脉冲激光沉积薄膜的残余应力测量
|
摘要
为了测量脉冲激光沉积法制备的小面积薄膜的残余应力,并解决Stoney公式在特定情况下误差较大的问题,本文提出了一种基于悬臂梁结构和数值计算的薄膜残余应力测量方法。该方法以初始曲率为零的原子力显微镜探针作为衬底梁,在衬底梁上使用脉冲激光沉积方法沉积被测薄膜,并记录衬底梁在薄膜沉积前后的翘曲形貌变化,再结合薄膜厚度、衬底梁几何尺寸、所涉及材料的杨氏模量与泊松比等其他参数,借助数值计算对实验数据进行分析,得出被测薄膜的残余应力。使用该方法测出:基于脉冲激光沉积法在高温环境下制备的二氧化钒薄膜的残余应力为-340 MPa,与文献报道的结果相符。本文提出的基于悬臂梁结构和数值计算的薄膜残余应力测量方法具有适用范围广、准确度好、实验成本低的优点。
To measure the residual stresses in thin films with limited area prepared by pulsed laser deposition,as well as to solve the problem of the relatively large error introduced by the Stoney equation under certain circumstances,a measurement method for residual stresses in thin films based on cantilever structures and numerical calculation was proposed in this article.In this method,atomic force microscopy probes with zero initial curvature were used as substrate cantilevers,and thin filmswere deposited on the substrate cantilevers using pulsed laser deposition.The bending profiles of the substrate cantilevers before and after thin film deposition were recorded and used in numerical calculation,together with other parameters including the thin film thicknesses,the geometries of the substrate cantilevers,and the Young's moduli and the Poisson's ratios of the involved materials,to analyze the experimental data and obtain the residual stresses in the thin films.By using this method,the residual stress in vanadium dioxide thin films,prepared by pulsed laser deposition in a hightemperature environment,is measured to be-340 MPa,corresponding to the value reported in the literature.The measurement method for residual stresses in thin films proposed in this article,which is based on cantilever structures and numerical calculation,has the advantages of wide versatility,good accuracy,and low costs.
To measure the residual stresses in thin films with limited area prepared by pulsed laser deposition,as well as to solve the problem of the relatively large error introduced by the Stoney equation under certain circumstances,a measurement method for residual stresses in thin films based on cantilever structures and numerical calculation was proposed in this article.In this method,atomic force microscopy probes with zero initial curvature were used as substrate cantilevers,and thin filmswere deposited on the substrate cantilevers using pulsed laser deposition.The bending profiles of the substrate cantilevers before and after thin film deposition were recorded and used in numerical calculation,together with other parameters including the thin film thicknesses,the geometries of the substrate cantilevers,and the Young's moduli and the Poisson's ratios of the involved materials,to analyze the experimental data and obtain the residual stresses in the thin films.By using this method,the residual stress in vanadium dioxide thin films,prepared by pulsed laser deposition in a hightemperature environment,is measured to be-340 MPa,corresponding to the value reported in the literature.The measurement method for residual stresses in thin films proposed in this article,which is based on cantilever structures and numerical calculation,has the advantages of wide versatility,good accuracy,and low costs.
引文
[1]孔慧,李传宇,周连群,等.薄膜谐振Lamb波传感器测量液体流速矢量的方法[J].光学精密工程,2017,25(1):155-162.KONG H,LI CH Y,ZHOU L Q,et al..A method for fluid velocity vector measurement using thin film Lamb wave resonator[J].Opt.Precision Eng.,2017,25(1):155-162.(in Chinese)
[2]赵健,施芹,夏国明,等.小型化硅微谐振式加速度计的实现与性能测试[J].光学精密工程,2016,24(8):1927-1933.ZHAO J,SHI Q,XIA G M,et al..Implementation and measurement of a miniaturized silicon resonant accelerometer[J].Opt.Precision Eng.,2016,24(8):1927-1933.(in Chinese)
[3]虞益挺,苑伟政,乔大勇.曲率测量技术在微机电系统薄膜残余应力测量中的应用[J].机械工程学报,2007,43(3):78-81.YU Y T,YUAN W ZH,QIAO D Y.Application of curvature measurement technique for measuring residual stresses in MEMS thin films[J].Chinese Journal of Mechanical Engineering,2007,43(3):78-81.(in Chinese)
[4]周剑,吴学忠,肖定邦,等.柔性声表面波器件的波模式分析[J].光学精密工程,2016,24(6):1328-1334.ZHOU J,WU X ZH,XIAO D B,et al..Analysis on wave mode of flexible surface acoustic wave devices[J].Opt.Precision Eng.,2016,24(6):1328-1334.(in Chinese)
[5]WON S S,LEE J,VENUGOPAL V,et al..Leadfree Mn-doped(K0.5,Na0.5)NbO3piezoelectric thin films for MEMS-based vibrational energy harvester applications[J].Applied Physics Letters,2016,108(23):232908.
[6]LIU K,CHENG CH,CHENG ZH T,et al..Giant-amplitude,high-work density microactuators with phase transition activated nanolayer bimorphs[J].Nano Letters,2012,12(12):6302-6308.
