用于线纹显微图像的边缘检测算法
|
摘要
为了在简化计算的同时达到较高的定位精度,提出一种轴向邻域和差边缘检测算法,用于低信噪比、缓慢过渡的微结构显微图像的边缘检测。首先,结合显微图像采集系统的配置,分析了线纹显微图像边缘灰度轮廓特征和基于导数的边缘检测算法的不足。然后,基于方向信息测度,定义了轴向邻域和差运算,依据矩不变理论推导出轴向邻域和差边缘检测算法。实验结果表明:轴向邻域和差边缘检测算法能够适应不同分辨率的显微图像,具有较强的抗噪能力和较高的定位精度,边缘检测效果优于基于导数的算法。该算法用于显微图像时,其边缘坐标定位方差为0.57pixel,微米级线条宽度的测量结果与扫描电子显微镜的测量结果(1.35μm)相差0.17μm,基本满足了测量精度的要求。
To simplify computation and to achieve higher positioning accuracy,a Sum and Difference of Neighborhoods along Axis(SDNAA)algorithm was proposed to implement the edge detection of a microscopic image with a lower signal-to-noise ratio and lower transition.Firstly,characteristics of gray profile of the line microscopic image was analyzed and the inadequacy of derivative based edge detection was analyzed according to the configuration of the microscope imaging system.Then,the computation was defined for the SDNAA algorithm based on the orientation information measure,and the SDNAA edge detection algorithm was derived according to the moment invariant theory.Experimental results indicate that the SDNAA algorithm adapts to different resolution images.It has strong anti-noise ability and high positioning accuracy,which is superior to that of the derivative based edge detection algorithm.Using the algorithm for microscopic images with low signal-to-noise ratio and low contrast,the variance of located edge coordinates is 0.57 pixel,and the measurementresult of micro line width deviates from that of SEM(1.35μm)by 0.17μm,which reaches the expected precision.
To simplify computation and to achieve higher positioning accuracy,a Sum and Difference of Neighborhoods along Axis(SDNAA)algorithm was proposed to implement the edge detection of a microscopic image with a lower signal-to-noise ratio and lower transition.Firstly,characteristics of gray profile of the line microscopic image was analyzed and the inadequacy of derivative based edge detection was analyzed according to the configuration of the microscope imaging system.Then,the computation was defined for the SDNAA algorithm based on the orientation information measure,and the SDNAA edge detection algorithm was derived according to the moment invariant theory.Experimental results indicate that the SDNAA algorithm adapts to different resolution images.It has strong anti-noise ability and high positioning accuracy,which is superior to that of the derivative based edge detection algorithm.Using the algorithm for microscopic images with low signal-to-noise ratio and low contrast,the variance of located edge coordinates is 0.57 pixel,and the measurementresult of micro line width deviates from that of SEM(1.35μm)by 0.17μm,which reaches the expected precision.
引文
[1]王向军,王峰.显微精密成像与微型机械尺寸检测技术[J].光学精密工程,2001,9(6):511-513.WANG X J,WANG F.Study of micro mechanical size inspection technology by microscope precision digital image[J].Opt.precision Eng.,2001,9(6):511-513.(in Chinese)
[2]董敬涛.Linnik偏振白光干涉微纳测量的关键技术研究[D].合肥:合肥工业大学,2012.DONG J T.Key techniques of Linnik polarizationsensitive white light interferometry in Micro/Nano measurement[D].Hefei:Hefei University of Technology,2012.(in Chinese)
