用于三维测量的双路点衍射干涉系统
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摘要
针对在仅有一个光纤对的单路点衍射三维测量系统中,存在平行于条纹的横向方向上测量精度低的问题,提出了用于三维测量的双路点衍射干涉系统。分析了点衍射波前误差、测量探头结构布局以及三维迭代重构算法对于三维测量精度的影响,在此基础上确定点衍射源结构以及探头结构布局等最优系统参数。实验结果显示,单路点衍射干涉三维测量系统在xy方向的精度分别为亚微米量级和微米量级,而双路点衍射干涉仪系统可在三维方向上同时达到亚微米量级,验证了所提出的双路点衍射干涉系统方案的可行性和准确性。所提出的双路点衍射干涉系统有效的实现高精度三维测量,为无导轨三维位移和尺寸等测量提供了一种可行方法。
In the single-path point-diffraction three-dimensional measurement system with only one fiber pair,the measurement accuracy in the lateral direction parallel to the fringle direction is poor. To solve this problem,a dual-path point-diffraction interference system is proposed to enhance the accurate three-dimensional measurement in this study. The influence of point-diffraction wavefront error,structural layout of measuring probe and three-dimensional iterative reconstruction algorithm on the three-dimensional measurement accuracy is analyzed. Based on the analysis,the optimal system parameters(e. g.,point-diffraction source structure and structural layout of probe) are determined. The experimental results show that the accuracy of the single-path point-diffraction interference system for three-dimensional measurement in the x and y directions are in the order of submicrons and microns,respectively. In comparison,the dual-path point-diffraction interference system can reach the order of submicrons at three directrions. The feasibility and accuracy of the proposed system are verified. It provides a feasible method for the measurement three-dimensional displacement and size without guide rail.
In the single-path point-diffraction three-dimensional measurement system with only one fiber pair,the measurement accuracy in the lateral direction parallel to the fringle direction is poor. To solve this problem,a dual-path point-diffraction interference system is proposed to enhance the accurate three-dimensional measurement in this study. The influence of point-diffraction wavefront error,structural layout of measuring probe and three-dimensional iterative reconstruction algorithm on the three-dimensional measurement accuracy is analyzed. Based on the analysis,the optimal system parameters(e. g.,point-diffraction source structure and structural layout of probe) are determined. The experimental results show that the accuracy of the single-path point-diffraction interference system for three-dimensional measurement in the x and y directions are in the order of submicrons and microns,respectively. In comparison,the dual-path point-diffraction interference system can reach the order of submicrons at three directrions. The feasibility and accuracy of the proposed system are verified. It provides a feasible method for the measurement three-dimensional displacement and size without guide rail.
引文
[1]陈伟民,李存龙.基于微波雷达的位移/距离测量技术[J].电子测量与仪器学报,2015,29(9):1251-1265.CHEN W M,LI C L.Radar-based displacement/distance measuring techniques[J].Journal of Electronic Measurement and Instrumentation,2015,29(9):1251-1265.
[2]周美丽,白宗文.基于2D-PSD的激光位移测量系统设计[J].国外电子测量技术,2015,34(2):64-66.ZHANG M L,BAI Z W.Design of the laser displacement measurement system based on 2D-PSD[J].Foreign Electronic Measurement Technology,2015,34(2):64-66.
[3]LIU Z,LI X,LI F,et al.Fast and flexible movable vision measurement for the surface of a large-sized object[J].Sensors,2015,15(3):4643-4657.
[4]RANGAPPA S,TAILOR M,PETZING J,et al.The suitability of lightfield camera depth maps for coordinate measurement applications[C].Eighth International Conference on Machine Vision,2015:987523.
[5]王晓飞,刘胜兰,张丽艳,等.整体叶轮三坐标测量机的分步精细定位方法[J].南京理工大学学报,2012,36(6):1026-1030.WANG X F,LIU SH L,ZHANG L Y,et al.Stepwise refinement localization method for impeller inspection on coordinate measuring machine[J].Journal of Nanjing University of Science and Technology,2012,36(6):1026-1030.
[6]何雪明,孔丽娟,何俊飞,等.基于三坐标测量机自适应测量的自由曲面逆向[J].机械工程学报,2014,50(15):155-159.HE X M,KONG L J,HE J F,et al.Free-form surface reverse based on CMM self-adapting measurement[J].Journal of Mechanical Engineering,2014,50(15):155-159.
[7]王德元,唐文彦,张晓琳,等.基于标准器的大尺寸测量系统坐标统一化方法[J].仪器仪表学报,2015,36(8):1845-1852.WANG D Y,TANG W Y,ZHANG X L,et al.Coordinate unification method in large scale metrology system based on standard artifact[J].Chinese Journal of Scientific Instrument,2015,36(8):1845-1852.
