飞秒激光螺旋加工小孔几何参数演化实验研究
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摘要
为了研究飞秒激光螺旋加工工艺参数对小孔成形过程的影响,以304不锈钢为靶材,选取飞秒激光螺旋钻孔工艺的主要参数,基于L25(56)正交表设计了5因素5水平正交实验,分析单脉冲能量、重复频率、旋转速率、焦点下移速率、吹气压力对烧蚀深度影响的显著水平;基于反向传播(BP)神经网络建立这5个因素与材料烧蚀深度之间的关系模型,并利用正交实验数据对网络进行训练,通过附加钻孔实验数据对所建立网络的泛化能力进行测试,结果表明所建立的模型预测误差在3%以内;针对螺旋钻孔的特征参数——焦点下移速率设计单因素实验,得到了飞秒激光螺旋钻孔过程中焦点下移速率对小孔成形影响的规律。
To investigate the effect of femtosecond laser helical processing parameters on the evolution of hole formation process,we use 304 stainless steel as the target material,select main parameters of the helical drilling by femtosecond pulsed laser,and design orthogonal experiments with 5 factors and 5 levels based on L25(56)orthogonal table.The significance levels of the ablation depth affected by 5 main parameters,such as the single pulse energy,repetition frequency,rotation rate,rate of focus down,and the air-blowing pressure,are analyzed.Based on the back propagation(BP)neural network,we establish the relationship model between the 5 main parameters and the ablation depth of the laser drilling.The data obtained from the orthogonal experiment are used to train the neural network.The generalization ability is tested by additional experiments.The results show that the prediction error of the relationship model is less than 3%.Moreover,the single factor experiment is designed to analyze the influence of the rate of focus down during the helical drilling.The effect of the different rates of focus down on the hole formation during the femtosecond laser helical drilling process is obtained.
To investigate the effect of femtosecond laser helical processing parameters on the evolution of hole formation process,we use 304 stainless steel as the target material,select main parameters of the helical drilling by femtosecond pulsed laser,and design orthogonal experiments with 5 factors and 5 levels based on L25(56)orthogonal table.The significance levels of the ablation depth affected by 5 main parameters,such as the single pulse energy,repetition frequency,rotation rate,rate of focus down,and the air-blowing pressure,are analyzed.Based on the back propagation(BP)neural network,we establish the relationship model between the 5 main parameters and the ablation depth of the laser drilling.The data obtained from the orthogonal experiment are used to train the neural network.The generalization ability is tested by additional experiments.The results show that the prediction error of the relationship model is less than 3%.Moreover,the single factor experiment is designed to analyze the influence of the rate of focus down during the helical drilling.The effect of the different rates of focus down on the hole formation during the femtosecond laser helical drilling process is obtained.
引文
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[22]Deng Z Q.Study on the machining technology and neural network simulation of powder mixed EDM[D].Dalian:Dalian University of Technology,2007.邓宗庆.混粉电火花加工工艺及神经网络仿真研究[D].大连:大连理工大学,2007.
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[24]Wang W J.Study of shape and morphology control in femtosecond laser fabrication of metals[D].Xi′an:Xi′an Jiaotong University,2008.王文君.飞秒激光金属加工中的形状及形貌控制研究[D].西安:西安交通大学,2008.
[25]Akou H.Effect of various chirped frequency functions on Gaussian laser beam characteristics[J].Optik-International Journal for Light and Electron Optics,2017,131:446-453.
[2]Kautek W,Krüger J,Lenzner M,et al.Laser ablation of dielectrics with pulse durations between20fs and 3ps[J].Applied Physics Letters,1996,69(21):3146-3148.
[3]Xia B,Jiang L,Wang S M,et al.Femtosecond laser drilling of micro-holes[J].Chinese Journal of Lasers,2013,40(2):0201001.夏博,姜澜,王素梅,等.飞秒激光微孔加工[J].中国激光,2013,40(2):0201001.
[4]Fornaroli C,Holtkamp J,Gillner A.Laser-beam helical drilling of high quality micro holes[J].Physics Procedia,2013,41:654-662.
[5]Kamlage G,Bauer T,Ostendorf A,et al.Deep drilling of metals by femtosecond laser pulses[J].Applied Physics A,2003,77(2):307-310.
[6]Wang X C,Zheng H Y,Chu P L,et al.Femtosecond laser drilling of alumina ceramic substrates[J].Applied Physics A,2010,101(2):271-278.
[7]Wang Y L.The research of technology for laser helical drilling[D].Wuhan:Huazhong University of Science and Technology,2012.王砚丽.激光旋转打孔技术的研究[D].武汉:华中科技大学,2012.