[3]李娟.白光显微干涉表面形貌三维测量系统的研究[D].武汉:华中科技大学,2012.LI J.A system based on white-light interference microscopy for 3-D surface topography measurement[D].Wuhan:Huazhong University of Science and Techn ology,2012.(in Chinese)
[4]赵勇.高分辨率微分移相干涉显微测量系统的研究[D].哈尔滨:哈尔滨工业大学,2012.ZHAO Y.Research of high-resolution measuring system based on differential phase-shifting interference microscopy[D].Harbin:Harbin University of Technology,2012.(in Chinese)
[5]张宪民,龙学俊,林容周.基于视觉的三自由度微动平台输入耦合研究[J].振动测试与诊断,2013,33(1):1-5.ZHANG X M,LONG X J,LIN R ZH.Research on input couple of 3DOF micro positioning stage based on vision[J].Journal of Vibration Measurement and Diagnosis,2013,33(1):1-5.(in Chinese)
[6]陆毅华.基于显微视觉导向的光掩模特征尺寸的精密测量与研究[D].广州:华南理工大学,2010.LU Y H.Research and precision measurement on critical dimension of photomask navigated by micro vision[D].Guangzhou:South China University of Technology,2010.(in Chinese)
[7]李君兰,张大卫,王以忠,等.面向IC封装的显微视觉定位系统[J].光学精密工程,2010,18(4):965-972.LI J L,ZHANG D W,WANG Y ZH,et al..Micro-vision positioning systems for IC packaging[J].Opt.Precision Eng.,2010,18(4):965-972.(in Chinese)
[8]贺锋涛,刘佳,王翀.高分辨率405nm激光显微测量系统[J].西北工业大学学报:自然科学版,2011,41(4):603-605.HE F T,LIU J,WANG CH.The micro-measurement system for high-resolution 405nm laser[J].Journal of Northwest University:Natural Science edition,2011,41(4):603-605.(in Chinese)
[9]杜华月,顾济华,杨勇,等.数字图像消卷积在显微测量中的应用[J].光学技术,2007,33(4):576-579.DU H Y,GU J H,YNAG Y,et al..Microscopic measurement using deconvolution of digital images[J].Optical Technique,2007,33(4):576-579.(in Chinese)
[10]余金栋,张宪民,陈忠.尺度优化的Retinex增强算法与微视觉图像增强[J].华南理工大学学报:自然科学版,2013,41(2):7-11.YU J D,ZHANG X M,CHEN ZH.Retinex enhancement algorithm with scale optimization and micro vision image enhancement[J].Journal of South China University of Technology:Natural Science Edition,2013,41(2):7-11.(in Chinese)
[11]杜芳.基于显微视觉的小模数渐开线直齿轮检测方法研究[D].北京:北京理工大学,2009:37-38.DU F.Research on detection technology of finepitch involute spur gears based on micro-vision[D].Beijing:Beijing Institute of Technology,2009:37-38.(in Chinese)
[12]王桥.数字图像处理[M].北京:科学出版社,2009:82-120.WANG Q.Digital Image Process[M].Beijing:Science Publishing House,2009:82-120.(in Chinese)
[13]张之敬,程朋乐,金鑫,等.具有统计特征的微小型零件边缘识别技术[J].北京理工大学学报,2007,27(3):231-234.ZHANG ZH J,CHENG P L,JIN X,et al..Edge detection technique for micro accessory edges having statistical characters[J].Transactions of Beijing Institute of Technology,2007,27(3):231-234.(in Chinese)
[14]张林,张之敬,杜芳,等.基于工艺匹配的微小型结构件边缘检测方法[J].北京理工大学学报,2009,29(12):1063-1066.ZHANG L,ZHANG ZH J,DU F,et al..Processing matching principle for edge detection method of micro parts[J].Transactions of Beijing Institute of Technology,2009,29(12):1063-1066.(in Chinese)
[15]姜黎,吴伟仁,张之敬,等.微小型结构件显微图像边缘的自动识别[J].光学精密工程,2013,21(1):224-232.JIANG L,WU W R,ZHANG ZH J,et al..Automatic detection of micro image edges for micro accessories[J].Opt.Precision Eng.,2013,21(1):224-232.(in Chinese)
[16]杨烜,梁德群.基于方向信息的多尺度边缘检测方法[J].西安电子科技大学学报,1997,24(4):524-530.YANG X,LIANG D Q.Multiscale edge detection based on direction information[J].Journal of Xidian University,1997,24(4):524-530.(in Chinese)