[8]RHEE H G,KIM S W.Absolute distance measurement by two-point-diffraction interferometry[J].Applied Optics,2002,41(28):5921-5928.
[9]WANG D D,CHEN X X,XU Y B,et al.High-NA fiber point-diffraction interferometer for three-dimensional coordinate measurement[J].Optics Express,2014,22(21):25550.
[10]OTA K,YAMAMOTO T,FUKUDA Y,et al.Advanced point diffraction interferometer for EUV aspherical mirrors[C].Association of Super-Advanced Electronics Technologies,2001:543-550.
[11]JIN J,RHEE H G,KIM S W.Metrological atomic force microscopy integrated with a modified two-point diffraction interferometer[J].Measurement Science&Technology,2009,20(10):105302.
[12]WANG D D,YANG Y Y,CHEN C,et al.Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces[J].Appllied Optics,2011,50(16):2342-2348.
[13]邵晶,马冬梅,张海涛,等.极小孔径衍射波前测试分析[J].光学精密工程,2014,22(10):639-2644.SHAO J,MA D M,ZHANG H T,et al.Evaluation of wavefront diffracted from ultra small aperture[J].Optics and Precision Engineering,2014,22(10):2639-2644.
[14]马冬梅,陈土泉.点衍射波前位相的测评[J].光学精密工程,2010(11):2390-2397.MA D M,CHEN T Q.Test and evaluation of wavefront phase of point diffraction[J].Optics and Precision Engineering,2010(11):2390-2397.
[15]MATSUURA T,OKAGAKI S,NAKAMURA T,et al.Measurement accuracy in phase-shifting point diffractioninterferometer with two optical fibers[J].Optical Review,2007,14(6):401-405.
[16]MATSUURA T,UDAKA K,OSHIKANE Y,et al.Spherical concave mirror measurement by phase-shifting point diffraction interferometer with two optical fibers[J].Nuclear Instruments&Methods in Physics Research,2010,616(2-3):233-236.
[17]陈茜茜,王道档,徐杨波,等.亚波长孔径光纤点衍射波前质量分析[J].光学学报,2015,35(9):167-175.CHEN X X,WANG D D,XU Y B,et al.Analysis of point-diffraction wavefront with sub-wavelength-aperture Fiber[J].Acta Optica Sinica,2015,35(9):167-175.
[18]魏豪明,邢廷文,李云,等.632.8nm高精度移相菲佐干涉仪测量误差分析[J].激光与光电子学进展,2010,47(4):60-67.WEI H M,XING T W,LI Y,et al.Measurement errors in 632.8nm high precision phase-shifting fizeau interferometer[J].Laser&Optoelectronics Progress,2010,47(4):41202.
[19]WANG D D,WANG F M,ZOU H,et al.Analysis of diffraction wavefront in visible-light point-diffraction interferometer[J].Applied Optics,2013,52(31):7602-7608.
[20]王道档,王福民,陈茜茜,等.基于LevenberyMarquardt算法的点衍射三维坐标测量方法[J].光学学报,2014,34(8):143-150.WANG D D,WANG F M,CHEN X X,et al.Threedimensional coordinate mersurement with pinot-diffraction interferometer based on levenbery-marquardt algorithm[J].Acta Optica Sinica,2014,34(8):0812001.
[21]王道档,徐杨波,陈茜茜,等.基于快速搜索粒子群算法的点衍射干涉绝对位移测量方法[J].光学学报,2016,36(1):129-136.WANG D D,XU Y B,CHEN X,et al.Absolute displacement measurement with point-diffraction interferometer based on quick searching particle swarm optimization algorithm[J].Acta Optica Sinica,2016,36(1):129-136.
[2]周美丽,白宗文.基于2D-PSD的激光位移测量系统设计[J].国外电子测量技术,2015,34(2):64-66.ZHANG M L,BAI Z W.Design of the laser displacement measurement system based on 2D-PSD[J].Foreign Electronic Measurement Technology,2015,34(2):64-66.
[3]LIU Z,LI X,LI F,et al.Fast and flexible movable vision measurement for the surface of a large-sized object[J].Sensors,2015,15(3):4643-4657.
[4]RANGAPPA S,TAILOR M,PETZING J,et al.The suitability of lightfield camera depth maps for coordinate measurement applications[C].Eighth International Conference on Machine Vision,2015:987523.
