyzed.It can simplify the structure of the system,reduce the system error,make installation the easier and the measurement more suitable for the plane,by comparing to the Twyman simultaneous phase shifting interferometry.
引文
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2 钱克矛,缪泓,伍小平.利用干涉云纹偏振相移技术进行动态变形实时测量的方法研究[C].第九届全国力学学术会议,2000.
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5 Yoneyama S,Kikutaa H,Moriwaki K.Simultaneous observation of phase-stepped photoelastic fringes using a pixilated microretarder array[J].Opt Eng,2006,45(8):083604.
6 Zuo Fen,Chen Lei,Xu Chunsheng.Simultaneous phase-shifting interferometry based on two-dimension grating[J].Acta Optica Sinica,2007,27(4):663-667.左芬,陈磊,徐春生.基于二维光栅分光的同步移相干涉测量技术[J].光学学报,2007,27(4):663-667.
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8 Xu Chen.Study of dynamic interferometry technology and application[D].Nanjing:Nanjing University of Science and Technology,2009.徐晨.动态干涉测试的理论与技术研究[D].南京:南京理工大学,2009.
9 曾爱军,郭小娴,江晓军,等.同步移相菲索干涉仪:CN101324421[P].2008-12-17.
10 Millerd J E,Wyant J C.Simultaneous phase-shifting Fizeau interferometer:US7230718B2[P].2007-06-12.
11 Kimbrough B,Millerd J,Wyant J,et al.Low-coherence vibration insensitive Fizeau interferometer[C].SPIE,2006,6292:62920F.
12 Yatagai T,Jackin B J,Ono A,et al.Instantaneous phase-shifting Fizeau interferometry with high-speed pixelated phasemask camera[C].SPIE,2015,9660:966018.
13 Zuo Fen,Chen Lei.Errors researching for a simultaneous phase shifting interferometer[J].Optical Technique,2009,35(4):536-540.左芬,陈磊.一种同步移相干涉测量系统的误差研究[J].光学技术,2009,35(4):536-540.
14 Zheng Donghui,Chen Lei,Li Jinpeng,et al.Position registration for interferograms and phase-shifting error calibration in dynamic interferometer[J].Acta Optica Sinica,2016,36(2):0226002.郑东晖,陈磊,李金鹏,等.动态干涉仪干涉图位置配准及移相误差校正[J].光学学报,2016,36(2):0226002.
15 Zheng Donghui,Chen Lei,Li Bo,et al.Research on phase-shifting characteristic of retarder array in simultaneous phaseshifting interferometer[J].Acta Optica Sinica,2015,35(4):0412004.郑东晖,陈磊,李博,等.同步移相干涉仪中的延迟阵列移相特性研究[J].光学学报,2015,35(4):0412004.
2 钱克矛,缪泓,伍小平.利用干涉云纹偏振相移技术进行动态变形实时测量的方法研究[C].第九届全国力学学术会议,2000.
3 Kranz J,Lamprecht J,Hettwer A.et al.Fiber optical single-frame speckle interferometer for measuring industrial surfaces[C].SPIE,1998,3407:328-331.
4 Millerd J E,Brock N J.Methods and apparatus for splitting,imaging,and measuring wavefronts in interferometry:US7298497B2[P].2007-11-20.
5 Yoneyama S,Kikutaa H,Moriwaki K.Simultaneous observation of phase-stepped photoelastic fringes using a pixilated microretarder array[J].Opt Eng,2006,45(8):083604.
6 Zuo Fen,Chen Lei,Xu Chunsheng.Simultaneous phase-shifting interferometry based on two-dimension grating[J].Acta Optica Sinica,2007,27(4):663-667.左芬,陈磊,徐春生.基于二维光栅分光的同步移相干涉测量技术[J].光学学报,2007,27(4):663-667.
7 Abdelsalam D G,Yao B L,Gao P,et al.Single-shot parallel four-step phase shifting using on-axis Fizeau interferometry[J].Applied Optics,2012,51(20):4891-4895.
8 Xu Chen.Study of dynamic interferometry technology and application[D].Nanjing:Nanjing University of Science and Technology,2009.徐晨.动态干涉测试的理论与技术研究[D].南京:南京理工大学,2009.
9 曾爱军,郭小娴,江晓军,等.同步移相菲索干涉仪:CN101324421[P].2008-12-17.
10 Millerd J E,Wyant J C.Simultaneous phase-shifting Fizeau interferometer:US7230718B2[P].2007-06-12.
11 Kimbrough B,Millerd J,Wyant J,et al.Low-coherence vibration insensitive Fizeau interferometer[C].SPIE,2006,6292:62920F.
12 Yatagai T,Jackin B J,Ono A,et al.Instantaneous phase-shifting Fizeau interferometry with high-speed pixelated phasemask camera[C].SPIE,2015,9660:966018.
13 Zuo Fen,Chen Lei.Errors researching for a simultaneous phase shifting interferometer[J].Optical Technique,2009,35(4):536-540.左芬,陈磊.一种同步移相干涉测量系统的误差研究[J].光学技术,2009,35(4):536-540.
14 Zheng Donghui,Chen Lei,Li Jinpeng,et al.Position registration for interferograms and phase-shifting error calibration in dynamic interferometer[J].Acta Optica Sinica,2016,36(2):0226002.郑东晖,陈磊,李金鹏,等.动态干涉仪干涉图位置配准及移相误差校正[J].光学学报,2016,36(2):0226002.
15 Zheng Donghui,Chen Lei,Li Bo,et al.Research on phase-shifting characteristic of retarder array in simultaneous phaseshifting interferometer[J].Acta Optica Sinica,2015,35(4):0412004.郑东晖,陈磊,李博,等.同步移相干涉仪中的延迟阵列移相特性研究[J].光学学报,2015,35(4):0412004.