高精度像差检测运动控制及图像采集系统设计
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摘要
投影物镜是光刻机的重要组成部分,直接影响光刻技术指标,因此投影物镜波像差是光刻机中关键的检测指标之一。横向剪切干涉是重要的波像差检测方法,根据横向剪切原理,设计了高精度运动控制及图像采集系统以检测光刻机投影物镜波像差是否满足要求。该系统采用宏-微结构以同时满足行程和位置精度的要求;并由CMOS图像探测器实时采集保存剪切干涉图像。剪切干涉图像通过波前重建计算得到投影物镜的波像差,实验结果满足波像差检测重复性精度要求。该系统具有高集成、可扩展、操作简便和维护简单的特点,可广泛应用于相关领域中。
Projection lens is an important part of the lithography machine,directly affect the lithography technology index,so the wave aberration of the projection lens is one of the most important indexes of the lithography machine.Transverse shearing interferometry is an important method of wave aberration detection.Base on the transverse shear principle,a high precision motion control and image acquisition system is designed to detect whether the wave aberration of the projection lens is satisfied.And the macro-micro structure is adopted to meet the requirements of both stroke and position precision,and Real-time acquisition by the CMOS image detector to save the shear interference image.The wave front aberration of the projection objective is calculated by wave front reconstruction.The experimental results satisfy the requirement of the aberration of the wave aberration.The system is highly integrated,scalable,easy to operate and easy to maintain features,can be widely used in related fields.
Projection lens is an important part of the lithography machine,directly affect the lithography technology index,so the wave aberration of the projection lens is one of the most important indexes of the lithography machine.Transverse shearing interferometry is an important method of wave aberration detection.Base on the transverse shear principle,a high precision motion control and image acquisition system is designed to detect whether the wave aberration of the projection lens is satisfied.And the macro-micro structure is adopted to meet the requirements of both stroke and position precision,and Real-time acquisition by the CMOS image detector to save the shear interference image.The wave front aberration of the projection objective is calculated by wave front reconstruction.The experimental results satisfy the requirement of the aberration of the wave aberration.The system is highly integrated,scalable,easy to operate and easy to maintain features,can be widely used in related fields.
引文
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[12]于长淞,齐克奇,张春雷,等.基于光栅衍射的横向剪切干涉仪精密相移系统设计[J].电子测量与仪器学报,2013,27(11):1099-1104.
[13]苗二龙,张健,谷勇强,等.用于光刻投影物镜检测的高精度菲佐干涉仪误差分析[J].中国激光,2010,37(8):2029-2034.
[14]彭爱华,叶红卫,李新阳.基于解耦差分泽尼克待定系数法的二维横向剪切波面重建算法[J].光学学报,2011,31(8):1-5.
[15]张宇,金春水,马冬梅,等.极紫外光刻物镜系统波像差检测技术研究[J].红外与激光工程,2012,41(12):3384-3389.
[2]诸波尔,王向朝,李思坤,等.超大数值孔径光刻机投影物镜波像差检测方法[J].光学学报2016,36(1):129-139.
[3]代晓珂,金春水,于杰.点衍射干涉仪波面参考源误差及公差分析[J].中国光学,2014,7(5):855-862.
[4]方超,向阳.十三步光栅横向剪切干涉相位复原算法[J].中国激光,2014,41(5):178-181.
[5]杨济硕,李思坤,王向朝,等.基于空间像自适应降噪的投影物镜波像差检测方法[J].光学学报,2013,33(1):75-83.
[6]张德福,葛川,李显凌,等.高精度位移传感器线性度标定方法研究[J].仪器仪表学报,2015,36(5):982-988.
[7]胡柳燕,卢荣胜,周维虎,等.基于LABVIEW的可见光相机显控系统设计[J].控制系统,2010,26(10):51-53.
[8]吴仁涛,姜云海,左建勇.基于LABVIEW平台的USB视频采集方法与应用[J].工业仪表与自动化装置,2011(3):80-82.
[9]谢巍,侯丽伟,许春,等.基于LABVIEW及USB的通用图像采集软件[J].科学技术与工程,2011,11(16):3819-3823.
[10]谢轩.基于LabVIEW和NI USRP的远程人脸识别系统设计与实现[J].国外电子测量技术,2016,35(2):35-41.
[11]苏仔见,倪攀,许少伦.LabVIEW在运动控制系统实验平台的应用和实现[J].实验室研究与探索,2011,30(10):38-39.
[12]于长淞,齐克奇,张春雷,等.基于光栅衍射的横向剪切干涉仪精密相移系统设计[J].电子测量与仪器学报,2013,27(11):1099-1104.
[13]苗二龙,张健,谷勇强,等.用于光刻投影物镜检测的高精度菲佐干涉仪误差分析[J].中国激光,2010,37(8):2029-2034.
[14]彭爱华,叶红卫,李新阳.基于解耦差分泽尼克待定系数法的二维横向剪切波面重建算法[J].光学学报,2011,31(8):1-5.
[15]张宇,金春水,马冬梅,等.极紫外光刻物镜系统波像差检测技术研究[J].红外与激光工程,2012,41(12):3384-3389.