[5]王晓飞,刘胜兰,张丽艳,等.整体叶轮三坐标测量机的分步精细定位方法[J].南京理工大学学报,2012,36(6):1026-1030.WANG X F,LIU SH L,ZHANG L Y,et al.Stepwise refinement localization method for impeller inspection on coordinate measuring machine[J].Journal of Nanjing University of Science and Technology,2012,36(6):1026-1030.
[6]何雪明,孔丽娟,何俊飞,等.基于三坐标测量机自适应测量的自由曲面逆向[J].机械工程学报,2014,50(15):155-159.HE X M,KONG L J,HE J F,et al.Free-form surface reverse based on CMM self-adapting measurement[J].Journal of Mechanical Engineering,2014,50(15):155-159.
[7]王德元,唐文彦,张晓琳,等.基于标准器的大尺寸测量系统坐标统一化方法[J].仪器仪表学报,2015,36(8):1845-1852.WANG D Y,TANG W Y,ZHANG X L,et al.Coordinate unification method in large scale metrology system based on standard artifact[J].Chinese Journal of Scientific Instrument,2015,36(8):1845-1852.
[8]RHEE H G,KIM S W.Absolute distance measurement by two-point-diffraction interferometry[J].Applied Optics,2002,41(28):5921-5928.
[9]WANG D D,CHEN X X,XU Y B,et al.High-NA fiber point-diffraction interferometer for three-dimensional coordinate measurement[J].Optics Express,2014,22(21):25550.
[10]OTA K,YAMAMOTO T,FUKUDA Y,et al.Advanced point diffraction interferometer for EUV aspherical mirrors[C].Association of Super-Advanced Electronics Technologies,2001:543-550.
[11]JIN J,RHEE H G,KIM S W.Metrological atomic force microscopy integrated with a modified two-point diffraction interferometer[J].Measurement Science&Technology,2009,20(10):105302.
[12]WANG D D,YANG Y Y,CHEN C,et al.Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces[J].Appllied Optics,2011,50(16):2342-2348.
[13]邵晶,马冬梅,张海涛,等.极小孔径衍射波前测试分析[J].光学精密工程,2014,22(10):639-2644.SHAO J,MA D M,ZHANG H T,et al.Evaluation of wavefront diffracted from ultra small aperture[J].Optics and Precision Engineering,2014,22(10):2639-2644.
[14]马冬梅,陈土泉.点衍射波前位相的测评[J].光学精密工程,2010(11):2390-2397.MA D M,CHEN T Q.Test and evaluation of wavefront phase of point diffraction[J].Optics and Precision Engineering,2010(11):2390-2397.
[15]MATSUURA T,OKAGAKI S,NAKAMURA T,et al.Measurement accuracy in phase-shifting point diffractioninterferometer with two optical fibers[J].Optical Review,2007,14(6):401-405.
[16]MATSUURA T,UDAKA K,OSHIKANE Y,et al.Spherical concave mirror measurement by phase-shifting point diffraction interferometer with two optical fibers[J].Nuclear Instruments&Methods in Physics Research,2010,616(2-3):233-236.
[17]陈茜茜,王道档,徐杨波,等.亚波长孔径光纤点衍射波前质量分析[J].光学学报,2015,35(9):167-175.CHEN X X,WANG D D,XU Y B,et al.Analysis of point-diffraction wavefront with sub-wavelength-aperture Fiber[J].Acta Optica Sinica,2015,35(9):167-175.
[18]魏豪明,邢廷文,李云,等.632.8nm高精度移相菲佐干涉仪测量误差分析[J].激光与光电子学进展,2010,47(4):60-67.WEI H M,XING T W,LI Y,et al.Measurement errors in 632.8nm high precision phase-shifting fizeau interferometer[J].Laser&Optoelectronics Progress,2010,47(4):41202.
[19]WANG D D,WANG F M,ZOU H,et al.Analysis of diffraction wavefront in visible-light point-diffraction interferometer[J].Applied Optics,2013,52(31):7602-7608.
[20]王道档,王福民,陈茜茜,等.基于LevenberyMarquardt算法的点衍射三维坐标测量方法[J].光学学报,2014,34(8):143-150.WANG D D,WANG F M,CHEN X X,et al.Threedimensional coordinate mersurement with pinot-diffraction interferometer based on levenbery-marquardt algorithm[J].Acta Optica Sinica,2014,34(8):0812001.
[21]王道档,徐杨波,陈茜茜,等.基于快速搜索粒子群算法的点衍射干涉绝对位移测量方法[J].光学学报,2016,36(1):129-136.WANG D D,XU Y B,CHEN X,et al.Absolute displacement measurement with point-diffraction interferometer based on quick searching particle swarm optimization algorithm[J].Acta Optica Sinica,2016,36(1):129-136.