基于MEMS技术的智能传感器系统(“智能灰尘”)
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摘要
基于微机电系统(MEMS)技术的智能传感器系统("智能灰尘",Smart Dust)是体积小、能耗低、具备多功能传感与探测、信息处理与存储、双向无线通信、能源自供给与管理等功能的集成系统.它既可以独立工作也可以多系统协同工作.本文首先明确智能灰尘的基本概念及应用领域;随后介绍智能灰尘集成系统的设计方法和结构组成;通过综述智能灰尘技术的发展历程与趋势,以及国内外相关技术的发展现状,最后总结智能灰尘系统关键的技术难点与重点,并明确今后MEMS工艺及集成技术突破的可行性方案.
MEMS-based smart sensing system( "Smart Dust") with ultra small size and low power consumption is integrated by multi-functional sensors including information detection,process and interexchange.it also contains the composite energy system with energy harvesting system and power management programs.Such device therefore is able to work either autonomously or collaboratively.This paper is to clarify fundamentals and applications of smart dust technology,followed by its architecture design of such device.And then,focus will be given on several critical issues and technical difficulties by the development trajectory and interrelated technologies of smart dust.Finally,the feasibility to achieve such integrated multi-function sensing system with MEMS manufactory engineering techniques will be addressed.
MEMS-based smart sensing system( "Smart Dust") with ultra small size and low power consumption is integrated by multi-functional sensors including information detection,process and interexchange.it also contains the composite energy system with energy harvesting system and power management programs.Such device therefore is able to work either autonomously or collaboratively.This paper is to clarify fundamentals and applications of smart dust technology,followed by its architecture design of such device.And then,focus will be given on several critical issues and technical difficulties by the development trajectory and interrelated technologies of smart dust.Finally,the feasibility to achieve such integrated multi-function sensing system with MEMS manufactory engineering techniques will be addressed.
引文
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[31]A.Nieder.Miniature stereo radio transmitter for simultaneous recording of multiple single-neuron signals from behaving owls[J].Journal of Neuroscience Methods,2000,101(2):157-164.
[32]Irazoqui-Pastor,I.Mody,and J.W.Judy.Transcutaneous RFpowered neural recording device[A].Conference Proceedings.Second Joint EMBS-BMES Conference 2002.24th Annual International Conference of the Engineering in Medicine and Biology Society.Annual Fall Meeting of the Biomedical Engineering Society[C].Piscataway:IEEE,2002.2105-2106.
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[34]I.Obeid,M.A.L.Nicolelis,P.D.Wolf.A multichannel telemetry system for single unit neural recordings[J].Journal of Neuroscience Methods,2004,133(1-2):123-135.
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[36]Yang B.Ultra Small Antenna and Low Power Receiver for Smart Dust Wireless Sensor Networks[D].America:University of Maryland,2009.
[37]Jin P,Lin C C,ZiolkowsM R W.Multifunctional,electrically small,planar near-field resonant parasitic antennas[J].Antennas and Wireless Propagation Letters,2012(ll):200-204.
[38]Ziolkowski R W,Jin P,Lin C C.Planar,multi-band,linear and circular polarized,electrically small,near field resonant parasitic antennas and their smart dust applications[A].2011International Workshop on Antenna Technology(iWAT2011).Small Antennas,Novel Structures and Innovative Metamaterials[C].Piscataway:IEEE,2011.21-24.
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[40]Kahn J M,Katz R H,Pister K S J.Next century challenges:mobile networking for"Smart Dust"[A].MobiCom'99.Proceedings of Fifth Annual ACM/IEEE International Conference on Mobile Computing and Networking[C].New York:ACM,1999.271-278.
[41]Brett A.Warneke,Kristofer S.J.Pister.Exploring the Limits of System Integration with Smart Dust[A].2002 ASME International Mechanical Engineering Congress and Exposition[C].New York:American Society of Mechanical Engineers,2002.621-625.
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[43]O'brien D,Liu J,Faulkner G,et al.Design and implementation of optical wireless communications with optically powered smart dust motes[J].IEEE Journal on Selected Areas in Communications,2009,27(9):1646-1653.
[44]O'Brien D.Architectures for future sensor networks[A].2013IEEE Photonics Conference[C].Washington,DC:IEEE Computer Society,2013.505-506.
[45]D.C.O'Brien,S.Sivathasan.Optical wireless sensor networks,"in Advanced Optical Wireless Communication Systems[M]//Shlomi Arnon.John Barry,George Karagiannidis,et al.Advanced Optical Wireless Communication Systems.England:Cambridge University Press,2011.369-387.
[46]S.Sivathasan and D.O'Brien.Radio Frequency/Free Space Optical and Radio Frequency-only Wireless Sensor Networks:A Comparative Study of Performance[J].JETE Journal of Research,2010,56(1):52-61.
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