[8]Jiang J.Technical research of picosecond laser microdrilling on metals[D].Beijing:Beijing University of Technology,2014.姜靖.皮秒激光对金属材料微孔加工技术研究[D].北京:北京工业大学,2014.
[9]Cao T T.Reserch of the hole drilling of K24superalloy technology by femtosecond laser[D].Harbin:Harbin Institute of Technology,2016.曹婷婷.K24高温合金飞秒激光孔加工技术研究[D].哈尔滨:哈尔滨工业大学,2016.
[10]Lee H M,Choi J H,Moon S J.Determining the machining parameters for femtosecond laser helical drilling of aluminosilicate glass substrate[J].International Journal of Precision Engineering&Manufacturing,2017,18(7):923-930.
[11]He C,Zibner F,Fornaroli C,et al.High-precision helical cutting using ultra-short laser pulses[J].Physics Procedia,2014,56:1066-1072.
[12]Zhang Y,Gao X,Katayama S.Weld appearance prediction with BP neural network improved by genetic algorithm during disk laser welding[J].Journal of Manufacturing Systems,2015,34:53-59.
[13]Guo L,Lin Y T,Zhang Z H,et al.Mechanism of laser coloration of stainless steel and color prediction based on neural network[J].Chinese Journal of Lasers,2016,43(11):1102008.郭亮,林远添,张震华,等.不锈钢激光着色机理及基于神经网络的颜色预测[J].中国激光,2016,43(11):1102008.
[14]Ding H,Li Y W,Yuan D.Roughness prediction of laser microporous based on BP artificial neural networks[J].Laser&Optoelectronics Progress,2017,54(1):011407.丁华,李炎蔚,袁冬.BP神经网络预测激光微孔表面粗糙度[J].激光与光电子学进展,2017,54(1):011407.
[15]Kraus M,Ahmed M A,Michalowski A,et al.Microdrilling in steel using ultrashort pulsed laser beams with radial and azimuthal polarization[J].Optics Express,2010,18(21):22305-22313.
[16]Shin J,Mazumder J.Shallow angle drilling of inconel718using a helical laser drilling technique[J].Journal of Manufacturing Science&Engineering,2016,139(3):031004.
[17]Li F,Liu W W,Wang D F.Research on parameters optimization in milling of stainless steel based on Taguchi method[J].Aviation Precision Manufacturing Technology,2015,51(6):28-31.李锋,刘维伟,王东方.基于田口法的不锈钢铣削参数优化研究[J].航空精密制造技术,2015,51(6):28-31.
[18]Ren N F,Zhang L,Wang H X,et al.Orthogonal experiments and variance analysis in NdYAGpulsed laser trepanning drilling[J].Laser&Optoelectronics Progress,2017,54(6):061408.任乃飞,张丽,王后孝,等.NdYAG脉冲激光环切打孔正交实验及方差分析[J].激光与光电子学进展,2017,54(6):061408.
[19]Luo B Y,Ye Y C,Yao N,et al.Orthogonal test and variance analysis for sensitivity of factors influencing the width of fractured zone of strip pillar[J].Metal Mine,2016(11):49-53.罗斌玉,叶义成,姚囝,等.条带矿柱破裂区宽度影响因素敏感性正交方差分析[J].金属矿山,2016(11):49-53.
[20]Gordienko V M,Zhvaniya I A,Khomenko A S.Dynamics of plasma production and harmonic generation under microchannel drilling in solid target by intense femtosecond laser[C].SPIE,2010,7994:79940P.
[21]Wang G A,Zhang Y Z,Ni X W,et al.Effect of deviation distance to focal spot on nanosecond-pulsedlaser drilling rates in air[J].Chinese Journal of Lasers,2007,34(12):1621-1624.王广安,章玉珠,倪晓武,等.离焦量对空气中纳秒激光打孔效率的影响[J].中国激光,2007,34(12):1621-1624.
[22]Deng Z Q.Study on the machining technology and neural network simulation of powder mixed EDM[D].Dalian:Dalian University of Technology,2007.邓宗庆.混粉电火花加工工艺及神经网络仿真研究[D].大连:大连理工大学,2007.
[23]Liu X L.Study on data normalization in BP neural network[J].Mechanical Engineering&Automation,2010(3):122-123.柳小桐.BP神经网络输入层数据归一化研究[J].机械工程与自动化,2010(3):122-123.
[24]Wang W J.Study of shape and morphology control in femtosecond laser fabrication of metals[D].Xi′an:Xi′an Jiaotong University,2008.王文君.飞秒激光金属加工中的形状及形貌控制研究[D].西安:西安交通大学,2008.
[25]Akou H.Effect of various chirped frequency functions on Gaussian laser beam characteristics[J].Optik-International Journal for Light and Electron Optics,2017,131:446-453.