[17]杨烜,梁德群.基于区域一致性测度的多尺度边缘检测方法[J].自动化学报,1999,25(6):757-762.YANG X,LIANG D Q.Multiscale edge detection based on region homogeneity measure[J].Acta Automatica Sinica,1999,25(6):757-762.(in Chinese)
[18]杨海军,梁德群.一种新的基于信息测度和神经网络的边缘检测方法[J].电子学报,2001,29(1):51-53.YANG H J,LIANG D Q.A new method of edge detection based on information measure and neural network[J].Acta Electronica Sinica,2001,29(1):51-53.(in Chinese)
[19]余瑞艳.基于方向信息测度的图像边缘检测[J].数学研究,2011,44(2):214-218.YU R Y.Detecting image edge based on orientation information measure[J].Journal of Mathematical Study,2011,44(2):214-218.(in Chinese)
[20]张麟兮,王保平,张艳宁,等.基于多特征和FCM的图像边缘检测方法[J].光子学报,2005,34(12):1892-1896.ZHANG L X,WANG B P,ZHANG Y N,et al..A method of image edge detection based on multiple edge features and FCM[J].Acta Photonica Sinica,2005,34(12):1892-1896.(in Chinese)
[21]李懿,张运杰,王威娜,等.基于方向信息测度的最小模糊度准则边缘检测[J].模糊系统与数学,2007,21(3):143-151.LI Y,ZHANG Y J,WANG W N,et al..Minimum fuzzy rules edge detection based on orientation information measure[J].Fuzzy Systems and Mathematics,2007,21(3):143-151.(in Chinese)
[22]HU M K.Visual pattern recognition by moment invariants[J].IRE Transactions on Information Theory,1962,8(2):179-187.
[23]LYVERS E P,MITCHELL O R,AKEY M L,et al..Subpixel measurements using a moment-based edge operator[J].IEEE Transactions on Pattern Analysis and Machine Intelligence,1989,11(12):1293-1309.
[2]董敬涛.Linnik偏振白光干涉微纳测量的关键技术研究[D].合肥:合肥工业大学,2012.DONG J T.Key techniques of Linnik polarizationsensitive white light interferometry in Micro/Nano measurement[D].Hefei:Hefei University of Technology,2012.(in Chinese)
[3]李娟.白光显微干涉表面形貌三维测量系统的研究[D].武汉:华中科技大学,2012.LI J.A system based on white-light interference microscopy for 3-D surface topography measurement[D].Wuhan:Huazhong University of Science and Techn ology,2012.(in Chinese)
[4]赵勇.高分辨率微分移相干涉显微测量系统的研究[D].哈尔滨:哈尔滨工业大学,2012.ZHAO Y.Research of high-resolution measuring system based on differential phase-shifting interference microscopy[D].Harbin:Harbin University of Technology,2012.(in Chinese)
[5]张宪民,龙学俊,林容周.基于视觉的三自由度微动平台输入耦合研究[J].振动测试与诊断,2013,33(1):1-5.ZHANG X M,LONG X J,LIN R ZH.Research on input couple of 3DOF micro positioning stage based on vision[J].Journal of Vibration Measurement and Diagnosis,2013,33(1):1-5.(in Chinese)
[6]陆毅华.基于显微视觉导向的光掩模特征尺寸的精密测量与研究[D].广州:华南理工大学,2010.LU Y H.Research and precision measurement on critical dimension of photomask navigated by micro vision[D].Guangzhou:South China University of Technology,2010.(in Chinese)
[7]李君兰,张大卫,王以忠,等.面向IC封装的显微视觉定位系统[J].光学精密工程,2010,18(4):965-972.LI J L,ZHANG D W,WANG Y ZH,et al..Micro-vision positioning systems for IC packaging[J].Opt.Precision Eng.,2010,18(4):965-972.(in Chinese)
[8]贺锋涛,刘佳,王翀.高分辨率405nm激光显微测量系统[J].西北工业大学学报:自然科学版,2011,41(4):603-605.HE F T,LIU J,WANG CH.The micro-measurement system for high-resolution 405nm laser[J].Journal of Northwest University:Natural Science edition,2011,41(4):603-605.(in Chinese)