[7]MA H,HOU J W,WANG X W,et al..Flexible,all-inorganic actuators based on vanadium dioxide and carbon nanotube bimorphs[J].Nano Letters,2017,17(1):421-428.
[8]KLEIN C A.How accurate are Stoneys equation and recent modifications[J].Journal of Applied Physics,2000,88(9):5487-5489.
[9]VISWANATH B,KO C,RAMANATHAN S.Thermoelastic switching with controlled actuation in VO2thin films[J].Scripta Materialia,2011,64(6):490-493.
[10]PUREZA J M,LACERDA M M,DE OLIVEIRA A L,et al..Enhancing accuracy to Stoney equation[J].Applied Surface Science,2009,255(12):6426-6428.
[11]LOWNDES D H,GEOHEGAN D B,PURETZKY A A,et al..Synthesis of novel thin-film materials by pulsed laser deposition[J].Science,1996,273(5277):898-903.
[12]TORRES D,WANG T Y,ZHANG J,et al..VO2-based MEMS mirrors[J].Journal of Microelectromechanical Systems,2016,25(4):780-787.
[13]TORRES D,ZHANG J,DOOLEY S,et al..Modeling of MEMS mirrors actuated by phase-change mechanism[J].Micromachines,2017,8(5):138.
[14]WANG T Y,TORRES D,FERNNDEZ F E,et al..Maximizing the performance of photothermal actuators by combining smart materials with supplementary advantages[J].Science Advances,2017,3(4):e1602697.
[15]CABRERA R,MERCED E,SEPLVEDA N.Performance of electro-thermally driven VO2-based MEMS actuators[J].Journal of Microelectromechanical Systems,2014,23(1):243-251.
[2]赵健,施芹,夏国明,等.小型化硅微谐振式加速度计的实现与性能测试[J].光学精密工程,2016,24(8):1927-1933.ZHAO J,SHI Q,XIA G M,et al..Implementation and measurement of a miniaturized silicon resonant accelerometer[J].Opt.Precision Eng.,2016,24(8):1927-1933.(in Chinese)
[3]虞益挺,苑伟政,乔大勇.曲率测量技术在微机电系统薄膜残余应力测量中的应用[J].机械工程学报,2007,43(3):78-81.YU Y T,YUAN W ZH,QIAO D Y.Application of curvature measurement technique for measuring residual stresses in MEMS thin films[J].Chinese Journal of Mechanical Engineering,2007,43(3):78-81.(in Chinese)
[4]周剑,吴学忠,肖定邦,等.柔性声表面波器件的波模式分析[J].光学精密工程,2016,24(6):1328-1334.ZHOU J,WU X ZH,XIAO D B,et al..Analysis on wave mode of flexible surface acoustic wave devices[J].Opt.Precision Eng.,2016,24(6):1328-1334.(in Chinese)
[5]WON S S,LEE J,VENUGOPAL V,et al..Leadfree Mn-doped(K0.5,Na0.5)NbO3piezoelectric thin films for MEMS-based vibrational energy harvester applications[J].Applied Physics Letters,2016,108(23):232908.
[6]LIU K,CHENG CH,CHENG ZH T,et al..Giant-amplitude,high-work density microactuators with phase transition activated nanolayer bimorphs[J].Nano Letters,2012,12(12):6302-6308.
[7]MA H,HOU J W,WANG X W,et al..Flexible,all-inorganic actuators based on vanadium dioxide and carbon nanotube bimorphs[J].Nano Letters,2017,17(1):421-428.
[8]KLEIN C A.How accurate are Stoneys equation and recent modifications[J].Journal of Applied Physics,2000,88(9):5487-5489.
[9]VISWANATH B,KO C,RAMANATHAN S.Thermoelastic switching with controlled actuation in VO2thin films[J].Scripta Materialia,2011,64(6):490-493.
[10]PUREZA J M,LACERDA M M,DE OLIVEIRA A L,et al..Enhancing accuracy to Stoney equation[J].Applied Surface Science,2009,255(12):6426-6428.
[11]LOWNDES D H,GEOHEGAN D B,PURETZKY A A,et al..Synthesis of novel thin-film materials by pulsed laser deposition[J].Science,1996,273(5277):898-903.
[12]TORRES D,WANG T Y,ZHANG J,et al..VO2-based MEMS mirrors[J].Journal of Microelectromechanical Systems,2016,25(4):780-787.
[13]TORRES D,ZHANG J,DOOLEY S,et al..Modeling of MEMS mirrors actuated by phase-change mechanism[J].Micromachines,2017,8(5):138.
[14]WANG T Y,TORRES D,FERNNDEZ F E,et al..Maximizing the performance of photothermal actuators by combining smart materials with supplementary advantages[J].Science Advances,2017,3(4):e1602697.
[15]CABRERA R,MERCED E,SEPLVEDA N.Performance of electro-thermally driven VO2-based MEMS actuators[J].Journal of Microelectromechanical Systems,2014,23(1):243-251.