菲佐干涉仪移相器的结构优化设计
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摘要
介绍了菲佐干涉仪在干涉检验领域的主要用途及干涉仪中移相器的工作原理。根据工作原理,基于压电陶瓷驱动和双柔性四连杆传动,设计了一种移相器结构,压电陶瓷与四连杆以并联形式装配。对双柔性四连杆的铰链参数进行了优化设计,用于提高移相器的固有频率,进而提高其动态特性和抗干扰能力。通过计算机对移相器进行有限元仿真分析,确认了优化设计的有效性。
The main application of Fizeau interferometer in the field of interference test and the working principle of the phase shifter in the interferometer were introduced. According to the working principle, a phase shifter structure was designed based on the piezoelectric ceramic drive and the double flexible fourrod drive. The piezoelectric ceramic and the four rods are assembled in parallel. The optimum design of the hinge parameters of the double-flexible four-rod drive can improve the natural frequency of the phase shifter so as to improve its dynamic characteristics and anti-interference ability. Through finite element simulation analysis of the phase shifter by computer, the validity of the optimized design was confirmed.
The main application of Fizeau interferometer in the field of interference test and the working principle of the phase shifter in the interferometer were introduced. According to the working principle, a phase shifter structure was designed based on the piezoelectric ceramic drive and the double flexible fourrod drive. The piezoelectric ceramic and the four rods are assembled in parallel. The optimum design of the hinge parameters of the double-flexible four-rod drive can improve the natural frequency of the phase shifter so as to improve its dynamic characteristics and anti-interference ability. Through finite element simulation analysis of the phase shifter by computer, the validity of the optimized design was confirmed.
引文
[1]苏东奇.光学面形绝对检测技术研究[D].长春:中国科学院研究生院(长春光学精密机械与物理研究所),2013.
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[8]赵荣丽,陈新,李克天.双柔性平行六连杆微动平台结构的设计及测试[J].光学精密工程,2015,23(10):2860-2869.
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[11]吴鹰飞,周兆英.柔性铰链的设计计算[J].工程力学,2002,19(6):136-140.
[2]AI C Q,KNOWLDEN R E,LAMB J A.Design of a 24-in.Phase Shifting Fizeau Interferometer[J].Proceedings of the SPIE,1996,2860:398-403.
[3]HAN S.Laser Alignment for 610-mm Large-aperture Fizeau Interferometer[J].Prcceedings of the SPIE,1999,3782:469-473.
[4]魏仁选,姜德生.基于光纤F-P透射光波长的微位移测量系统[J].机械制造,2003,41(10):52-53.
[5]吴从焰,潘效龙,张晓峰,等.二维解耦微位移工作台的设计与有限元分析[J].机械设计与制造,2014(10):67-68,72.
[6]马立,谢炜,刘波,等.柔性铰链微定位平台的设计[J].光学精密工程,2014,22(2):338-345.
[7]何宏伟,高健.柔性铰链的微动平台设计[J].机械设计与制造,2014(1):56-58.
[8]赵荣丽,陈新,李克天.双柔性平行六连杆微动平台结构的设计及测试[J].光学精密工程,2015,23(10):2860-2869.
[9]李仕华,韩雪艳,马琦翔,等.新型并联柔性铰链微动精密平台的研究[J].中国机械工程,2016,27(7):888-893.
[10]PAROS J.How to Design Flexure Hinges[J].Machine Design,1965,37:151-156.
[11]吴鹰飞,周兆英.柔性铰链的设计计算[J].工程力学,2002,19(6):136-140.