[9]杜华月,顾济华,杨勇,等.数字图像消卷积在显微测量中的应用[J].光学技术,2007,33(4):576-579.DU H Y,GU J H,YNAG Y,et al..Microscopic measurement using deconvolution of digital images[J].Optical Technique,2007,33(4):576-579.(in Chinese)
[10]余金栋,张宪民,陈忠.尺度优化的Retinex增强算法与微视觉图像增强[J].华南理工大学学报:自然科学版,2013,41(2):7-11.YU J D,ZHANG X M,CHEN ZH.Retinex enhancement algorithm with scale optimization and micro vision image enhancement[J].Journal of South China University of Technology:Natural Science Edition,2013,41(2):7-11.(in Chinese)
[11]杜芳.基于显微视觉的小模数渐开线直齿轮检测方法研究[D].北京:北京理工大学,2009:37-38.DU F.Research on detection technology of finepitch involute spur gears based on micro-vision[D].Beijing:Beijing Institute of Technology,2009:37-38.(in Chinese)
[12]王桥.数字图像处理[M].北京:科学出版社,2009:82-120.WANG Q.Digital Image Process[M].Beijing:Science Publishing House,2009:82-120.(in Chinese)
[13]张之敬,程朋乐,金鑫,等.具有统计特征的微小型零件边缘识别技术[J].北京理工大学学报,2007,27(3):231-234.ZHANG ZH J,CHENG P L,JIN X,et al..Edge detection technique for micro accessory edges having statistical characters[J].Transactions of Beijing Institute of Technology,2007,27(3):231-234.(in Chinese)
[14]张林,张之敬,杜芳,等.基于工艺匹配的微小型结构件边缘检测方法[J].北京理工大学学报,2009,29(12):1063-1066.ZHANG L,ZHANG ZH J,DU F,et al..Processing matching principle for edge detection method of micro parts[J].Transactions of Beijing Institute of Technology,2009,29(12):1063-1066.(in Chinese)
[15]姜黎,吴伟仁,张之敬,等.微小型结构件显微图像边缘的自动识别[J].光学精密工程,2013,21(1):224-232.JIANG L,WU W R,ZHANG ZH J,et al..Automatic detection of micro image edges for micro accessories[J].Opt.Precision Eng.,2013,21(1):224-232.(in Chinese)
[16]杨烜,梁德群.基于方向信息的多尺度边缘检测方法[J].西安电子科技大学学报,1997,24(4):524-530.YANG X,LIANG D Q.Multiscale edge detection based on direction information[J].Journal of Xidian University,1997,24(4):524-530.(in Chinese)
[17]杨烜,梁德群.基于区域一致性测度的多尺度边缘检测方法[J].自动化学报,1999,25(6):757-762.YANG X,LIANG D Q.Multiscale edge detection based on region homogeneity measure[J].Acta Automatica Sinica,1999,25(6):757-762.(in Chinese)
[18]杨海军,梁德群.一种新的基于信息测度和神经网络的边缘检测方法[J].电子学报,2001,29(1):51-53.YANG H J,LIANG D Q.A new method of edge detection based on information measure and neural network[J].Acta Electronica Sinica,2001,29(1):51-53.(in Chinese)
[19]余瑞艳.基于方向信息测度的图像边缘检测[J].数学研究,2011,44(2):214-218.YU R Y.Detecting image edge based on orientation information measure[J].Journal of Mathematical Study,2011,44(2):214-218.(in Chinese)
[20]张麟兮,王保平,张艳宁,等.基于多特征和FCM的图像边缘检测方法[J].光子学报,2005,34(12):1892-1896.ZHANG L X,WANG B P,ZHANG Y N,et al..A method of image edge detection based on multiple edge features and FCM[J].Acta Photonica Sinica,2005,34(12):1892-1896.(in Chinese)
[21]李懿,张运杰,王威娜,等.基于方向信息测度的最小模糊度准则边缘检测[J].模糊系统与数学,2007,21(3):143-151.LI Y,ZHANG Y J,WANG W N,et al..Minimum fuzzy rules edge detection based on orientation information measure[J].Fuzzy Systems and Mathematics,2007,21(3):143-151.(in Chinese)
[22]HU M K.Visual pattern recognition by moment invariants[J].IRE Transactions on Information Theory,1962,8(2):179-187.
[23]LYVERS E P,MITCHELL O R,AKEY M L,et al..Subpixel measurements using a moment-based edge operator[J].IEEE Transactions on Pattern Analysis and Machine Intelligence,1989,11(12):1293-1309.